Numerical analysis of the morphological and phase changes in the TiN/Al₂O₃ coating under high current electron beam modification

• Published in: Condensed Matter Physics
• Date: 2013
• Main Authors: Pogrebnjak, A.D., Borisyuk, V.N., Bagdasaryan, A.A.
• Format: Article
• Language: English
• Published: Інститут фізики конденсованих систем НАН України 2013
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/120821
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Numerical analysis of the morphological and phase changes in the TiN/Al₂O₃ coating under high current electron beam modification / A.D. Pogrebnjak, V.N. Borisyuk, A.A. Bagdasaryan // Condensed Matter Physics. — 2013. — Т. 16, № 3. — С. 33803:1-8 . — Бібліогр.: 21 назв. — англ.

The modification of the surface structure of the hybrid coating TiN/Al₂O₃ with a low-energy high-current electron beam (NCEB) is performed. The surface roughness is considered as a function of beam current. Surfaces of the obtained samples are investigated within the two-dimensional multifractal det...