Morphology and optical properties of α-Si:Y films, obtained by electron-beam evaporation method

• Published in: Semiconductor Physics Quantum Electronics & Optoelectronics
• Date: 2005
• Main Author: Semikina, T.V.
• Format: Article
• Language: English
• Published: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 2005
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/120966
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Morphology and optical properties of α-Si:Y films, obtained by electron-beam evaporation method / T.V. Semikina // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2005. — Т. 8, № 3. — С. 19-24. — Бібліогр.: 16 назв. — англ.

This paper presents the results of AFM, Raman, IR spectroscopy and ellipsometry of α-Si:Y films prepared by electron-beam evaporation. The influence of the type and temperature of substrates, as well as the evaporation rate on film morphology, composition and optical properties are studied. The evap...