Microstructure of the relaxed (001) Si surface

MD computer simulation with the Stillinger-Weber potential have been performed to study a microstructure of silicon surface layers and relaxation processes induced by low energy ion beams. New peculiarities of relaxed (001) silicon surface were discovered by using the improved calculation scheme for...

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Опубліковано в: :Semiconductor Physics Quantum Electronics & Optoelectronics
Дата:2000
Автори: Kiv, A.E., Soloviev, V.N., Maximova, T.I.
Формат: Стаття
Мова:Англійська
Опубліковано: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 2000
Онлайн доступ:https://nasplib.isofts.kiev.ua/handle/123456789/121091
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Назва журналу:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Цитувати:Microstructure of the relaxed (001) Si surface / A.E. Kiv, V.N. Soloviev, T.I. Maximova // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2000. — Т. 3, № 2. — С. 157-160. — Бібліогр.: 15 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine
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author Kiv, A.E.
Soloviev, V.N.
Maximova, T.I.
author_facet Kiv, A.E.
Soloviev, V.N.
Maximova, T.I.
citation_txt Microstructure of the relaxed (001) Si surface / A.E. Kiv, V.N. Soloviev, T.I. Maximova // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2000. — Т. 3, № 2. — С. 157-160. — Бібліогр.: 15 назв. — англ.
collection DSpace DC
container_title Semiconductor Physics Quantum Electronics & Optoelectronics
description MD computer simulation with the Stillinger-Weber potential have been performed to study a microstructure of silicon surface layers and relaxation processes induced by low energy ion beams. New peculiarities of relaxed (001) silicon surface were discovered by using the improved calculation scheme for diamond-like structure simulation. It was established that the relaxed microstructure of clean (001) Si surface is characterized by dangling bonds in the first three near-surface layers and by non-hexagonal polygons. Besides, the dimer formation was observed not only in the first layer. New space configurations of dimers were found. Ascertained were some conditions which lead to the effect of radiation-stimulated relaxation of surface layers under the ion bombardment in the energy region of the threshold of elastic atomic displacements in silicon.
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institution Digital Library of Periodicals of National Academy of Sciences of Ukraine
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language English
last_indexed 2025-12-07T18:57:10Z
publishDate 2000
publisher Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
record_format dspace
spelling Kiv, A.E.
Soloviev, V.N.
Maximova, T.I.
2017-06-13T14:50:15Z
2017-06-13T14:50:15Z
2000
Microstructure of the relaxed (001) Si surface / A.E. Kiv, V.N. Soloviev, T.I. Maximova // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2000. — Т. 3, № 2. — С. 157-160. — Бібліогр.: 15 назв. — англ.
1560-8034
PACS: 61.60.Kw
https://nasplib.isofts.kiev.ua/handle/123456789/121091
MD computer simulation with the Stillinger-Weber potential have been performed to study a microstructure of silicon surface layers and relaxation processes induced by low energy ion beams. New peculiarities of relaxed (001) silicon surface were discovered by using the improved calculation scheme for diamond-like structure simulation. It was established that the relaxed microstructure of clean (001) Si surface is characterized by dangling bonds in the first three near-surface layers and by non-hexagonal polygons. Besides, the dimer formation was observed not only in the first layer. New space configurations of dimers were found. Ascertained were some conditions which lead to the effect of radiation-stimulated relaxation of surface layers under the ion bombardment in the energy region of the threshold of elastic atomic displacements in silicon.
en
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
Semiconductor Physics Quantum Electronics & Optoelectronics
Microstructure of the relaxed (001) Si surface
Article
published earlier
spellingShingle Microstructure of the relaxed (001) Si surface
Kiv, A.E.
Soloviev, V.N.
Maximova, T.I.
title Microstructure of the relaxed (001) Si surface
title_full Microstructure of the relaxed (001) Si surface
title_fullStr Microstructure of the relaxed (001) Si surface
title_full_unstemmed Microstructure of the relaxed (001) Si surface
title_short Microstructure of the relaxed (001) Si surface
title_sort microstructure of the relaxed (001) si surface
url https://nasplib.isofts.kiev.ua/handle/123456789/121091
work_keys_str_mv AT kivae microstructureoftherelaxed001sisurface
AT solovievvn microstructureoftherelaxed001sisurface
AT maximovati microstructureoftherelaxed001sisurface