Microstructure of the relaxed (001) Si surface

• Published in: Semiconductor Physics Quantum Electronics & Optoelectronics
• Date: 2000
• Main Authors: Kiv, A.E., Soloviev, V.N., Maximova, T.I.
• Format: Article
• Language: English
• Published: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 2000
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/121091
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Microstructure of the relaxed (001) Si surface / A.E. Kiv, V.N. Soloviev, T.I. Maximova // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2000. — Т. 3, № 2. — С. 157-160. — Бібліогр.: 15 назв. — англ.

MD computer simulation with the Stillinger-Weber potential have been performed to study a microstructure of silicon surface layers and relaxation processes induced by low energy ion beams. New peculiarities of relaxed (001) silicon surface were discovered by using the improved calculation scheme for...