APA (7th ed.) Citation

Voznyy, M., Gorley, P., & Schenderovskyy, V. (2000). Diffusion model of defect formation in silicon under light ion implantation. Semiconductor Physics Quantum Electronics & Optoelectronics.

Chicago Style (17th ed.) Citation

Voznyy, M.V, P.M Gorley, and V.A Schenderovskyy. "Diffusion Model of Defect Formation in Silicon Under Light Ion Implantation." Semiconductor Physics Quantum Electronics & Optoelectronics 2000.

MLA (8th ed.) Citation

Voznyy, M.V, et al. "Diffusion Model of Defect Formation in Silicon Under Light Ion Implantation." Semiconductor Physics Quantum Electronics & Optoelectronics, 2000.

Warning: These citations may not always be 100% accurate.