Haccart, T., Cattan, E., & Remiens, D. (2002). Dielectric, ferroelectric and piezoelectric properties of sputtered PZT thin films on Si substrates: Influence of film thickness and orientation. Semiconductor Physics Quantum Electronics & Optoelectronics.
Chicago-Zitierstil (17. Ausg.)Haccart, T., E. Cattan, und D. Remiens. "Dielectric, Ferroelectric and Piezoelectric Properties of Sputtered PZT Thin Films on Si Substrates: Influence of Film Thickness and Orientation." Semiconductor Physics Quantum Electronics & Optoelectronics 2002.
MLA-Zitierstil (8. Ausg.)Haccart, T., et al. "Dielectric, Ferroelectric and Piezoelectric Properties of Sputtered PZT Thin Films on Si Substrates: Influence of Film Thickness and Orientation." Semiconductor Physics Quantum Electronics & Optoelectronics, 2002.