Thermoelastic stresses and defect production in semiconductor-insulator structures at isothermic heating

For semiconductor structure substrates with film coating disturbances we investigated thermoelastic stresses and their effect on defect production at isothermic heating. A developed mathematical model enables one to optimize the formation and annealing conditions for structures with film coating dis...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Semiconductor Physics Quantum Electronics & Optoelectronics
Datum:2000
Hauptverfasser: Agueev, O.A., Svetlichnyi, A.M.
Format: Artikel
Sprache:Englisch
Veröffentlicht: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 2000
Online Zugang:https://nasplib.isofts.kiev.ua/handle/123456789/121167
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Назва журналу:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Zitieren:Thermoelastic stresses and defect production in semiconductor-insulator structures at isothermic heating / O.A. Agueev, A.M. Svetlichnyi // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2000. — Т. 3, № 3. — С. 338-342. — Бібліогр.: 12 назв. — англ.

Institution

Digital Library of Periodicals of National Academy of Sciences of Ukraine
_version_ 1862697043907051520
author Agueev, O.A.
Svetlichnyi, A.M.
author_facet Agueev, O.A.
Svetlichnyi, A.M.
citation_txt Thermoelastic stresses and defect production in semiconductor-insulator structures at isothermic heating / O.A. Agueev, A.M. Svetlichnyi // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2000. — Т. 3, № 3. — С. 338-342. — Бібліогр.: 12 назв. — англ.
collection DSpace DC
container_title Semiconductor Physics Quantum Electronics & Optoelectronics
description For semiconductor structure substrates with film coating disturbances we investigated thermoelastic stresses and their effect on defect production at isothermic heating. A developed mathematical model enables one to optimize the formation and annealing conditions for structures with film coating disturbances during annealing when manufacturing integrated microcircuits.
first_indexed 2025-12-07T16:29:06Z
format Article
fulltext
id nasplib_isofts_kiev_ua-123456789-121167
institution Digital Library of Periodicals of National Academy of Sciences of Ukraine
issn 1560-8034
language English
last_indexed 2025-12-07T16:29:06Z
publishDate 2000
publisher Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
record_format dspace
spelling Agueev, O.A.
Svetlichnyi, A.M.
2017-06-13T16:16:10Z
2017-06-13T16:16:10Z
2000
Thermoelastic stresses and defect production in semiconductor-insulator structures at isothermic heating / O.A. Agueev, A.M. Svetlichnyi // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2000. — Т. 3, № 3. — С. 338-342. — Бібліогр.: 12 назв. — англ.
1560-8034
PACS: 61.72.H, 73.40.Q
https://nasplib.isofts.kiev.ua/handle/123456789/121167
For semiconductor structure substrates with film coating disturbances we investigated thermoelastic stresses and their effect on defect production at isothermic heating. A developed mathematical model enables one to optimize the formation and annealing conditions for structures with film coating disturbances during annealing when manufacturing integrated microcircuits.
en
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
Semiconductor Physics Quantum Electronics & Optoelectronics
Thermoelastic stresses and defect production in semiconductor-insulator structures at isothermic heating
Article
published earlier
spellingShingle Thermoelastic stresses and defect production in semiconductor-insulator structures at isothermic heating
Agueev, O.A.
Svetlichnyi, A.M.
title Thermoelastic stresses and defect production in semiconductor-insulator structures at isothermic heating
title_full Thermoelastic stresses and defect production in semiconductor-insulator structures at isothermic heating
title_fullStr Thermoelastic stresses and defect production in semiconductor-insulator structures at isothermic heating
title_full_unstemmed Thermoelastic stresses and defect production in semiconductor-insulator structures at isothermic heating
title_short Thermoelastic stresses and defect production in semiconductor-insulator structures at isothermic heating
title_sort thermoelastic stresses and defect production in semiconductor-insulator structures at isothermic heating
url https://nasplib.isofts.kiev.ua/handle/123456789/121167
work_keys_str_mv AT agueevoa thermoelasticstressesanddefectproductioninsemiconductorinsulatorstructuresatisothermicheating
AT svetlichnyiam thermoelasticstressesanddefectproductioninsemiconductorinsulatorstructuresatisothermicheating