Thermoelastic stresses and defect production in semiconductor-insulator structures at isothermic heating
For semiconductor structure substrates with film coating disturbances we investigated thermoelastic stresses and their effect on defect production at isothermic heating. A developed mathematical model enables one to optimize the formation and annealing conditions for structures with film coating dis...
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| Опубліковано в: : | Semiconductor Physics Quantum Electronics & Optoelectronics |
|---|---|
| Дата: | 2000 |
| Автори: | , |
| Формат: | Стаття |
| Мова: | Англійська |
| Опубліковано: |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
2000
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| Онлайн доступ: | https://nasplib.isofts.kiev.ua/handle/123456789/121167 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Цитувати: | Thermoelastic stresses and defect production in semiconductor-insulator structures at isothermic heating / O.A. Agueev, A.M. Svetlichnyi // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2000. — Т. 3, № 3. — С. 338-342. — Бібліогр.: 12 назв. — англ. |
Репозитарії
Digital Library of Periodicals of National Academy of Sciences of Ukraine| _version_ | 1862697043907051520 |
|---|---|
| author | Agueev, O.A. Svetlichnyi, A.M. |
| author_facet | Agueev, O.A. Svetlichnyi, A.M. |
| citation_txt | Thermoelastic stresses and defect production in semiconductor-insulator structures at isothermic heating / O.A. Agueev, A.M. Svetlichnyi // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2000. — Т. 3, № 3. — С. 338-342. — Бібліогр.: 12 назв. — англ. |
| collection | DSpace DC |
| container_title | Semiconductor Physics Quantum Electronics & Optoelectronics |
| description | For semiconductor structure substrates with film coating disturbances we investigated thermoelastic stresses and their effect on defect production at isothermic heating. A developed mathematical model enables one to optimize the formation and annealing conditions for structures with film coating disturbances during annealing when manufacturing integrated microcircuits.
|
| first_indexed | 2025-12-07T16:29:06Z |
| format | Article |
| fulltext | |
| id | nasplib_isofts_kiev_ua-123456789-121167 |
| institution | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| issn | 1560-8034 |
| language | English |
| last_indexed | 2025-12-07T16:29:06Z |
| publishDate | 2000 |
| publisher | Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
| record_format | dspace |
| spelling | Agueev, O.A. Svetlichnyi, A.M. 2017-06-13T16:16:10Z 2017-06-13T16:16:10Z 2000 Thermoelastic stresses and defect production in semiconductor-insulator structures at isothermic heating / O.A. Agueev, A.M. Svetlichnyi // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2000. — Т. 3, № 3. — С. 338-342. — Бібліогр.: 12 назв. — англ. 1560-8034 PACS: 61.72.H, 73.40.Q https://nasplib.isofts.kiev.ua/handle/123456789/121167 For semiconductor structure substrates with film coating disturbances we investigated thermoelastic stresses and their effect on defect production at isothermic heating. A developed mathematical model enables one to optimize the formation and annealing conditions for structures with film coating disturbances during annealing when manufacturing integrated microcircuits. en Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України Semiconductor Physics Quantum Electronics & Optoelectronics Thermoelastic stresses and defect production in semiconductor-insulator structures at isothermic heating Article published earlier |
| spellingShingle | Thermoelastic stresses and defect production in semiconductor-insulator structures at isothermic heating Agueev, O.A. Svetlichnyi, A.M. |
| title | Thermoelastic stresses and defect production in semiconductor-insulator structures at isothermic heating |
| title_full | Thermoelastic stresses and defect production in semiconductor-insulator structures at isothermic heating |
| title_fullStr | Thermoelastic stresses and defect production in semiconductor-insulator structures at isothermic heating |
| title_full_unstemmed | Thermoelastic stresses and defect production in semiconductor-insulator structures at isothermic heating |
| title_short | Thermoelastic stresses and defect production in semiconductor-insulator structures at isothermic heating |
| title_sort | thermoelastic stresses and defect production in semiconductor-insulator structures at isothermic heating |
| url | https://nasplib.isofts.kiev.ua/handle/123456789/121167 |
| work_keys_str_mv | AT agueevoa thermoelasticstressesanddefectproductioninsemiconductorinsulatorstructuresatisothermicheating AT svetlichnyiam thermoelasticstressesanddefectproductioninsemiconductorinsulatorstructuresatisothermicheating |