Ahmad, I., Omar, A., & Mikdad, A. (2002). The effect of doping methods on electrical properties and micromorphology of polysilicon gate electrode in submicron CMOS devices. Semiconductor Physics Quantum Electronics & Optoelectronics.
Chicago-Zitierstil (17. Ausg.)Ahmad, I., A. Omar, und A. Mikdad. "The Effect of Doping Methods on Electrical Properties and Micromorphology of Polysilicon Gate Electrode in Submicron CMOS Devices." Semiconductor Physics Quantum Electronics & Optoelectronics 2002.
MLA-Zitierstil (8. Ausg.)Ahmad, I., et al. "The Effect of Doping Methods on Electrical Properties and Micromorphology of Polysilicon Gate Electrode in Submicron CMOS Devices." Semiconductor Physics Quantum Electronics & Optoelectronics, 2002.
Achtung: Diese Zitate sind unter Umständen nicht zu 100% korrekt.