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Simulation of low angle X-ray diffraction on multilayers subjected to diffusion

Calculative method based on the Riccatti type differential equation was tested for simulation of low angle X-ray diffraction patterns from the one-dimensionally ordered multilayer. Some peculiarities of diffraction were revealed connected with asymmetrical distortion of the multilayer profile due to...

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Bibliographic Details
Published in:	Semiconductor Physics Quantum Electronics & Optoelectronics
Date:	2000
Main Author:	Fedorov, A.G.
Format:	Article
Language:	English
Published:	Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 2000
Online Access:	https://nasplib.isofts.kiev.ua/handle/123456789/121196
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Journal Title:	Digital Library of Periodicals of National Academy of Sciences of Ukraine
Cite this:	Simulation of low angle X-ray diffraction on multilayers subjected to diffusion / A.G. Fedorov // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2000. — Т. 3, № 4. — С. 554-557. — Бібліогр.: 6 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine

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