Pashchenko, G., Kravetskyi, M., & Fomin, A. (2015). Modeling the process of removal aimed at cut traces on semiconductor wafers by using the method of contactless chemical-and-dynamical polishing. Semiconductor Physics Quantum Electronics & Optoelectronics.
Chicago Style (17th ed.) CitationPashchenko, G.A, M.Yu Kravetskyi, and A.V Fomin. "Modeling the Process of Removal Aimed at Cut Traces on Semiconductor Wafers by Using the Method of Contactless Chemical-and-dynamical Polishing." Semiconductor Physics Quantum Electronics & Optoelectronics 2015.
MLA (8th ed.) CitationPashchenko, G.A, et al. "Modeling the Process of Removal Aimed at Cut Traces on Semiconductor Wafers by Using the Method of Contactless Chemical-and-dynamical Polishing." Semiconductor Physics Quantum Electronics & Optoelectronics, 2015.