Surface polariton excitation in ZnO films deposited using ALD

The conductive ZnO films deposited using atomic layer deposition (ALD) on the optical glass substrates were studied using the modified method of the disturbed total internal reflection within the range 400…1400 cm⁻¹ for the first time. The frequency “windows” with the obtained excited surface phonon...

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Veröffentlicht in:Semiconductor Physics Quantum Electronics & Optoelectronics
Datum:2015
Hauptverfasser: Venger, E.F., Melnichuk, L.Yu., Melnichuk, A.V., Semikina, T.V.
Format: Artikel
Sprache:Englisch
Veröffentlicht: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 2015
Online Zugang:https://nasplib.isofts.kiev.ua/handle/123456789/121268
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Zitieren:Surface polariton excitation in ZnO films deposited using ALD / E.F. Venger, L.Yu. Melnichuk, A.V. Melnichuk, T.V. Semikina // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2015. — Т. 18, № 4. — С. 422-427. — Бібліогр.: 15 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine
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author Venger, E.F.
Melnichuk, L.Yu.
Melnichuk, A.V.
Semikina, T.V.
author_facet Venger, E.F.
Melnichuk, L.Yu.
Melnichuk, A.V.
Semikina, T.V.
citation_txt Surface polariton excitation in ZnO films deposited using ALD / E.F. Venger, L.Yu. Melnichuk, A.V. Melnichuk, T.V. Semikina // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2015. — Т. 18, № 4. — С. 422-427. — Бібліогр.: 15 назв. — англ.
collection DSpace DC
container_title Semiconductor Physics Quantum Electronics & Optoelectronics
description The conductive ZnO films deposited using atomic layer deposition (ALD) on the optical glass substrates were studied using the modified method of the disturbed total internal reflection within the range 400…1400 cm⁻¹ for the first time. The frequency “windows” with the obtained excited surface phonon and plasmon-phonon polaritons have been found in the measured infrared reflectance spectra. The dispersion response of high and low frequency branches of the IR spectra have been presented.
first_indexed 2025-12-07T18:20:09Z
format Article
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id nasplib_isofts_kiev_ua-123456789-121268
institution Digital Library of Periodicals of National Academy of Sciences of Ukraine
issn 1560-8034
language English
last_indexed 2025-12-07T18:20:09Z
publishDate 2015
publisher Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
record_format dspace
spelling Venger, E.F.
Melnichuk, L.Yu.
Melnichuk, A.V.
Semikina, T.V.
2017-06-13T18:28:05Z
2017-06-13T18:28:05Z
2015
Surface polariton excitation in ZnO films deposited using ALD / E.F. Venger, L.Yu. Melnichuk, A.V. Melnichuk, T.V. Semikina // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2015. — Т. 18, № 4. — С. 422-427. — Бібліогр.: 15 назв. — англ.
1560-8034
DOI: 10.15407/spqeo18.04.422
PACS 71.36.+c, 73.20.20.Mf
https://nasplib.isofts.kiev.ua/handle/123456789/121268
The conductive ZnO films deposited using atomic layer deposition (ALD) on the optical glass substrates were studied using the modified method of the disturbed total internal reflection within the range 400…1400 cm⁻¹ for the first time. The frequency “windows” with the obtained excited surface phonon and plasmon-phonon polaritons have been found in the measured infrared reflectance spectra. The dispersion response of high and low frequency branches of the IR spectra have been presented.
Author Semikina T.V. expresses gratitude to Prof. M.Godlewski (Warsaw, Poland) for possibility of providing this experimental work and deposition of ZnO films by using the ALD equipment Savannah-100
en
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
Semiconductor Physics Quantum Electronics & Optoelectronics
Surface polariton excitation in ZnO films deposited using ALD
Article
published earlier
spellingShingle Surface polariton excitation in ZnO films deposited using ALD
Venger, E.F.
Melnichuk, L.Yu.
Melnichuk, A.V.
Semikina, T.V.
title Surface polariton excitation in ZnO films deposited using ALD
title_full Surface polariton excitation in ZnO films deposited using ALD
title_fullStr Surface polariton excitation in ZnO films deposited using ALD
title_full_unstemmed Surface polariton excitation in ZnO films deposited using ALD
title_short Surface polariton excitation in ZnO films deposited using ALD
title_sort surface polariton excitation in zno films deposited using ald
url https://nasplib.isofts.kiev.ua/handle/123456789/121268
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