Surface polariton excitation in ZnO films deposited using ALD

The conductive ZnO films deposited using atomic layer deposition (ALD) on the optical glass substrates were studied using the modified method of the disturbed total internal reflection within the range 400…1400 cm⁻¹ for the first time. The frequency “windows” with the obtained excited surface phonon...

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Опубліковано в: :Semiconductor Physics Quantum Electronics & Optoelectronics
Дата:2015
Автори: Venger, E.F., Melnichuk, L.Yu., Melnichuk, A.V., Semikina, T.V.
Формат: Стаття
Мова:English
Опубліковано: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 2015
Онлайн доступ:https://nasplib.isofts.kiev.ua/handle/123456789/121268
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Назва журналу:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Цитувати:Surface polariton excitation in ZnO films deposited using ALD / E.F. Venger, L.Yu. Melnichuk, A.V. Melnichuk, T.V. Semikina // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2015. — Т. 18, № 4. — С. 422-427. — Бібліогр.: 15 назв. — англ.

Репозитарії

Digital Library of Periodicals of National Academy of Sciences of Ukraine
id nasplib_isofts_kiev_ua-123456789-121268
record_format dspace
spelling Venger, E.F.
Melnichuk, L.Yu.
Melnichuk, A.V.
Semikina, T.V.
2017-06-13T18:28:05Z
2017-06-13T18:28:05Z
2015
Surface polariton excitation in ZnO films deposited using ALD / E.F. Venger, L.Yu. Melnichuk, A.V. Melnichuk, T.V. Semikina // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2015. — Т. 18, № 4. — С. 422-427. — Бібліогр.: 15 назв. — англ.
1560-8034
DOI: 10.15407/spqeo18.04.422
PACS 71.36.+c, 73.20.20.Mf
https://nasplib.isofts.kiev.ua/handle/123456789/121268
The conductive ZnO films deposited using atomic layer deposition (ALD) on the optical glass substrates were studied using the modified method of the disturbed total internal reflection within the range 400…1400 cm⁻¹ for the first time. The frequency “windows” with the obtained excited surface phonon and plasmon-phonon polaritons have been found in the measured infrared reflectance spectra. The dispersion response of high and low frequency branches of the IR spectra have been presented.
Author Semikina T.V. expresses gratitude to Prof. M.Godlewski (Warsaw, Poland) for possibility of providing this experimental work and deposition of ZnO films by using the ALD equipment Savannah-100
en
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
Semiconductor Physics Quantum Electronics & Optoelectronics
Surface polariton excitation in ZnO films deposited using ALD
Article
published earlier
institution Digital Library of Periodicals of National Academy of Sciences of Ukraine
collection DSpace DC
title Surface polariton excitation in ZnO films deposited using ALD
spellingShingle Surface polariton excitation in ZnO films deposited using ALD
Venger, E.F.
Melnichuk, L.Yu.
Melnichuk, A.V.
Semikina, T.V.
title_short Surface polariton excitation in ZnO films deposited using ALD
title_full Surface polariton excitation in ZnO films deposited using ALD
title_fullStr Surface polariton excitation in ZnO films deposited using ALD
title_full_unstemmed Surface polariton excitation in ZnO films deposited using ALD
title_sort surface polariton excitation in zno films deposited using ald
author Venger, E.F.
Melnichuk, L.Yu.
Melnichuk, A.V.
Semikina, T.V.
author_facet Venger, E.F.
Melnichuk, L.Yu.
Melnichuk, A.V.
Semikina, T.V.
publishDate 2015
language English
container_title Semiconductor Physics Quantum Electronics & Optoelectronics
publisher Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
format Article
description The conductive ZnO films deposited using atomic layer deposition (ALD) on the optical glass substrates were studied using the modified method of the disturbed total internal reflection within the range 400…1400 cm⁻¹ for the first time. The frequency “windows” with the obtained excited surface phonon and plasmon-phonon polaritons have been found in the measured infrared reflectance spectra. The dispersion response of high and low frequency branches of the IR spectra have been presented.
issn 1560-8034
url https://nasplib.isofts.kiev.ua/handle/123456789/121268
citation_txt Surface polariton excitation in ZnO films deposited using ALD / E.F. Venger, L.Yu. Melnichuk, A.V. Melnichuk, T.V. Semikina // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2015. — Т. 18, № 4. — С. 422-427. — Бібліогр.: 15 назв. — англ.
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AT semikinatv surfacepolaritonexcitationinznofilmsdepositedusingald
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