Nanopatterning Au chips for SPR refractometer by using interference lithography and chalcogenide photoresist
This study reports on development of the interference lithography (IL) technique applying the resist based on chalcogenide glass films for fabrication of gold chips in the nform of periodic surface nanostructures for surface plasmon resonance (SPR) refractometers. The IL technique was optimized for...
Збережено в:
| Опубліковано в: : | Semiconductor Physics Quantum Electronics & Optoelectronics |
|---|---|
| Дата: | 2015 |
| Автори: | , , , , , , , , |
| Формат: | Стаття |
| Мова: | Англійська |
| Опубліковано: |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
2015
|
| Онлайн доступ: | https://nasplib.isofts.kiev.ua/handle/123456789/121271 |
| Теги: |
Додати тег
Немає тегів, Будьте першим, хто поставить тег для цього запису!
|
| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Цитувати: | Nanopatterning Au chips for SPR refractometer by using interference lithography and chalcogenide photoresist / V.A. Dan’ko, G.V. Dorozinsky, I.Z. Indutnyi, V.I. Myn’ko, Yu.V. Ushenin, P.E. Shepeliavyi, M.V. Lukaniuk, A.A. Korchovyi, R.V. Khrystosenko // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2015. — Т. 18, № 4. — С. 438-442. — Бібліогр.: 15 назв. — англ. |
Репозитарії
Digital Library of Periodicals of National Academy of Sciences of Ukraine| _version_ | 1862630496572276736 |
|---|---|
| author | Dan’ko, V.A. Dorozinsky, G.V. Indutnyi, I.Z. Myn’ko, V.I. Ushenin, Yu.V. Shepeliavyi, P.E. Lukaniuk, M.V. Korchovyi, A.A. Khrystosenko, R.V. |
| author_facet | Dan’ko, V.A. Dorozinsky, G.V. Indutnyi, I.Z. Myn’ko, V.I. Ushenin, Yu.V. Shepeliavyi, P.E. Lukaniuk, M.V. Korchovyi, A.A. Khrystosenko, R.V. |
| citation_txt | Nanopatterning Au chips for SPR refractometer by using interference lithography and chalcogenide photoresist / V.A. Dan’ko, G.V. Dorozinsky, I.Z. Indutnyi, V.I. Myn’ko, Yu.V. Ushenin, P.E. Shepeliavyi, M.V. Lukaniuk, A.A. Korchovyi, R.V. Khrystosenko // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2015. — Т. 18, № 4. — С. 438-442. — Бібліогр.: 15 назв. — англ. |
| collection | DSpace DC |
| container_title | Semiconductor Physics Quantum Electronics & Optoelectronics |
| description | This study reports on development of the interference lithography (IL) technique applying the resist based on chalcogenide glass films for fabrication of gold chips in the nform of periodic surface nanostructures for surface plasmon resonance (SPR) refractometers. The IL technique was optimized for patterning the Au layers and formation of one-dimensional (grating) structures with the spatial frequency close to 3300 mm⁻¹. The spatial frequency and depth of grating grooves were selected with account of the condition for Bragg reflection of plasmons at the operation wavelength of SPR refractometer and given environment (which is a condition for enhancing biosensor sensitivity as compared to that of a flat Au chip surface). It has experimentally been demonstrated that the use of diffraction patterns in SPR sensor increases its response by 17%.
|
| first_indexed | 2025-11-30T10:07:56Z |
| format | Article |
| fulltext | |
| id | nasplib_isofts_kiev_ua-123456789-121271 |
| institution | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| issn | 1560-8034 |
| language | English |
| last_indexed | 2025-11-30T10:07:56Z |
| publishDate | 2015 |
| publisher | Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
| record_format | dspace |
| spelling | Dan’ko, V.A. Dorozinsky, G.V. Indutnyi, I.Z. Myn’ko, V.I. Ushenin, Yu.V. Shepeliavyi, P.E. Lukaniuk, M.V. Korchovyi, A.A. Khrystosenko, R.V. 2017-06-13T18:57:57Z 2017-06-13T18:57:57Z 2015 Nanopatterning Au chips for SPR refractometer by using interference lithography and chalcogenide photoresist / V.A. Dan’ko, G.V. Dorozinsky, I.Z. Indutnyi, V.I. Myn’ko, Yu.V. Ushenin, P.E. Shepeliavyi, M.V. Lukaniuk, A.A. Korchovyi, R.V. Khrystosenko // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2015. — Т. 18, № 4. — С. 438-442. — Бібліогр.: 15 назв. — англ. 1560-8034 DOI: 10.15407/spqeo18.04.438 PACS 73.20.Mf, 78.67.-n, 81.16.nd, 85.40.Hp https://nasplib.isofts.kiev.ua/handle/123456789/121271 This study reports on development of the interference lithography (IL) technique applying the resist based on chalcogenide glass films for fabrication of gold chips in the nform of periodic surface nanostructures for surface plasmon resonance (SPR) refractometers. The IL technique was optimized for patterning the Au layers and formation of one-dimensional (grating) structures with the spatial frequency close to 3300 mm⁻¹. The spatial frequency and depth of grating grooves were selected with account of the condition for Bragg reflection of plasmons at the operation wavelength of SPR refractometer and given environment (which is a condition for enhancing biosensor sensitivity as compared to that of a flat Au chip surface). It has experimentally been demonstrated that the use of diffraction patterns in SPR sensor increases its response by 17%. The authors gratefully acknowledge that this work have been partly funded by the Swiss National Science Foundation (SNSF, Bern) under grant no. IZ73Z0_152661 (SCOPES). en Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України Semiconductor Physics Quantum Electronics & Optoelectronics Nanopatterning Au chips for SPR refractometer by using interference lithography and chalcogenide photoresist Article published earlier |
| spellingShingle | Nanopatterning Au chips for SPR refractometer by using interference lithography and chalcogenide photoresist Dan’ko, V.A. Dorozinsky, G.V. Indutnyi, I.Z. Myn’ko, V.I. Ushenin, Yu.V. Shepeliavyi, P.E. Lukaniuk, M.V. Korchovyi, A.A. Khrystosenko, R.V. |
| title | Nanopatterning Au chips for SPR refractometer by using interference lithography and chalcogenide photoresist |
| title_full | Nanopatterning Au chips for SPR refractometer by using interference lithography and chalcogenide photoresist |
| title_fullStr | Nanopatterning Au chips for SPR refractometer by using interference lithography and chalcogenide photoresist |
| title_full_unstemmed | Nanopatterning Au chips for SPR refractometer by using interference lithography and chalcogenide photoresist |
| title_short | Nanopatterning Au chips for SPR refractometer by using interference lithography and chalcogenide photoresist |
| title_sort | nanopatterning au chips for spr refractometer by using interference lithography and chalcogenide photoresist |
| url | https://nasplib.isofts.kiev.ua/handle/123456789/121271 |
| work_keys_str_mv | AT dankova nanopatterningauchipsforsprrefractometerbyusinginterferencelithographyandchalcogenidephotoresist AT dorozinskygv nanopatterningauchipsforsprrefractometerbyusinginterferencelithographyandchalcogenidephotoresist AT indutnyiiz nanopatterningauchipsforsprrefractometerbyusinginterferencelithographyandchalcogenidephotoresist AT mynkovi nanopatterningauchipsforsprrefractometerbyusinginterferencelithographyandchalcogenidephotoresist AT usheninyuv nanopatterningauchipsforsprrefractometerbyusinginterferencelithographyandchalcogenidephotoresist AT shepeliavyipe nanopatterningauchipsforsprrefractometerbyusinginterferencelithographyandchalcogenidephotoresist AT lukaniukmv nanopatterningauchipsforsprrefractometerbyusinginterferencelithographyandchalcogenidephotoresist AT korchovyiaa nanopatterningauchipsforsprrefractometerbyusinginterferencelithographyandchalcogenidephotoresist AT khrystosenkorv nanopatterningauchipsforsprrefractometerbyusinginterferencelithographyandchalcogenidephotoresist |