APA (7th ed.) Citation

Grigoriev, N., Kravetsky, M., Paschenko, G., Sypko, S., & Fomin, A. (2002). Balance model for contactless chemo-mechanical polishing of wafers. Semiconductor Physics Quantum Electronics & Optoelectronics.

Chicago Style (17th ed.) Citation

Grigoriev, N.N, M.Yu Kravetsky, G.A Paschenko, S.A Sypko, and A.V Fomin. "Balance Model for Contactless Chemo-mechanical Polishing of Wafers." Semiconductor Physics Quantum Electronics & Optoelectronics 2002.

MLA (8th ed.) Citation

Grigoriev, N.N, et al. "Balance Model for Contactless Chemo-mechanical Polishing of Wafers." Semiconductor Physics Quantum Electronics & Optoelectronics, 2002.