Grigoriev, N., Kravetsky, M., Paschenko, G., Sypko, S., & Fomin, A. (2002). Balance model for contactless chemo-mechanical polishing of wafers. Semiconductor Physics Quantum Electronics & Optoelectronics.
Chicago-Zitierstil (17. Ausg.)Grigoriev, N.N, M.Yu Kravetsky, G.A Paschenko, S.A Sypko, und A.V Fomin. "Balance Model for Contactless Chemo-mechanical Polishing of Wafers." Semiconductor Physics Quantum Electronics & Optoelectronics 2002.
MLA-Zitierstil (8. Ausg.)Grigoriev, N.N, et al. "Balance Model for Contactless Chemo-mechanical Polishing of Wafers." Semiconductor Physics Quantum Electronics & Optoelectronics, 2002.
Achtung: Diese Zitate sind unter Umständen nicht zu 100% korrekt.