Effect of microwave radiation on optical transmission spectra in SiO₂/SiC structures

We investigated the effect of microwave radiation on absorption spectra (in 400-800 nm range) and curvature radius of SiO₂/SiC structures obtained using traditional thermal oxidation in water vapor at the temperature of 1373 К and rapid thermal annealing in dry oxygen at 1273 К. From an analysis of...

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Published in:Semiconductor Physics Quantum Electronics & Optoelectronics
Date:2002
Main Authors: Bacherikov, Yu.Yu., Konakova, R.V., Kolyadina, E.Yu., Kocherov, A.N., Okhrimenko, O.B., Svetlichnyi, A.M.
Format: Article
Language:English
Published: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 2002
Online Access:https://nasplib.isofts.kiev.ua/handle/123456789/121335
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Journal Title:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Cite this:Effect of microwave radiation on optical transmission spectra in SiO₂/SiC structures / Yu.Yu. Bacherikov, R.V. Konakova, E.Yu. Kolyadina, A.N. Kocherov, O.B. Okhrimenko, A.M. Svetlichnyi // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2002. — Т. 5, № 4. — С. 391-394. — Бібліогр.: 7 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine
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author Bacherikov, Yu.Yu.
Konakova, R.V.
Kolyadina, E.Yu.
Kocherov, A.N.
Okhrimenko, O.B.
Svetlichnyi, A.M.
author_facet Bacherikov, Yu.Yu.
Konakova, R.V.
Kolyadina, E.Yu.
Kocherov, A.N.
Okhrimenko, O.B.
Svetlichnyi, A.M.
citation_txt Effect of microwave radiation on optical transmission spectra in SiO₂/SiC structures / Yu.Yu. Bacherikov, R.V. Konakova, E.Yu. Kolyadina, A.N. Kocherov, O.B. Okhrimenko, A.M. Svetlichnyi // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2002. — Т. 5, № 4. — С. 391-394. — Бібліогр.: 7 назв. — англ.
collection DSpace DC
container_title Semiconductor Physics Quantum Electronics & Optoelectronics
description We investigated the effect of microwave radiation on absorption spectra (in 400-800 nm range) and curvature radius of SiO₂/SiC structures obtained using traditional thermal oxidation in water vapor at the temperature of 1373 К and rapid thermal annealing in dry oxygen at 1273 К. From an analysis of the sample optical density and radius of curvature variations with total duration of microwave action, we concluded that the structures obtained using rapid thermal annealing are more stable against microwave action.
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language English
last_indexed 2025-12-07T15:41:16Z
publishDate 2002
publisher Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
record_format dspace
spelling Bacherikov, Yu.Yu.
Konakova, R.V.
Kolyadina, E.Yu.
Kocherov, A.N.
Okhrimenko, O.B.
Svetlichnyi, A.M.
2017-06-14T07:35:16Z
2017-06-14T07:35:16Z
2002
Effect of microwave radiation on optical transmission spectra in SiO₂/SiC structures / Yu.Yu. Bacherikov, R.V. Konakova, E.Yu. Kolyadina, A.N. Kocherov, O.B. Okhrimenko, A.M. Svetlichnyi // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2002. — Т. 5, № 4. — С. 391-394. — Бібліогр.: 7 назв. — англ.
1560-8034
PACS: 78.70.Fy, 78.70.Gq
https://nasplib.isofts.kiev.ua/handle/123456789/121335
We investigated the effect of microwave radiation on absorption spectra (in 400-800 nm range) and curvature radius of SiO₂/SiC structures obtained using traditional thermal oxidation in water vapor at the temperature of 1373 К and rapid thermal annealing in dry oxygen at 1273 К. From an analysis of the sample optical density and radius of curvature variations with total duration of microwave action, we concluded that the structures obtained using rapid thermal annealing are more stable against microwave action.
en
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
Semiconductor Physics Quantum Electronics & Optoelectronics
Effect of microwave radiation on optical transmission spectra in SiO₂/SiC structures
Article
published earlier
spellingShingle Effect of microwave radiation on optical transmission spectra in SiO₂/SiC structures
Bacherikov, Yu.Yu.
Konakova, R.V.
Kolyadina, E.Yu.
Kocherov, A.N.
Okhrimenko, O.B.
Svetlichnyi, A.M.
title Effect of microwave radiation on optical transmission spectra in SiO₂/SiC structures
title_full Effect of microwave radiation on optical transmission spectra in SiO₂/SiC structures
title_fullStr Effect of microwave radiation on optical transmission spectra in SiO₂/SiC structures
title_full_unstemmed Effect of microwave radiation on optical transmission spectra in SiO₂/SiC structures
title_short Effect of microwave radiation on optical transmission spectra in SiO₂/SiC structures
title_sort effect of microwave radiation on optical transmission spectra in sio₂/sic structures
url https://nasplib.isofts.kiev.ua/handle/123456789/121335
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AT kocherovan effectofmicrowaveradiationonopticaltransmissionspectrainsio2sicstructures
AT okhrimenkoob effectofmicrowaveradiationonopticaltransmissionspectrainsio2sicstructures
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