Effect of microwave radiation on optical transmission spectra in SiO₂/SiC structures
We investigated the effect of microwave radiation on absorption spectra (in 400-800 nm range) and curvature radius of SiO₂/SiC structures obtained using traditional thermal oxidation in water vapor at the temperature of 1373 К and rapid thermal annealing in dry oxygen at 1273 К. From an analysis of...
Gespeichert in:
| Veröffentlicht in: | Semiconductor Physics Quantum Electronics & Optoelectronics |
|---|---|
| Datum: | 2002 |
| Hauptverfasser: | , , , , , |
| Format: | Artikel |
| Sprache: | Englisch |
| Veröffentlicht: |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
2002
|
| Online Zugang: | https://nasplib.isofts.kiev.ua/handle/123456789/121335 |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Zitieren: | Effect of microwave radiation on optical transmission spectra in SiO₂/SiC structures / Yu.Yu. Bacherikov, R.V. Konakova, E.Yu. Kolyadina, A.N. Kocherov, O.B. Okhrimenko, A.M. Svetlichnyi // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2002. — Т. 5, № 4. — С. 391-394. — Бібліогр.: 7 назв. — англ. |
Institution
Digital Library of Periodicals of National Academy of Sciences of Ukraine| _version_ | 1862676164437344256 |
|---|---|
| author | Bacherikov, Yu.Yu. Konakova, R.V. Kolyadina, E.Yu. Kocherov, A.N. Okhrimenko, O.B. Svetlichnyi, A.M. |
| author_facet | Bacherikov, Yu.Yu. Konakova, R.V. Kolyadina, E.Yu. Kocherov, A.N. Okhrimenko, O.B. Svetlichnyi, A.M. |
| citation_txt | Effect of microwave radiation on optical transmission spectra in SiO₂/SiC structures / Yu.Yu. Bacherikov, R.V. Konakova, E.Yu. Kolyadina, A.N. Kocherov, O.B. Okhrimenko, A.M. Svetlichnyi // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2002. — Т. 5, № 4. — С. 391-394. — Бібліогр.: 7 назв. — англ. |
| collection | DSpace DC |
| container_title | Semiconductor Physics Quantum Electronics & Optoelectronics |
| description | We investigated the effect of microwave radiation on absorption spectra (in 400-800 nm range) and curvature radius of SiO₂/SiC structures obtained using traditional thermal oxidation in water vapor at the temperature of 1373 К and rapid thermal annealing in dry oxygen at 1273 К. From an analysis of the sample optical density and radius of curvature variations with total duration of microwave action, we concluded that the structures obtained using rapid thermal annealing are more stable against microwave action.
|
| first_indexed | 2025-12-07T15:41:16Z |
| format | Article |
| fulltext | |
| id | nasplib_isofts_kiev_ua-123456789-121335 |
| institution | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| issn | 1560-8034 |
| language | English |
| last_indexed | 2025-12-07T15:41:16Z |
| publishDate | 2002 |
| publisher | Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
| record_format | dspace |
| spelling | Bacherikov, Yu.Yu. Konakova, R.V. Kolyadina, E.Yu. Kocherov, A.N. Okhrimenko, O.B. Svetlichnyi, A.M. 2017-06-14T07:35:16Z 2017-06-14T07:35:16Z 2002 Effect of microwave radiation on optical transmission spectra in SiO₂/SiC structures / Yu.Yu. Bacherikov, R.V. Konakova, E.Yu. Kolyadina, A.N. Kocherov, O.B. Okhrimenko, A.M. Svetlichnyi // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2002. — Т. 5, № 4. — С. 391-394. — Бібліогр.: 7 назв. — англ. 1560-8034 PACS: 78.70.Fy, 78.70.Gq https://nasplib.isofts.kiev.ua/handle/123456789/121335 We investigated the effect of microwave radiation on absorption spectra (in 400-800 nm range) and curvature radius of SiO₂/SiC structures obtained using traditional thermal oxidation in water vapor at the temperature of 1373 К and rapid thermal annealing in dry oxygen at 1273 К. From an analysis of the sample optical density and radius of curvature variations with total duration of microwave action, we concluded that the structures obtained using rapid thermal annealing are more stable against microwave action. en Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України Semiconductor Physics Quantum Electronics & Optoelectronics Effect of microwave radiation on optical transmission spectra in SiO₂/SiC structures Article published earlier |
| spellingShingle | Effect of microwave radiation on optical transmission spectra in SiO₂/SiC structures Bacherikov, Yu.Yu. Konakova, R.V. Kolyadina, E.Yu. Kocherov, A.N. Okhrimenko, O.B. Svetlichnyi, A.M. |
| title | Effect of microwave radiation on optical transmission spectra in SiO₂/SiC structures |
| title_full | Effect of microwave radiation on optical transmission spectra in SiO₂/SiC structures |
| title_fullStr | Effect of microwave radiation on optical transmission spectra in SiO₂/SiC structures |
| title_full_unstemmed | Effect of microwave radiation on optical transmission spectra in SiO₂/SiC structures |
| title_short | Effect of microwave radiation on optical transmission spectra in SiO₂/SiC structures |
| title_sort | effect of microwave radiation on optical transmission spectra in sio₂/sic structures |
| url | https://nasplib.isofts.kiev.ua/handle/123456789/121335 |
| work_keys_str_mv | AT bacherikovyuyu effectofmicrowaveradiationonopticaltransmissionspectrainsio2sicstructures AT konakovarv effectofmicrowaveradiationonopticaltransmissionspectrainsio2sicstructures AT kolyadinaeyu effectofmicrowaveradiationonopticaltransmissionspectrainsio2sicstructures AT kocherovan effectofmicrowaveradiationonopticaltransmissionspectrainsio2sicstructures AT okhrimenkoob effectofmicrowaveradiationonopticaltransmissionspectrainsio2sicstructures AT svetlichnyiam effectofmicrowaveradiationonopticaltransmissionspectrainsio2sicstructures |