Effect of microwave radiation on optical transmission spectra in SiO₂/SiC structures
We investigated the effect of microwave radiation on absorption spectra (in 400-800 nm range) and curvature radius of SiO₂/SiC structures obtained using traditional thermal oxidation in water vapor at the temperature of 1373 К and rapid thermal annealing in dry oxygen at 1273 К. From an analysis of...
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| Published in: | Semiconductor Physics Quantum Electronics & Optoelectronics |
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| Date: | 2002 |
| Main Authors: | , , , , , |
| Format: | Article |
| Language: | English |
| Published: |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
2002
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| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/121335 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Effect of microwave radiation on optical transmission spectra in SiO₂/SiC structures / Yu.Yu. Bacherikov, R.V. Konakova, E.Yu. Kolyadina, A.N. Kocherov, O.B. Okhrimenko, A.M. Svetlichnyi // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2002. — Т. 5, № 4. — С. 391-394. — Бібліогр.: 7 назв. — англ. |