Protective applications of vacuum-deposited perfluoropolymer films

• Published in: Semiconductor Physics Quantum Electronics & Optoelectronics
• Date: 2016
• Main Authors: Grytsenko, K.P., Kolomzarov, Yu.V., Belyaev, O.E., Schrader, S.
• Format: Article
• Language: English
• Published: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 2016
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/121552
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Protective applications of vacuum-deposited perfluoropolymer films / K.P. Grytsenko, Yu.V. Kolomzarov, O.E. Belyaev, S. Schrader // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2016. — Т. 19, № 2. — С. 139-148. — Бібліогр.: 60 назв. — англ.

The paper summarizes in brief applications of perfluoropolymer thin films deposited from the gas phase by several different methods, for protection of various materials and devices both at the research stage and already in industry. Perfluoropolymer films protect from corrosion coated metals, attain...