Investigation of Al-ZERODUR interface by Raman and secondary ion mass spectroscopy
The interface of ZERODUR ceramics and thin aluminium film was investigated by Raman and secondary ion mass-spectroscopy techniques. Possible chemical reactions at the interface is briefly analyzed and compared with experimental data. Contributions of amorphous and crystalline phases of ZERODUR to Ra...
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| Veröffentlicht in: | Semiconductor Physics Quantum Electronics & Optoelectronics |
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| Datum: | 2005 |
| Hauptverfasser: | , , , |
| Format: | Artikel |
| Sprache: | Englisch |
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Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
2005
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| Online Zugang: | https://nasplib.isofts.kiev.ua/handle/123456789/121644 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Zitieren: | Investigation of Al-ZERODUR interface by Raman and secondary ion mass spectroscopy / L.I. Berezhinsky, V.P. Maslov V.V. Tetyorkin and V.A.Yukhymchuk // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2005. — Т. 8, № 2. — С. 37-40. — Бібліогр.: 5 назв. — англ. |
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Digital Library of Periodicals of National Academy of Sciences of Ukraine| _version_ | 1862748648017756160 |
|---|---|
| author | Berezhinsky, L.I. Yukhymchuk, V.A. Maslov, V.P. Tetyorkin, V.V. |
| author_facet | Berezhinsky, L.I. Yukhymchuk, V.A. Maslov, V.P. Tetyorkin, V.V. |
| citation_txt | Investigation of Al-ZERODUR interface by Raman and secondary ion mass spectroscopy / L.I. Berezhinsky, V.P. Maslov V.V. Tetyorkin and V.A.Yukhymchuk // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2005. — Т. 8, № 2. — С. 37-40. — Бібліогр.: 5 назв. — англ. |
| collection | DSpace DC |
| container_title | Semiconductor Physics Quantum Electronics & Optoelectronics |
| description | The interface of ZERODUR ceramics and thin aluminium film was investigated by Raman and secondary ion mass-spectroscopy techniques. Possible chemical reactions at the interface is briefly analyzed and compared with experimental data. Contributions of amorphous and crystalline phases of ZERODUR to Raman spectra are discussed. Keywords: ZERODUR ceramics, Raman spectra, secondary ion mass-spectroscopy. Manuscript received 19.04.05; accepted for publication 18.05.05.
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| first_indexed | 2025-12-07T20:56:12Z |
| format | Article |
| fulltext | |
| id | nasplib_isofts_kiev_ua-123456789-121644 |
| institution | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| issn | 1560-8034 |
| language | English |
| last_indexed | 2025-12-07T20:56:12Z |
| publishDate | 2005 |
| publisher | Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
| record_format | dspace |
| spelling | Berezhinsky, L.I. Yukhymchuk, V.A. Maslov, V.P. Tetyorkin, V.V. 2017-06-15T03:49:52Z 2017-06-15T03:49:52Z 2005 Investigation of Al-ZERODUR interface by Raman and secondary ion mass spectroscopy / L.I. Berezhinsky, V.P. Maslov V.V. Tetyorkin and V.A.Yukhymchuk // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2005. — Т. 8, № 2. — С. 37-40. — Бібліогр.: 5 назв. — англ. 1560-8034 PACS: 78.30.L https://nasplib.isofts.kiev.ua/handle/123456789/121644 The interface of ZERODUR ceramics and thin aluminium film was investigated by Raman and secondary ion mass-spectroscopy techniques. Possible chemical reactions at the interface is briefly analyzed and compared with experimental data. Contributions of amorphous and crystalline phases of ZERODUR to Raman spectra are discussed. Keywords: ZERODUR ceramics, Raman spectra, secondary ion mass-spectroscopy. Manuscript received 19.04.05; accepted for publication 18.05.05. en Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України Semiconductor Physics Quantum Electronics & Optoelectronics Investigation of Al-ZERODUR interface by Raman and secondary ion mass spectroscopy Article published earlier |
| spellingShingle | Investigation of Al-ZERODUR interface by Raman and secondary ion mass spectroscopy Berezhinsky, L.I. Yukhymchuk, V.A. Maslov, V.P. Tetyorkin, V.V. |
| title | Investigation of Al-ZERODUR interface by Raman and secondary ion mass spectroscopy |
| title_full | Investigation of Al-ZERODUR interface by Raman and secondary ion mass spectroscopy |
| title_fullStr | Investigation of Al-ZERODUR interface by Raman and secondary ion mass spectroscopy |
| title_full_unstemmed | Investigation of Al-ZERODUR interface by Raman and secondary ion mass spectroscopy |
| title_short | Investigation of Al-ZERODUR interface by Raman and secondary ion mass spectroscopy |
| title_sort | investigation of al-zerodur interface by raman and secondary ion mass spectroscopy |
| url | https://nasplib.isofts.kiev.ua/handle/123456789/121644 |
| work_keys_str_mv | AT berezhinskyli investigationofalzerodurinterfacebyramanandsecondaryionmassspectroscopy AT yukhymchukva investigationofalzerodurinterfacebyramanandsecondaryionmassspectroscopy AT maslovvp investigationofalzerodurinterfacebyramanandsecondaryionmassspectroscopy AT tetyorkinvv investigationofalzerodurinterfacebyramanandsecondaryionmassspectroscopy |