Investigation of Al-ZERODUR interface by Raman and secondary ion mass spectroscopy
The interface of ZERODUR ceramics and thin aluminium film was investigated by Raman and secondary ion mass-spectroscopy techniques. Possible chemical reactions at the interface is briefly analyzed and compared with experimental data. Contributions of amorphous and crystalline phases of ZERODUR to Ra...
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| Veröffentlicht in: | Semiconductor Physics Quantum Electronics & Optoelectronics |
|---|---|
| Datum: | 2005 |
| Hauptverfasser: | , , , |
| Format: | Artikel |
| Sprache: | English |
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Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України
2005
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| Online Zugang: | https://nasplib.isofts.kiev.ua/handle/123456789/121644 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Zitieren: | Investigation of Al-ZERODUR interface by Raman and secondary ion mass spectroscopy / L.I. Berezhinsky, V.P. Maslov V.V. Tetyorkin and V.A.Yukhymchuk // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2005. — Т. 8, № 2. — С. 37-40. — Бібліогр.: 5 назв. — англ. |
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Berezhinsky, L.I. Yukhymchuk, V.A. Maslov, V.P. Tetyorkin, V.V. 2017-06-15T03:49:52Z 2017-06-15T03:49:52Z 2005 Investigation of Al-ZERODUR interface by Raman and secondary ion mass spectroscopy / L.I. Berezhinsky, V.P. Maslov V.V. Tetyorkin and V.A.Yukhymchuk // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2005. — Т. 8, № 2. — С. 37-40. — Бібліогр.: 5 назв. — англ. 1560-8034 PACS: 78.30.L https://nasplib.isofts.kiev.ua/handle/123456789/121644 The interface of ZERODUR ceramics and thin aluminium film was investigated by Raman and secondary ion mass-spectroscopy techniques. Possible chemical reactions at the interface is briefly analyzed and compared with experimental data. Contributions of amorphous and crystalline phases of ZERODUR to Raman spectra are discussed. Keywords: ZERODUR ceramics, Raman spectra, secondary ion mass-spectroscopy. Manuscript received 19.04.05; accepted for publication 18.05.05. en Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України Semiconductor Physics Quantum Electronics & Optoelectronics Investigation of Al-ZERODUR interface by Raman and secondary ion mass spectroscopy Article published earlier |
| institution |
Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| collection |
DSpace DC |
| title |
Investigation of Al-ZERODUR interface by Raman and secondary ion mass spectroscopy |
| spellingShingle |
Investigation of Al-ZERODUR interface by Raman and secondary ion mass spectroscopy Berezhinsky, L.I. Yukhymchuk, V.A. Maslov, V.P. Tetyorkin, V.V. |
| title_short |
Investigation of Al-ZERODUR interface by Raman and secondary ion mass spectroscopy |
| title_full |
Investigation of Al-ZERODUR interface by Raman and secondary ion mass spectroscopy |
| title_fullStr |
Investigation of Al-ZERODUR interface by Raman and secondary ion mass spectroscopy |
| title_full_unstemmed |
Investigation of Al-ZERODUR interface by Raman and secondary ion mass spectroscopy |
| title_sort |
investigation of al-zerodur interface by raman and secondary ion mass spectroscopy |
| author |
Berezhinsky, L.I. Yukhymchuk, V.A. Maslov, V.P. Tetyorkin, V.V. |
| author_facet |
Berezhinsky, L.I. Yukhymchuk, V.A. Maslov, V.P. Tetyorkin, V.V. |
| publishDate |
2005 |
| language |
English |
| container_title |
Semiconductor Physics Quantum Electronics & Optoelectronics |
| publisher |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
| format |
Article |
| description |
The interface of ZERODUR ceramics and thin aluminium film was investigated by Raman and secondary ion mass-spectroscopy techniques. Possible chemical reactions at the interface is briefly analyzed and compared with experimental data. Contributions of amorphous and crystalline phases of ZERODUR to Raman spectra are discussed. Keywords: ZERODUR ceramics, Raman spectra, secondary ion mass-spectroscopy. Manuscript received 19.04.05; accepted for publication 18.05.05.
|
| issn |
1560-8034 |
| url |
https://nasplib.isofts.kiev.ua/handle/123456789/121644 |
| citation_txt |
Investigation of Al-ZERODUR interface by Raman and secondary ion mass spectroscopy / L.I. Berezhinsky, V.P. Maslov V.V. Tetyorkin and V.A.Yukhymchuk // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2005. — Т. 8, № 2. — С. 37-40. — Бібліогр.: 5 назв. — англ. |
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AT berezhinskyli investigationofalzerodurinterfacebyramanandsecondaryionmassspectroscopy AT yukhymchukva investigationofalzerodurinterfacebyramanandsecondaryionmassspectroscopy AT maslovvp investigationofalzerodurinterfacebyramanandsecondaryionmassspectroscopy AT tetyorkinvv investigationofalzerodurinterfacebyramanandsecondaryionmassspectroscopy |
| first_indexed |
2025-12-07T20:56:12Z |
| last_indexed |
2025-12-07T20:56:12Z |
| _version_ |
1850884459876843520 |