Shapovalov, A., Korotash, I., Rudenko, E., Sizov, F., Dubyna, D., Osipov, L., . . . Korchovyi, A. (2015). Structure and optical properties of AlN films obtained using the cathodic arc plasma deposition technique. Semiconductor Physics Quantum Electronics & Optoelectronics.
Чикаго стиль цитування (17-те видання)Shapovalov, A.P, I.V Korotash, E.M Rudenko, F.F Sizov, D.S Dubyna, L.S Osipov, D.Yu Polotskiy, Z.F Tsybrii, та A.A Korchovyi. "Structure and Optical Properties of AlN Films Obtained Using the Cathodic Arc Plasma Deposition Technique." Semiconductor Physics Quantum Electronics & Optoelectronics 2015.
Стиль цитування MLA (8-ме видання)Shapovalov, A.P, et al. "Structure and Optical Properties of AlN Films Obtained Using the Cathodic Arc Plasma Deposition Technique." Semiconductor Physics Quantum Electronics & Optoelectronics, 2015.