Shapovalov, A., Korotash, I., Rudenko, E., Sizov, F., Dubyna, D., Osipov, L., . . . Korchovyi, A. (2015). Structure and optical properties of AlN films obtained using the cathodic arc plasma deposition technique. Semiconductor Physics Quantum Electronics & Optoelectronics.
Chicago Style (17th ed.) CitationShapovalov, A.P, I.V Korotash, E.M Rudenko, F.F Sizov, D.S Dubyna, L.S Osipov, D.Yu Polotskiy, Z.F Tsybrii, and A.A Korchovyi. "Structure and Optical Properties of AlN Films Obtained Using the Cathodic Arc Plasma Deposition Technique." Semiconductor Physics Quantum Electronics & Optoelectronics 2015.
MLA (8th ed.) CitationShapovalov, A.P, et al. "Structure and Optical Properties of AlN Films Obtained Using the Cathodic Arc Plasma Deposition Technique." Semiconductor Physics Quantum Electronics & Optoelectronics, 2015.