Shapovalov, A., Korotash, I., Rudenko, E., Sizov, F., Dubyna, D., Osipov, L., . . . Korchovyi, A. (2015). Structure and optical properties of AlN films obtained using the cathodic arc plasma deposition technique. Semiconductor Physics Quantum Electronics & Optoelectronics.
Chicago-Zitierstil (17. Ausg.)Shapovalov, A.P, I.V Korotash, E.M Rudenko, F.F Sizov, D.S Dubyna, L.S Osipov, D.Yu Polotskiy, Z.F Tsybrii, und A.A Korchovyi. "Structure and Optical Properties of AlN Films Obtained Using the Cathodic Arc Plasma Deposition Technique." Semiconductor Physics Quantum Electronics & Optoelectronics 2015.
MLA-Zitierstil (8. Ausg.)Shapovalov, A.P, et al. "Structure and Optical Properties of AlN Films Obtained Using the Cathodic Arc Plasma Deposition Technique." Semiconductor Physics Quantum Electronics & Optoelectronics, 2015.