Features of coatings deposition in combined stationary-pulsed operation mode of the magnetron sputtering system

• Published in: Вопросы атомной науки и техники
• Date: 2017
• Main Authors: Chunadra, А.G., Sereda, К.N., Tarasov, I.K., Bizukov, А.А., Girka, A.I.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2017
• Subjects: Низкотемпературная плазма и плазменные технологии
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/122162
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Features of coatings deposition in combined stationary-pulsed operation mode of the magnetron sputtering system / А.G. Chunadra, К.N. Sereda, I.K. Tarasov, А.А. Bizukov, A.I. Girka // Вопросы атомной науки и техники. — 2017. — № 1. — С. 227-230. — Бібліогр.: 4 назв. — англ.

The results of researches of the combined stationary-pulsed operating mode of longitudinal planar magnetron sputtering system (MSS) with a magnetically isolated anode and with the additional pulsed high-current, high-voltage power supply are presented. It is shown that the increasing of duration of...