Features of coatings deposition in combined stationary-pulsed operation mode of the magnetron sputtering system
The results of researches of the combined stationary-pulsed operating mode of longitudinal planar magnetron sputtering system (MSS) with a magnetically isolated anode and with the additional pulsed high-current, high-voltage power supply are presented. It is shown that the increasing of duration of...
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| Published in: | Вопросы атомной науки и техники |
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| Date: | 2017 |
| Main Authors: | , , , , |
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2017
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| Subjects: | |
| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/122162 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Features of coatings deposition in combined stationary-pulsed operation mode of the magnetron sputtering system / А.G. Chunadra, К.N. Sereda, I.K. Tarasov, А.А. Bizukov, A.I. Girka // Вопросы атомной науки и техники. — 2017. — № 1. — С. 227-230. — Бібліогр.: 4 назв. — англ. |