Effect of substrate bias voltage parameters on surface properties of ta-C coatings
The study presents the technology of the formation of amorphous ta-C films, deposited by pulsed vacuum-arc method with the use of a water-cooled electromagnetic Venetian blind plasma filter. The effect of the substrate bias voltage, in the range of -25 to -200 V, on the structural and surface proper...
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| Date: | 2017 |
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| Main Authors: | , , , , , |
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2017
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| Series: | Вопросы атомной науки и техники |
| Subjects: | |
| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/122175 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Effect of substrate bias voltage parameters on surface properties of ta-C coatings / V. Safonov, K. Miroshnichenko, A. Zykova, V. Zavaleyev, J. Walkowicz, R. Rogowska // Вопросы атомной науки и техники. — 2017. — № 1. — С. 199-202. — Бібліогр.: 12 назв. — англ. |