Influence of deposition conditions and annealing temperature on phase composition and structure of W-B system ion-plasma condensates
Effects of condensation temperature and subsequent annealing on composition and structure of tungsten boride condensates obtained by ion-plasma sputtering have been studied. In the condensation temperature range 300 to 900°C, the formation of condensates with amorphous/nanocrystalline structure has...
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| Veröffentlicht in: | Functional Materials |
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| Datum: | 2006 |
| 1. Verfasser: | |
| Format: | Artikel |
| Sprache: | Englisch |
| Veröffentlicht: |
НТК «Інститут монокристалів» НАН України
2006
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| Online Zugang: | https://nasplib.isofts.kiev.ua/handle/123456789/134057 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Zitieren: | Influence of deposition conditions and annealing temperature on phase composition and structure of W-B system ion-plasma condensates / Sobol O.V. // Functional Materials. — 2006. — Т. 13, № 3. — С. 387-392. — Бібліогр.: 27 назв. — англ. |
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Digital Library of Periodicals of National Academy of Sciences of Ukraine| Zusammenfassung: | Effects of condensation temperature and subsequent annealing on composition and structure of tungsten boride condensates obtained by ion-plasma sputtering have been studied. In the condensation temperature range 300 to 900°C, the formation of condensates with amorphous/nanocrystalline structure has been found to take place. As compared to the material being sputtered, the condensate composition is characterized by boron atomic deficiency. High-temperature vacuum annealing (Tann = 1100 to 1230°C, P < 7.10⁻⁴ Pa) results in crystallization into lower boride phases, among which the γ-W₂B is most stable. The causes of observed effect are discussed.
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| ISSN: | 1027-5495 |