Influence of deposition conditions and annealing temperature on phase composition and structure of W-B system ion-plasma condensates

• Опубліковано в: : Functional Materials
• Дата: 2006
• Автор: Sobol, O.V.
• Формат: Стаття
• Мова: English
• Опубліковано: НТК «Інститут монокристалів» НАН України 2006
• Онлайн доступ: https://nasplib.isofts.kiev.ua/handle/123456789/134057
• Назва журналу: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Цитувати: Influence of deposition conditions and annealing temperature on phase composition and structure of W-B system ion-plasma condensates / Sobol O.V. // Functional Materials. — 2006. — Т. 13, № 3. — С. 387-392. — Бібліогр.: 27 назв. — англ.

Effects of condensation temperature and subsequent annealing on composition and structure of tungsten boride condensates obtained by ion-plasma sputtering have been studied. In the condensation temperature range 300 to 900°C, the formation of condensates with amorphous/nanocrystalline structure has been found to take place. As compared to the material being sputtered, the condensate composition is characterized by boron atomic deficiency. High-temperature vacuum annealing (Tann = 1100 to 1230°C, P < 7.10⁻⁴ Pa) results in crystallization into lower boride phases, among which the γ-W₂B is most stable. The causes of observed effect are discussed.