Вплив деформаційних ефектів на електричні властивості структури метал−напівпровідник−легований напівпровідник

Дослiджено вплив пружних деформацiй, що виникають як за рахунок невiдповiдностi параметрiв ґраток контактуючих напiвпровiдникових матерiалiв, так i в околi кластера дефектiв мiжвузловинного кадмiю у легованiй напiвпровiдниковiй пiдкладцi CdTe, на iнжекцiю електронiв в iзолюючий шар структури метал–н...

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Автори: Пелещак, Р.М., Кузик, О.В., Даньків, О.О.
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Опубліковано: Відділення фізики і астрономії НАН України 2010
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Цитувати:Вплив деформаційних ефектів на електричні властивості структури метал−напівпровідник−легований напівпровідник / Р.М. Пелещак, О.В. Кузик, О.О. Даньків // Укр. фіз. журн. — 2010. — Т. 55, № 4. — С. 437-442. — Бібліогр.: 13 назв. — укр.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine
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author Пелещак, Р.М.
Кузик, О.В.
Даньків, О.О.
author_facet Пелещак, Р.М.
Кузик, О.В.
Даньків, О.О.
citation_txt Вплив деформаційних ефектів на електричні властивості структури метал−напівпровідник−легований напівпровідник / Р.М. Пелещак, О.В. Кузик, О.О. Даньків // Укр. фіз. журн. — 2010. — Т. 55, № 4. — С. 437-442. — Бібліогр.: 13 назв. — укр.
collection DSpace DC
description Дослiджено вплив пружних деформацiй, що виникають як за рахунок невiдповiдностi параметрiв ґраток контактуючих напiвпровiдникових матерiалiв, так i в околi кластера дефектiв мiжвузловинного кадмiю у легованiй напiвпровiдниковiй пiдкладцi CdTe, на iнжекцiю електронiв в iзолюючий шар структури метал–нелегований напiвпровiдник ZnxCd1-xTe–напiвпровiдникова пiдкладка n-CdTe. Исследовано влияние упругих деформаций, вызванных как несоответствием параметров решеток контактирующих полупроводниковых материалов, так и наличием кластера дефектов междоузельного кадмия в легированной полупроводниковой подложке CdTe, на инжекцию электронов в изолирующий слой структуры металл–нелегированный полупроводник ZnxCd1-xTe–полупроводниковая подложка n-CdTe. The influence of elastic deformations that arise owing to a mismatch between the lattice parameters of contacting semiconductor materials and in a vicinity of the defect cluster induced by interstitial cadmium in a doped semiconductor CdTe substrate on the electron injection into the insulating layer of the metal–undoped ZnxCd1-xTe semiconductor–n-CdTe semiconductor substrate structure has been studied.
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fulltext R.M. PELESHCHAK, O.V. KUZYK, O.O. DAN’KIV INFLUENCE OF DEFORMATION EFFECTS ON ELECTRICAL PROPERTIES OF METAL–SEMICONDUCTOR–DOPED SEMICONDUCTOR STRUCTURE R.M. PELESHCHAK, O.V. KUZYK, O.O. DAN’KIV Ivan Franko Drogobych State Pedagogical University (24, Ivan Franko Str., Drogobych 82100, Ukraine; e-mail: peleshchak@ rambler. ru ) PACS 61.72.JJ c©2010 The influence of elastic deformations that arise owing to a mis- match between the lattice parameters of contacting semiconduc- tor materials and in a vicinity of the defect cluster induced by interstitial cadmium in a doped semiconductor CdTe substrate on the electron injection into the insulating layer of the metal– undoped ZnxCd1−xTe semiconductor–n-CdTe semiconductor sub- strate structure has been studied. 1. Introduction Recently, when developing semiconductor devices, con- tacts between metal and semiconductor with an inter- mediate undoped i-layer [1] have got a wide application, in particular, for the detection of high-frequency signals [2] and the fabrication of high-voltage pulse p − i − n diodes [3]. In work [4], a self-consistent analytical solution was obtained in the diffusion-drift approximation for the problem of charge carrier injection into a finite-thickness insulating i-layer in metal–i-layer–heavily doped semi- conductor substrate structures. The approach proposed by the authors takes into account both bulk effects, which are associated with the current confinement by a space charge, and contact phenomena at the bound- aries of the undoped semiconductor i-layer. However, the model proposed by the authors of work [4] does not make allowance for the influence of deformation effects, which can be considerable in the cases where a mismatch between the lattice parameters of contacting semicon- ductor materials (CdTe/ZnTe, GaAs/InAs) is large (up to 6–7%), and the concentration of point defects is high (Nd > 1017 cm−3). As was shown in works [5–8], when the concentra- tion of defects (interstitial atoms and vacancies) ex- ceeds some critical value, their interaction with the self- consistent field of deformation gives rise to a formation of ordered defect-deformation structures (clusters and periodic structures). The presence of defect clusters in semiconductor materials substantially affects their elec- trophysical and optical properties. In particular, as was shown in works [9, 10], clusters of interstitial Cdi’s are fast channels of recombination in CdS. In work [8], con- ditions for purifying the CdTe semiconductor bulk from clusters formed by ionized interstitial Cdi were found, and the influence of an external electric field on the clus- ter size was analyzed. Owing to the self-consistency of the electron- deformation coupling, a non-uniform deformation, which emerges due to the presence of defect clusters and the mismatch between the lattice parameters of contacting materials in metal–i-layer–heavily doped semiconductor structures, results in considerable modifications of spa- tial distributions of charge carrier concentration, elec- trostatic potential ϕ(x), and electric field E(x); which is reflected, in particular, in current-voltage characteris- tics (CVCs) of such structures. An important matter is how to predict the variation of electric properties under the influence of mechanical stresses and how to establish conditions, under which the influence of external factors that change a strained state of the semiconductor struc- ture on electric properties would be minimal. In this work, the electrostatic potential, electric field strength, conduction electron concentration n(x), and CVCs of the metal–undoped ZnxCd1−xTe semiconductor–n-CdTe semiconductor substrate (metal−i − n+) structure have been calculated with regard for elastic deformations that arise both owing to a mismatch between the lattice parameters of contact- ing semiconductor materials and in the defect cluster vicinity in a doped CdTe semiconductor substrate. 2. Model Consider a three-layer structure: metal–undoped ZnxCd1−xTe layer with thickness L–doped n+-CdTe semiconductor substrate. The coordinate x is reckoned 434 ISSN 2071-0194. Ukr. J. Phys. 2010. Vol. 55, No. 4 INFLUENCE OF DEFORMATION EFFECTS ON ELECTRICAL PROPERTIES from the metal–semiconductor interface into the semi- conductor depth. 1. Let the semiconductor substrate (x ≥ L) contain point defects with the average concentration Nd0. De- fects interact with both the electric field E = −dϕ(x) dx and the strain field U(x) = ∂ux ∂x , where ux is the com- ponent of the medium displacement vector. Since the substrate thickness is much larger than that of the un- doped i-layer, the substrate deformation resulting owing to the mismatch between the lattice parameters of con- tacting semiconductor materials can be neglected. Only the elastic strains that are created by point defects— namely, ionized interstitial cadmium in CdTe material— are taken into consideration. To find the parameter of crystal lattice deformation and the defect concentration, it is necessary to solve the equations [8] c2l ∂2U (x) ∂x2 + c2l l 2 0 ∂4U (x) ∂x4 − c2l |α| ∂2(U2 (x)) ∂x2 + +c2l β ∂2(U3 (x)) ∂x2 − θd ρ ∂2Nd (x) ∂x2 = 0, (1) D ∂2Nd ∂x2 − Dθd kT ∂ ∂x ( Nd(x) ( ∂U (x) ∂x + l2d ∂3U (x) ∂x3 )) + + ∂ ∂x ( Nd(x)µ ∂ϕ(x) ∂x ) = 0, (2) where ρ is the medium density; cl is the longitudinal sound velocity; θd = KAΔΩ is the deformation poten- tial; ΔΩ is a change of the crystal volume per one de- fect; KA is the uniform elastic constant; ld and l0 are the characteristic lengths of the defect–crystal atom and atom–atom interactions, respectively; α and β are the constants of elastic anharmonicity; T is the tempera- ture; D is the coefficient of defect diffusion; and k is the Boltzmann constant. Integrating Eq. (2), we obtain Nd(x) = Nd0 exp ( θd kT ( Ul (x)+l2d ∂2Ul (x) ∂x2 ) − µ D ϕ(x) ) ≈ ≈ Nd0 ( 1 + θd kT ( Ul (x) + l2d ∂2Ul (x) ∂x2 ) − µ D ϕ(x) ) . (3) Substituting Eq. (3) into Eq. (1), we obtain a nonlin- ear inhomogeneous differential equation for the medium deformation ∂2Ul(x) ∂x2 − aUl(x) + fU2 l (x)− cU3 l (x) = = Nd0 Ndc l2d Nd0 Ndc − l20 eϕ(x) θd , (4) where Ul(x) is the spatially non-uniform component of the deformation, a = 1− Nd0 Ndc l2d Nd0 Ndc − l20 ; f = |α| l2d Nd0 Ndc − l20 ; c = β l2d Nd0 Ndc − l20 ; Ndc = ρc2l kT θ2d . For a heavily doped n+-substrate, one can take ad- vantage of the Thomas–Fermi approximation [4]. Then, making allowance for deformation effects, the electro- chemical potential looks like χs(x) = ~2 2ms ( 3π2n(x) )2/3 − eϕs(x) + acU(x), (5) wherems is the effective mass of an electron in the doped semiconductor material, n(x) is the electron concentra- tion distribution, and ac is the constant of the hydro- static deformation potential of the conduction band. Let us consider the n+-layer as a three-component system which contains electrons with the concentration n(x), ionized motionless donors with the concentration N+, and mobile donors with the concentration Nd(x). The condition n0 = N+ +Nd0, (6) where n0 is a spatially uniform value of conduction elec- tron concentration, is evidently fulfilled. From formula (5), one can determine the charge carrier concentration: n(x) = ( 2ms ~2 )3/2 · (χs(x) + eϕs(x)− acU(x))3/2 3π2 . (7) The current density is j = σ e dχs dx , (8) where σ is the specific conductance of the n+-layer. Let us assume that the conductivity of the doped substrate to be high enough, so that the condition j σ eLs � χ0, where Ls is the substrate thickness, and χ0 = χ (∞) = ~2 2ms ( 3π2n0 )2/3 + acU0, is satisfied. Then the electron concentration can be presented, in the linear approxi- mation, as follows: n(x) = n0 +R (eϕs(x)− acUl(x)) , (9) ISSN 2071-0194. Ukr. J. Phys. 2010. Vol. 55, No. 4 435 R.M. PELESHCHAK, O.V. KUZYK, O.O. DAN’KIV where R = ( 2ms ~2 )3/2 √χ0 2π2 . The electrostatic potential ϕs(x) is determined from the Poisson equation ∇2ϕs (x) = − e εsε0 ( Nd(x) +N+ − n (x) ) , (10) where εs is the dielectric permittivity of a semiconductor substrate material. Therefore, having solved the system of equations (4) and (10), where expressions (3) and (9) are taken into account, one can obtain the spatial distributions of elec- trostatic potential, ϕs(x), crystal lattice deformation, Ul(x), conduction electron concentration, n(x), and de- fects, Nd(x), in the doped semiconductor substrate. Let us solve this system using the iteration method. In the first approximation, we obtain the solution of Eq. (4) taking no interaction between defects and the electro- static field into account (ϕs(x) = 0). Depending on the magnitude of average point defect concentration, the so- lution of Eq. (4) looks like Ul (x) = 0, Nd0 < Ndc1, (11) Ul (x) = Asignθd B + sh (− √ a (x− x0)) , Ndc1 < Nd0 < Ndc2, (12) Ul (x) = Asignθd B + ch ( √ a (x− x0)) , Ndc2 < Nd0 < Ndc, (13) Ul (x) = Asignθd B + sin (√ |a| (x− x0) ) , Nd0 > Ndc, (14) where x0 means the position of a cluster in the doped semiconductor substrate, A = 3 √ 2 |a| ∣∣9ca− 2f2 ∣∣−1/2, B = √ 2f ∣∣9ca− 2f2 ∣∣−1/2, Ndc1 = Ndc ( l0 ld )2 , Ndc2 = Ndc ( 1− 2α2 9β ) , and 2α2 9β = 4 9 [6]. Below, we confine the consideration to the case of sym- metric defect cluster, which corresponds to formula (13). Substituting Eqs. (3) and (9) into the Poisson equation (10) and taking Eq. (6) into account, we obtain the fol- lowing spatial distribution of the electrostatic potential in the doped semiconductor substrate: ϕs (x) = C1e −gx − 1 2g egx ∫ f(x)e−gxdx+ + 1 2g e−gx ∫ f(x) · egxdx, (15) where f(x) = WUl (x) + ( W − g2 0ac e ) l2d ∂2Ul (x) ∂x2 , g0 = √ e2R εsε0 , g = √ e2 ( R+ Nd0 kT ) εsε0 , and C1 is the integration constant. 2. Let us write down the expressions for the electro- chemical potential and the electric current density, as well as the Poisson equation, for the undoped i-layer, when a deformation of the crystal lattice is taken into consideration 4: χ(x) = kT ln n(x) Ni + Δi − eϕ(x) + acU(x), (16) j = nµn dχ dx , (17) ∇2ϕ (x) = e εε0 n (x) , (18) where Ni = 2 ( 2πmkT h2 )3/2 is the effective density of states, Δi is the gap between the conduction bands at the semiconductor interface, µn is the electron mobil- ity, and ε is the relative dielectric permittivity of the medium. From Eqs. (16)–(18) and bearing in mind that E = −dϕ(x) dx , we obtain a nonlinear equation for the elec- tric field, kT e d2E dx2 + E dE dx + ac e dE dx dU dx = − j µnεε0 . (19) Consider the case where the distance from the inter- face between semiconductor materials to the center of a cluster of defects that are contained in the substrate is much larger than the cluster size (x0 � 1/ √ a). In this case, a deformation in the i-layer, which arises in a vicinity of defect-deformation structures, can be ne- glected. However, a deformation of the undoped layer induced by a mismatch between the lattice parameters of contacting materials can be substantial. To study the influence of this mismatch on the electron injection into the undoped layer, we confine ourselves to the linear ap- proximation for the deformation, U(x) = U0 x L , (20) 436 ISSN 2071-0194. Ukr. J. Phys. 2010. Vol. 55, No. 4 INFLUENCE OF DEFORMATION EFFECTS ON ELECTRICAL PROPERTIES U0 = Uxx + Uyy + Uzz, Uyy = Uzz = as − a0 as , Uxx = −2C12 C11 Uyy, where Uxx, Uyy, and Uzz are the components of the strain tensor; as and a0 are the lattice parameters of the substrate and i-layer materials, respectively. Changing over to dimensionless quantities and inte- grating Eq. (19), we obtain dẼ dz + Ẽ2 2 + j̃z = A, (21) where A is an integration constant, Ẽ = e kTg0 ( E + acU0 eL ) , j̃ = e2j εε0µn(kT )2g30 , and z = g0x. The solution of Eq. (21) can be expressed in terms of Airy functions and looks like [4] Ẽ(z) = −2 ( j̃ 2 )1/3 Ai′(y) + C2 ·Bi′(y) Ai(y) + C2 ·Bi(y) , (22) where y(z) = ( j̃/2 )1/3 ( A/j̃ − z ) . In order to calculate the electric field, electrostatic po- tential, and current density, let us take advantage of a technique proposed in work [4]. The following condi- tions, which enable the integration constants to be de- termined as functions of the current density, must be satisfied at the interface between semiconductor materi- als: ϕ(L− 0) = ϕs(L+ 0); εdϕdx |x=L−0 = εs dϕs dx |x=L+0 ; χ(L− 0) = χs(L+ 0). (23) Equating the electrochemical potential of the semicon- ductor at its interface with the metal to χ(0), we obtain an additional boundary condition n(0) = Nie − Δ kT , (24) where Δ = Δi − eϕ (0) − χ (0) is the potential barrier height at the semiconductor–metal interface. In view of Eq. (18), equality (24) can be rewritten in the form d2ϕ dx2 ∣∣∣∣ x=0 = eNi εε0 e− Δ kT . (25) Then, taking into account that χ(0) = χ0−eV [4], where V is the applied voltage, we obtain the expression eV = eϕ(0) + χ0 + Δ−Δi. (26) Fig. 1. Spatial distributions of the electrostatic potential (a) and electrons (b) in the metal–i–n+ structure with a cluster (solid curves) and without it (dashed curves) for Δ = 0.6 eV (1 ), 0.3 eV (2 ), and 0 eV at Δi = 0 eV (3 ) By solving the system of equations (23) and (25), we can determine ϕ(0) as a function of the current density. Substituting it into Eq. (26), we obtain a transcendental equation which allows the CVC of the structure under investigation to be determined. 3. Calculation Results and Their Discussion In Fig. 1, the results of calculations of the spatial dis- tributions of electrostatic potential and conduction elec- tron concentration in the metal–undoped CdTe–doped n-CdTe substrate structure at the zero bias voltage are presented for the following values of parameters: T = 300 ◦C, D = 3 × 10−9 cm2/s [11], ac = 3.38 eV, Dn = 102 cm2/s, µn = 103 cm2/(V×s) [12], θd = 10 eV, ε = εs = 9.7, l0 = 0.5 nm, ld = 2.9 nm [6], ρc2l = 0.79 Mbar, KA = 450 eV/nm3 [13], x0 = 20 nm, L = 10 nm, Nd0 = 2 × 1018 cm−3, and n0 = 3 × 1018 cm−3. The calculations were carried out for various Δ-values ISSN 2071-0194. Ukr. J. Phys. 2010. Vol. 55, No. 4 437 R.M. PELESHCHAK, O.V. KUZYK, O.O. DAN’KIV Fig. 2. Spatial distributions of electrons in the metal–i–n+ struc- ture at Δi = 0.3 eV and for Δ = 0.3 (1 ), 0.6 (2 ), and 0 eV (3 ). The dashed curve corresponds to calculations taking no deforma- tion effects into account within the interval 0 eV ≤ Δ ≤ 0.6 eV. The height Δ of the barrier at the interface with the metal can be re- duced (even down to zero) by the δ-doping of the i-layer immediately near the metal [2, 4]. Let us consider the case where a symmetric cluster is formed by interstitial cadmium Cdi in a CdTe semi- conductor substrate, and let its center be located at the point x0 (formula (13)). The presence of the cluster in- vokes a non-uniform internal electric field in the bulk of doped CdTe and a corresponding redistribution of charge carriers. Some localization of electrons is ob- served in a vicinity of the defect-deformation structure and, accordingly, a reduction of their concentration in the i-layer. The influence of deformation effects on the charge carrier injection becomes more substantial, if the barrier Δ at the interface with the metal decreases. For instance, at Δ = 0, owing to the presence of the in- terstitial Cdi cluster in the substrate, the concentra- tion of electrons in the i-layer becomes four times lower (Fig. 1). In the case where ZnxCd1−xTe is used as an intermedi- ate layer between the metal and the substrate material, an additional barrier Δi arises at the interface between semiconductors due to the gap that occurs between the conduction bands in contacting materials. In this case (Fig. 2), the influence of deformation effects leads to an insignificant (up to 20%) increase of the electron concen- tration in the i-layer near the interface between the semi- conductors. This phenomenon is associated with the fact that the barrier at the semiconductor interface consid- Fig. 3. Current-voltage characteristics of the metal–i–n+ structure at various values of the average defect concentration (Δi = 0): Nd0 = 0 (1, 1 ′), 2 × 1018 (2, 2 ′), and 6 × 1018 cm−3 (3, 3 ′). Δ = 0 (1, 2, 3 ) and 0.3 eV (1 ′, 2 ′, 3 ′) erably reduces the influence of defect-deformation struc- tures existing in the doped substrate on the charge car- rier injection. The mismatch between the lattice param- eters of contacting semiconductors results in the emer- gence of a non-uniform tensile deformation in the i-layer and, accordingly, an additional electron flux from the metal contact to the i-layer–doped semiconductor inter- face. In Fig. 3, the CVCs of metal–i-layer–doped semicon- ductor substrate structures are exhibited for various Δ and average defect concentrations Nd0. The presence of clusters in the substrate brings about a substantial re- duction of the electric current at insignificant bias volt- ages. An increase of the applied voltage leads to a de- crease of the cluster size [8]. Therefore, the current den- sities at high voltages (V > 1 V) practically do not differ from the corresponding values in the defect-free struc- ture. If the defect concentration increases (Fig. 3), the current density diminishes. This can be explained by the fact that a tensile deformation grows in a vicinity of the cluster, whereas an increase of the electron con- centration in the doped substrate practically does not influence the injection of carriers into the i-layer. 4. Conclusions The influence of a deformation that arises in a vicinity of the defect cluster of interstitial cadmium in a doped CdTe semiconductor substrate on the injection of elec- trons into the insulating layer of the metal–i–n+ struc- 438 ISSN 2071-0194. Ukr. J. Phys. 2010. Vol. 55, No. 4 INFLUENCE OF DEFORMATION EFFECTS ON ELECTRICAL PROPERTIES ture has been studied. In the absence of a barrier at the metal–semiconductor interface, the presence of the cluster is demonstrated to result in a reduction of the charge carrier concentration in the i-layer by a factor of four. The mismatch between the lattice parameters of the contacting semiconductor substances in the metal–i–n+ structure is found to be the origin of the electron con- centration growth in the i-layer. The increase of barriers at both the metal– semiconductor and semiconductor–semiconductor inter- faces is shown to reduce the influence of the cluster on the charge carrier injection into the i-layer of the metal– i–n+ structure. 1. S.M. Sze, Physics of Semiconductor Devices (Wiley, New York, 1981). 2. V.I. Shashkin and A.V. Murel, Fiz. Tverd. Tela 50, 519 (2008). 3. F.Yu. Soldatenkov, V.G. Danil’chenko, anf V.I. Ko- rol’kov, Fiz. Tekh. Poluprovodn. 41, 217 (2007). 4. V.I. Shashkin and N.V. Vostokov, Fiz. Tekh. Poluprovodn. 42, 1339 (2008). 5. S.V. Vintsents, A.V. Zaytseva, and G.S. Plotnikov, Fiz. Tekh. Poluprovodn. 37, 134 (2002). 6. V.I. Emel’yanov and I.M. Panin, Fiz. Tverd. Tela 39, 2029 (1997). 7. V.I. Emel’yanov, Fiz. Tverd. Tela 43, 637 (2001). 8. R.M. Peleshchak and O.V. Kuzyk, Ukr. Fiz. Zh. 54, 703 (2009). 9. V.E. Lashkarev, A.V. Lyubchenko, and M.K. Sheinkman, Nonequilibrium Processes in Photoconductors (Kyiv, Naukova Dumka, 1981) (in Russian). 10. N.E. Korsunskaya, I.V. Markevich, T.V. Torchinskaya, and M.K. Sheinkman, Phys. Status Solidi A 60, 565 (1980). 11. N.I. Kashyrina, V.V. Kyslyuk, and M.K. Sheinkman, Ukr. Fiz. Zh. 44, 856 (1999). 12. D.V. Korbutyak, S.W. Mel’nychuk, E.V. Korbut, and M.M. Borysyk, Cadmium Telluride: Impurity-Defect States and Detector Properties (Ivan Fedorov, Kyiv, 2000) (in Ukrainian). 13. C.G. Van de Walle, Phys. Rev. B 39, 1871 (1989). Received 13.10.09. Translated from Ukrainian by O.I. Voitenko ВПЛИВ ДЕФОРМАЦIЙНИХ ЕФЕКТIВ НА ЕЛЕКТРИЧНI ВЛАСТИВОСТI СТРУКТУРИ МЕТАЛ–НАПIВПРОВIДНИК–ЛЕГОВАНИЙ НАПIВПРОВIДНИК Р.М. Пелещак, О.В. Кузик, О.О. Данькiв Р е з ю м е Дослiджено вплив пружних деформацiй, що виникають як за рахунок невiдповiдностi параметрiв ґраток контактуючих напiвпровiдникових матерiалiв, так i в околi кластера дефе- ктiв мiжвузловинного кадмiю у легованiй напiвпровiдниковiй пiдкладцi CdTe, на iнжекцiю електронiв в iзолюючий шар структури метал–нелегований напiвпровiдник ZnxCd1−xTe– напiвпровiдникова пiдкладка n-CdTe. ISSN 2071-0194. Ukr. J. Phys. 2010. Vol. 55, No. 4 439
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spelling Пелещак, Р.М.
Кузик, О.В.
Даньків, О.О.
2010-11-08T17:27:07Z
2010-11-08T17:27:07Z
2010
Вплив деформаційних ефектів на електричні властивості структури метал−напівпровідник−легований напівпровідник / Р.М. Пелещак, О.В. Кузик, О.О. Даньків // Укр. фіз. журн. — 2010. — Т. 55, № 4. — С. 437-442. — Бібліогр.: 13 назв. — укр.
2071-0194
PACS 61.72.JJ
https://nasplib.isofts.kiev.ua/handle/123456789/13435
533.3+537.2
Дослiджено вплив пружних деформацiй, що виникають як за рахунок невiдповiдностi параметрiв ґраток контактуючих напiвпровiдникових матерiалiв, так i в околi кластера дефектiв мiжвузловинного кадмiю у легованiй напiвпровiдниковiй пiдкладцi CdTe, на iнжекцiю електронiв в iзолюючий шар структури метал–нелегований напiвпровiдник ZnxCd1-xTe–напiвпровiдникова пiдкладка n-CdTe.
Исследовано влияние упругих деформаций, вызванных как несоответствием параметров решеток контактирующих полупроводниковых материалов, так и наличием кластера дефектов междоузельного кадмия в легированной полупроводниковой подложке CdTe, на инжекцию электронов в изолирующий слой структуры металл–нелегированный полупроводник ZnxCd1-xTe–полупроводниковая подложка n-CdTe.
The influence of elastic deformations that arise owing to a mismatch between the lattice parameters of contacting semiconductor materials and in a vicinity of the defect cluster induced by interstitial cadmium in a doped semiconductor CdTe substrate on the electron injection into the insulating layer of the metal–undoped ZnxCd1-xTe semiconductor–n-CdTe semiconductor substrate structure has been studied.
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Відділення фізики і астрономії НАН України
Тверде тіло
Вплив деформаційних ефектів на електричні властивості структури метал−напівпровідник−легований напівпровідник
Влияние деформационных эффектов на электрические свойства структуры металл–полупроводник–легированный полупроводник
Influence of Deformation Effects on Electrical Properties of Structure Metal−Semiconductor−Doped Semiconductor
Article
published earlier
spellingShingle Вплив деформаційних ефектів на електричні властивості структури метал−напівпровідник−легований напівпровідник
Пелещак, Р.М.
Кузик, О.В.
Даньків, О.О.
Тверде тіло
title Вплив деформаційних ефектів на електричні властивості структури метал−напівпровідник−легований напівпровідник
title_alt Влияние деформационных эффектов на электрические свойства структуры металл–полупроводник–легированный полупроводник
Influence of Deformation Effects on Electrical Properties of Structure Metal−Semiconductor−Doped Semiconductor
title_full Вплив деформаційних ефектів на електричні властивості структури метал−напівпровідник−легований напівпровідник
title_fullStr Вплив деформаційних ефектів на електричні властивості структури метал−напівпровідник−легований напівпровідник
title_full_unstemmed Вплив деформаційних ефектів на електричні властивості структури метал−напівпровідник−легований напівпровідник
title_short Вплив деформаційних ефектів на електричні властивості структури метал−напівпровідник−легований напівпровідник
title_sort вплив деформаційних ефектів на електричні властивості структури метал−напівпровідник−легований напівпровідник
topic Тверде тіло
topic_facet Тверде тіло
url https://nasplib.isofts.kiev.ua/handle/123456789/13435
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