Optical properties of silicon carbide obtained by direct ion deposition
Optical transmission, absorption and reflection spectra of silicon carbide thin films deposited on sapphire substrate from the carbon and silicon ionic flows have been investigated. The films have been obtained at various deposition paramenters, i.e., under variation of ion energy and substrate temp...
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| Veröffentlicht in: | Functional Materials |
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| Datum: | 2006 |
| Hauptverfasser: | , , , |
| Format: | Artikel |
| Sprache: | Englisch |
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НТК «Інститут монокристалів» НАН України
2006
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| Online Zugang: | https://nasplib.isofts.kiev.ua/handle/123456789/135067 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Zitieren: | Optical properties of silicon carbide obtained by direct ion deposition / A.V. Lopin, A.V. Semenov, V.M. Puzikov, A.G. Trushkovsky // Functional Materials. — 2006. — Т. 13, № 4. — С. 631-636. — Бібліогр.: 9 назв. — англ. |
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Digital Library of Periodicals of National Academy of Sciences of Ukraine| _version_ | 1862648126075043840 |
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| author | Lopin, A.V. Semenov, A.V. Puzikov, V.M. Trushkovsky, A.G. |
| author_facet | Lopin, A.V. Semenov, A.V. Puzikov, V.M. Trushkovsky, A.G. |
| citation_txt | Optical properties of silicon carbide obtained by direct ion deposition / A.V. Lopin, A.V. Semenov, V.M. Puzikov, A.G. Trushkovsky // Functional Materials. — 2006. — Т. 13, № 4. — С. 631-636. — Бібліогр.: 9 назв. — англ. |
| collection | DSpace DC |
| container_title | Functional Materials |
| description | Optical transmission, absorption and reflection spectra of silicon carbide thin films deposited on sapphire substrate from the carbon and silicon ionic flows have been investigated. The films have been obtained at various deposition paramenters, i.e., under variation of ion energy and substrate temperature. The behavior of optical characteristics of silicon-carbide films depending on influence of changes in technological parameters. It has been shown that direct ion deposition method provides a control of film optical parameters within a wide range.
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| first_indexed | 2025-12-01T14:18:10Z |
| format | Article |
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| id | nasplib_isofts_kiev_ua-123456789-135067 |
| institution | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| issn | 1027-5495 |
| language | English |
| last_indexed | 2025-12-01T14:18:10Z |
| publishDate | 2006 |
| publisher | НТК «Інститут монокристалів» НАН України |
| record_format | dspace |
| spelling | Lopin, A.V. Semenov, A.V. Puzikov, V.M. Trushkovsky, A.G. 2018-06-14T14:50:25Z 2018-06-14T14:50:25Z 2006 Optical properties of silicon carbide obtained by direct ion deposition / A.V. Lopin, A.V. Semenov, V.M. Puzikov, A.G. Trushkovsky // Functional Materials. — 2006. — Т. 13, № 4. — С. 631-636. — Бібліогр.: 9 назв. — англ. 1027-5495 https://nasplib.isofts.kiev.ua/handle/123456789/135067 Optical transmission, absorption and reflection spectra of silicon carbide thin films deposited on sapphire substrate from the carbon and silicon ionic flows have been investigated. The films have been obtained at various deposition paramenters, i.e., under variation of ion energy and substrate temperature. The behavior of optical characteristics of silicon-carbide films depending on influence of changes in technological parameters. It has been shown that direct ion deposition method provides a control of film optical parameters within a wide range. en НТК «Інститут монокристалів» НАН України Functional Materials Optical properties of silicon carbide obtained by direct ion deposition Оптичні властивості плівок карбіду кремнію, одержаних методом прямого іонного осадження Article published earlier |
| spellingShingle | Optical properties of silicon carbide obtained by direct ion deposition Lopin, A.V. Semenov, A.V. Puzikov, V.M. Trushkovsky, A.G. |
| title | Optical properties of silicon carbide obtained by direct ion deposition |
| title_alt | Оптичні властивості плівок карбіду кремнію, одержаних методом прямого іонного осадження |
| title_full | Optical properties of silicon carbide obtained by direct ion deposition |
| title_fullStr | Optical properties of silicon carbide obtained by direct ion deposition |
| title_full_unstemmed | Optical properties of silicon carbide obtained by direct ion deposition |
| title_short | Optical properties of silicon carbide obtained by direct ion deposition |
| title_sort | optical properties of silicon carbide obtained by direct ion deposition |
| url | https://nasplib.isofts.kiev.ua/handle/123456789/135067 |
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