Optical properties of silicon carbide obtained by direct ion deposition

• Date: 2006
• Main Authors: Lopin, A.V., Semenov, A.V., Puzikov, V.M., Trushkovsky, A.G.
• Format: Article
• Language: English
• Published: НТК «Інститут монокристалів» НАН України 2006
• Series: Functional Materials
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/135067
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Optical properties of silicon carbide obtained by direct ion deposition / A.V. Lopin, A.V. Semenov, V.M. Puzikov, A.G. Trushkovsky // Functional Materials. — 2006. — Т. 13, № 4. — С. 631-636. — Бібліогр.: 9 назв. — англ.

Optical transmission, absorption and reflection spectra of silicon carbide thin films deposited on sapphire substrate from the carbon and silicon ionic flows have been investigated. The films have been obtained at various deposition paramenters, i.e., under variation of ion energy and substrate temp...