Phase composition, structure and stress state of magnetron sputtered W-Ti condensates
The effects of elemental composition and deposition temperature on W—Ti ion-plasma condensate structure, substructure characteristics and stress state have been studied. The crystalline state of all phases formed during deposition has been found to be based on the α-W bcc crystalline lattice. In the...
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| Опубліковано в: : | Functional Materials |
|---|---|
| Дата: | 2006 |
| Автор: | |
| Формат: | Стаття |
| Мова: | Англійська |
| Опубліковано: |
НТК «Інститут монокристалів» НАН України
2006
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| Онлайн доступ: | https://nasplib.isofts.kiev.ua/handle/123456789/135072 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Цитувати: | Phase composition, structure and stress state of magnetron sputtered W-Ti condensates / O.V. Sobol` // Functional Materials. — 2006. — Т. 13, № 4. — С. 577-583. — Бібліогр.: 17 назв. — англ. |
Репозитарії
Digital Library of Periodicals of National Academy of Sciences of Ukraine| _version_ | 1862548594566889472 |
|---|---|
| author | Sobol`, O.V. |
| author_facet | Sobol`, O.V. |
| citation_txt | Phase composition, structure and stress state of magnetron sputtered W-Ti condensates / O.V. Sobol` // Functional Materials. — 2006. — Т. 13, № 4. — С. 577-583. — Бібліогр.: 17 назв. — англ. |
| collection | DSpace DC |
| container_title | Functional Materials |
| description | The effects of elemental composition and deposition temperature on W—Ti ion-plasma condensate structure, substructure characteristics and stress state have been studied. The crystalline state of all phases formed during deposition has been found to be based on the α-W bcc crystalline lattice. In the initial stages of solid solution formation under relatively low content of substituting titanium atoms in the lattice (7 to 11 at.%), oriented crystallite growth takes place with (100) planes parallel to the condensate surface. At higher titanium atomic content in the lattice, strongly strained crystallites of (W₁₋ₓ, Tiₓ) solid solution are formed with light preferential orientation of (110) plane parallel to the growth surface. In this case, the deposition temperature elevation from 300°C to 800°C results in concentration stratification of the formed solid solution followed by formation of two solid solutions with different stable elemental composition. The diffusion coefficient in nano-crystalline W—Ti condensates has been estimated and models describing the formed condensate structure state are proposed.
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| first_indexed | 2025-11-25T20:31:20Z |
| format | Article |
| fulltext | |
| id | nasplib_isofts_kiev_ua-123456789-135072 |
| institution | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| issn | 1027-5495 |
| language | English |
| last_indexed | 2025-11-25T20:31:20Z |
| publishDate | 2006 |
| publisher | НТК «Інститут монокристалів» НАН України |
| record_format | dspace |
| spelling | Sobol`, O.V. 2018-06-14T14:52:52Z 2018-06-14T14:52:52Z 2006 Phase composition, structure and stress state of magnetron sputtered W-Ti condensates / O.V. Sobol` // Functional Materials. — 2006. — Т. 13, № 4. — С. 577-583. — Бібліогр.: 17 назв. — англ. 1027-5495 https://nasplib.isofts.kiev.ua/handle/123456789/135072 The effects of elemental composition and deposition temperature on W—Ti ion-plasma condensate structure, substructure characteristics and stress state have been studied. The crystalline state of all phases formed during deposition has been found to be based on the α-W bcc crystalline lattice. In the initial stages of solid solution formation under relatively low content of substituting titanium atoms in the lattice (7 to 11 at.%), oriented crystallite growth takes place with (100) planes parallel to the condensate surface. At higher titanium atomic content in the lattice, strongly strained crystallites of (W₁₋ₓ, Tiₓ) solid solution are formed with light preferential orientation of (110) plane parallel to the growth surface. In this case, the deposition temperature elevation from 300°C to 800°C results in concentration stratification of the formed solid solution followed by formation of two solid solutions with different stable elemental composition. The diffusion coefficient in nano-crystalline W—Ti condensates has been estimated and models describing the formed condensate structure state are proposed. en НТК «Інститут монокристалів» НАН України Functional Materials Phase composition, structure and stress state of magnetron sputtered W-Ti condensates Фазовий склад, структура та напружений стан конденсатів системи W-Ti, одержаних магнетронним розпиленням Article published earlier |
| spellingShingle | Phase composition, structure and stress state of magnetron sputtered W-Ti condensates Sobol`, O.V. |
| title | Phase composition, structure and stress state of magnetron sputtered W-Ti condensates |
| title_alt | Фазовий склад, структура та напружений стан конденсатів системи W-Ti, одержаних магнетронним розпиленням |
| title_full | Phase composition, structure and stress state of magnetron sputtered W-Ti condensates |
| title_fullStr | Phase composition, structure and stress state of magnetron sputtered W-Ti condensates |
| title_full_unstemmed | Phase composition, structure and stress state of magnetron sputtered W-Ti condensates |
| title_short | Phase composition, structure and stress state of magnetron sputtered W-Ti condensates |
| title_sort | phase composition, structure and stress state of magnetron sputtered w-ti condensates |
| url | https://nasplib.isofts.kiev.ua/handle/123456789/135072 |
| work_keys_str_mv | AT sobolov phasecompositionstructureandstressstateofmagnetronsputteredwticondensates AT sobolov fazoviiskladstrukturatanapruženiistankondensatívsistemiwtioderžanihmagnetronnimrozpilennâm |