Optical properties of AlN/n-Si(111) films obtained by method of HF reactive magnetron sputtering
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| Published in: | Functional Materials |
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| Date: | 2010 |
| Main Authors: | , , , , , |
| Format: | Article |
| Language: | English |
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НТК «Інститут монокристалів» НАН України
2010
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| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/135183 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Optical properties of AlN/n-Si(111) films obtained by method of HF reactive magnetron sputtering / M.S. Zayats, V.G. Boiko, P.O. Gentsar, M.V. Vuichyk, O.S. Lytvyn, A.V. Stronski // Functional Materials. — 2010. — Т. 17, № 2. — С. 209-212. — Бібліогр.: 11 назв. — англ. |
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Digital Library of Periodicals of National Academy of Sciences of Ukraine| _version_ | 1862548596782530560 |
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| author | Zayats, M.S. Boiko, V.G. Gentsar, P.O. Vuichyk, M.V. Lytvyn, O.S. Stronski, A.V. |
| author_facet | Zayats, M.S. Boiko, V.G. Gentsar, P.O. Vuichyk, M.V. Lytvyn, O.S. Stronski, A.V. |
| citation_txt | Optical properties of AlN/n-Si(111) films obtained by method of HF reactive magnetron sputtering / M.S. Zayats, V.G. Boiko, P.O. Gentsar, M.V. Vuichyk, O.S. Lytvyn, A.V. Stronski // Functional Materials. — 2010. — Т. 17, № 2. — С. 209-212. — Бібліогр.: 11 назв. — англ. |
| collection | DSpace DC |
| container_title | Functional Materials |
| first_indexed | 2025-11-25T18:43:03Z |
| format | Article |
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| id | nasplib_isofts_kiev_ua-123456789-135183 |
| institution | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| issn | 1027-5495 |
| language | English |
| last_indexed | 2025-11-25T18:43:03Z |
| publishDate | 2010 |
| publisher | НТК «Інститут монокристалів» НАН України |
| record_format | dspace |
| spelling | Zayats, M.S. Boiko, V.G. Gentsar, P.O. Vuichyk, M.V. Lytvyn, O.S. Stronski, A.V. 2018-06-14T16:28:56Z 2018-06-14T16:28:56Z 2010 Optical properties of AlN/n-Si(111) films obtained by method of HF reactive magnetron sputtering / M.S. Zayats, V.G. Boiko, P.O. Gentsar, M.V. Vuichyk, O.S. Lytvyn, A.V. Stronski // Functional Materials. — 2010. — Т. 17, № 2. — С. 209-212. — Бібліогр.: 11 назв. — англ. 1027-5495 https://nasplib.isofts.kiev.ua/handle/123456789/135183 en НТК «Інститут монокристалів» НАН України Functional Materials Characterization and properties Optical properties of AlN/n-Si(111) films obtained by method of HF reactive magnetron sputtering Оптичні властивості плівок AlN/n-Si(111) отриманих методом високочастотного реактивного магнетронного розпилення Article published earlier |
| spellingShingle | Optical properties of AlN/n-Si(111) films obtained by method of HF reactive magnetron sputtering Zayats, M.S. Boiko, V.G. Gentsar, P.O. Vuichyk, M.V. Lytvyn, O.S. Stronski, A.V. Characterization and properties |
| title | Optical properties of AlN/n-Si(111) films obtained by method of HF reactive magnetron sputtering |
| title_alt | Оптичні властивості плівок AlN/n-Si(111) отриманих методом високочастотного реактивного магнетронного розпилення |
| title_full | Optical properties of AlN/n-Si(111) films obtained by method of HF reactive magnetron sputtering |
| title_fullStr | Optical properties of AlN/n-Si(111) films obtained by method of HF reactive magnetron sputtering |
| title_full_unstemmed | Optical properties of AlN/n-Si(111) films obtained by method of HF reactive magnetron sputtering |
| title_short | Optical properties of AlN/n-Si(111) films obtained by method of HF reactive magnetron sputtering |
| title_sort | optical properties of aln/n-si(111) films obtained by method of hf reactive magnetron sputtering |
| topic | Characterization and properties |
| topic_facet | Characterization and properties |
| url | https://nasplib.isofts.kiev.ua/handle/123456789/135183 |
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