Optical properties of AlN/n-Si(111) films obtained by method of HF reactive magnetron sputtering

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Veröffentlicht in:Functional Materials
Datum:2010
Hauptverfasser: Zayats, M.S., Boiko, V.G., Gentsar, P.O., Vuichyk, M.V., Lytvyn, O.S., Stronski, A.V.
Format: Artikel
Sprache:English
Veröffentlicht: НТК «Інститут монокристалів» НАН України 2010
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Online Zugang:https://nasplib.isofts.kiev.ua/handle/123456789/135183
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Назва журналу:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Zitieren:Optical properties of AlN/n-Si(111) films obtained by method of HF reactive magnetron sputtering / M.S. Zayats, V.G. Boiko, P.O. Gentsar, M.V. Vuichyk, O.S. Lytvyn, A.V. Stronski // Functional Materials. — 2010. — Т. 17, № 2. — С. 209-212. — Бібліогр.: 11 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine
id nasplib_isofts_kiev_ua-123456789-135183
record_format dspace
spelling Zayats, M.S.
Boiko, V.G.
Gentsar, P.O.
Vuichyk, M.V.
Lytvyn, O.S.
Stronski, A.V.
2018-06-14T16:28:56Z
2018-06-14T16:28:56Z
2010
Optical properties of AlN/n-Si(111) films obtained by method of HF reactive magnetron sputtering / M.S. Zayats, V.G. Boiko, P.O. Gentsar, M.V. Vuichyk, O.S. Lytvyn, A.V. Stronski // Functional Materials. — 2010. — Т. 17, № 2. — С. 209-212. — Бібліогр.: 11 назв. — англ.
1027-5495
https://nasplib.isofts.kiev.ua/handle/123456789/135183
en
НТК «Інститут монокристалів» НАН України
Functional Materials
Characterization and properties
Optical properties of AlN/n-Si(111) films obtained by method of HF reactive magnetron sputtering
Оптичні властивості плівок AlN/n-Si(111) отриманих методом високочастотного реактивного магнетронного розпилення
Article
published earlier
institution Digital Library of Periodicals of National Academy of Sciences of Ukraine
collection DSpace DC
title Optical properties of AlN/n-Si(111) films obtained by method of HF reactive magnetron sputtering
spellingShingle Optical properties of AlN/n-Si(111) films obtained by method of HF reactive magnetron sputtering
Zayats, M.S.
Boiko, V.G.
Gentsar, P.O.
Vuichyk, M.V.
Lytvyn, O.S.
Stronski, A.V.
Characterization and properties
title_short Optical properties of AlN/n-Si(111) films obtained by method of HF reactive magnetron sputtering
title_full Optical properties of AlN/n-Si(111) films obtained by method of HF reactive magnetron sputtering
title_fullStr Optical properties of AlN/n-Si(111) films obtained by method of HF reactive magnetron sputtering
title_full_unstemmed Optical properties of AlN/n-Si(111) films obtained by method of HF reactive magnetron sputtering
title_sort optical properties of aln/n-si(111) films obtained by method of hf reactive magnetron sputtering
author Zayats, M.S.
Boiko, V.G.
Gentsar, P.O.
Vuichyk, M.V.
Lytvyn, O.S.
Stronski, A.V.
author_facet Zayats, M.S.
Boiko, V.G.
Gentsar, P.O.
Vuichyk, M.V.
Lytvyn, O.S.
Stronski, A.V.
topic Characterization and properties
topic_facet Characterization and properties
publishDate 2010
language English
container_title Functional Materials
publisher НТК «Інститут монокристалів» НАН України
format Article
title_alt Оптичні властивості плівок AlN/n-Si(111) отриманих методом високочастотного реактивного магнетронного розпилення
issn 1027-5495
url https://nasplib.isofts.kiev.ua/handle/123456789/135183
citation_txt Optical properties of AlN/n-Si(111) films obtained by method of HF reactive magnetron sputtering / M.S. Zayats, V.G. Boiko, P.O. Gentsar, M.V. Vuichyk, O.S. Lytvyn, A.V. Stronski // Functional Materials. — 2010. — Т. 17, № 2. — С. 209-212. — Бібліогр.: 11 назв. — англ.
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AT gentsarpo opticalpropertiesofalnnsi111filmsobtainedbymethodofhfreactivemagnetronsputtering
AT vuichykmv opticalpropertiesofalnnsi111filmsobtainedbymethodofhfreactivemagnetronsputtering
AT lytvynos opticalpropertiesofalnnsi111filmsobtainedbymethodofhfreactivemagnetronsputtering
AT stronskiav opticalpropertiesofalnnsi111filmsobtainedbymethodofhfreactivemagnetronsputtering
AT zayatsms optičnívlastivostíplívokalnnsi111otrimanihmetodomvisokočastotnogoreaktivnogomagnetronnogorozpilennâ
AT boikovg optičnívlastivostíplívokalnnsi111otrimanihmetodomvisokočastotnogoreaktivnogomagnetronnogorozpilennâ
AT gentsarpo optičnívlastivostíplívokalnnsi111otrimanihmetodomvisokočastotnogoreaktivnogomagnetronnogorozpilennâ
AT vuichykmv optičnívlastivostíplívokalnnsi111otrimanihmetodomvisokočastotnogoreaktivnogomagnetronnogorozpilennâ
AT lytvynos optičnívlastivostíplívokalnnsi111otrimanihmetodomvisokočastotnogoreaktivnogomagnetronnogorozpilennâ
AT stronskiav optičnívlastivostíplívokalnnsi111otrimanihmetodomvisokočastotnogoreaktivnogomagnetronnogorozpilennâ
first_indexed 2025-11-25T18:43:03Z
last_indexed 2025-11-25T18:43:03Z
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