Mechanism of AlN film formation at thermochemical nitridization of sapphire
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| Published in: | Functional Materials |
|---|---|
| Date: | 2011 |
| Main Authors: | Kaltaev, Kh.Sh.-ogly, Nizhankovskiy, S.V., Sidelnikova, N.S., Rom, M.A., Dan'ko, A.Ya., Dobrotvorskaya, M.V., Belyaev, A.Ye., Strelchuk, V.V., Kolomys, A.F. |
| Format: | Article |
| Language: | English |
| Published: |
НТК «Інститут монокристалів» НАН України
2011
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| Subjects: | |
| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/135411 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Mechanism of AlN film formation at thermochemical nitridization of sapphire / Kh.Sh.-ogly Kaltaev, S.V. Nizhankovskiy, N.S. Sidelnikova, M.A. Rom, A.Ya. Dan'ko, M.V. Dobrotvorskaya, A.Ye. Belyaev, V.V. Strelchuk, A.F. Kolomys // Functional Materials. — 2011. — Т. 18, № 1. — С. 41-49. — Бібліогр.: 27 назв. — англ. |
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