Plasma activated eb-deposition: different modes of arc discharge and plasma characteristics

• Published in: Вопросы атомной науки и техники
• Date: 2017
• ISSN: 1562-6016
• Main Author: Safonov, V.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2017
• Subjects: Физика радиационных и ионно-плазменных технологий
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/136155
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Plasma activated eb-deposition: different modes of arc discharge and plasma characteristics / V. Safonov // Вопросы атомной науки и техники. — 2017. — № 5. — С. 65-72. — Бібліогр.: 25 назв. — англ.

The results of experimental study of the operating parameters of a non-self-sustaining arc discharge in the process of electron-beam evaporation of a cathode are presented in the paper. The conditions of ignition and burning of the arc discharge were studied. The plasma parameters, ion current on th...