Plasma activated eb-deposition: different modes of arc discharge and plasma characteristics
The results of experimental study of the operating parameters of a non-self-sustaining arc discharge in the process of electron-beam evaporation of a cathode are presented in the paper. The conditions of ignition and burning of the arc discharge were studied. The plasma parameters, ion current on th...
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| Published in: | Вопросы атомной науки и техники |
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| Date: | 2017 |
| Main Author: | |
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2017
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| Subjects: | |
| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/136155 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Plasma activated eb-deposition: different modes of arc discharge and plasma characteristics / V. Safonov // Вопросы атомной науки и техники. — 2017. — № 5. — С. 65-72. — Бібліогр.: 25 назв. — англ. |