Infrared heaters with thin-film conductive layers were synthesized on the glass by the magnetron sputtering

• Published in: Вопросы атомной науки и техники
• Date: 2017
• Main Authors: Lytvynenko, V.V., Shmidko, I.N., Rodionov, E.V.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2017
• Subjects: Физика радиационных и ионно-плазменных технологий
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/136168
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Infrared heaters with thin-film conductive layers were synthesized on the glass by the magnetron sputtering / V.V. Lytvynenko, I.N. Shmidko, E.V. Rodionov // Вопросы атомной науки и техники. — 2017. — № 5. — С. 98-102. — Бібліогр.: 18 назв. — англ.

This paper examines the infrared heating panels with thin conductivite layer. An oxide semiconductor thin film layer is proposed for improvements of the heating layer’s reliability and stability. Characteristics of the oxide semiconductor thin film’s materials are analyzed and tin oxide film are sel...