The aggregation of point defetc in dislocation-free silicon single crystals

The formation kinetics for grown-in microdefects nucleation centers in dislocation-free silicon single crystals has been considered. It has been demonstrated that the diffusion-controlled aggregation of point defects defines the process of grown-in microdefects formation. Decomposition of oversatura...

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Published in:Functional Materials
Date:2007
Main Authors: Talanin, V.I., Talanin, I.E., Voronin, A.A., Sirota, A.V.
Format: Article
Language:English
Published: НТК «Інститут монокристалів» НАН України 2007
Online Access:https://nasplib.isofts.kiev.ua/handle/123456789/136429
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Journal Title:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Cite this:The aggregation of point defetc in dislocation-free silicon single crystals / V.I. Talanin, I.E. Talanin, A.A. Voronin, A.V. Sirota // Functional Materials. — 2007. — Т. 14, № 1. — С. 48-52. — Бібліогр.: 14 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine
_version_ 1860252486315540480
author Talanin, V.I.
Talanin, I.E.
Voronin, A.A.
Sirota, A.V.
author_facet Talanin, V.I.
Talanin, I.E.
Voronin, A.A.
Sirota, A.V.
citation_txt The aggregation of point defetc in dislocation-free silicon single crystals / V.I. Talanin, I.E. Talanin, A.A. Voronin, A.V. Sirota // Functional Materials. — 2007. — Т. 14, № 1. — С. 48-52. — Бібліогр.: 14 назв. — англ.
collection DSpace DC
container_title Functional Materials
description The formation kinetics for grown-in microdefects nucleation centers in dislocation-free silicon single crystals has been considered. It has been demonstrated that the diffusion-controlled aggregation of point defects defines the process of grown-in microdefects formation. Decomposition of oversaturated solid-state solution follows two mechanisms, namely vacancy-type and interstitial-type. Decomposition of oversaturated solid impurity solutions occurs at temperatures near the crystallization front, while decomposition of oversaturated solid solutions of intrinsic point defects is induced by crystal cooling (at T < 1200°C). The good consistency between theoretical and experimental results proves the validity of the proposed model for point defects aggregation.
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id nasplib_isofts_kiev_ua-123456789-136429
institution Digital Library of Periodicals of National Academy of Sciences of Ukraine
issn 1027-5495
language English
last_indexed 2025-12-07T18:44:58Z
publishDate 2007
publisher НТК «Інститут монокристалів» НАН України
record_format dspace
spelling Talanin, V.I.
Talanin, I.E.
Voronin, A.A.
Sirota, A.V.
2018-06-16T12:18:04Z
2018-06-16T12:18:04Z
2007
The aggregation of point defetc in dislocation-free silicon single crystals / V.I. Talanin, I.E. Talanin, A.A. Voronin, A.V. Sirota // Functional Materials. — 2007. — Т. 14, № 1. — С. 48-52. — Бібліогр.: 14 назв. — англ.
1027-5495
https://nasplib.isofts.kiev.ua/handle/123456789/136429
The formation kinetics for grown-in microdefects nucleation centers in dislocation-free silicon single crystals has been considered. It has been demonstrated that the diffusion-controlled aggregation of point defects defines the process of grown-in microdefects formation. Decomposition of oversaturated solid-state solution follows two mechanisms, namely vacancy-type and interstitial-type. Decomposition of oversaturated solid impurity solutions occurs at temperatures near the crystallization front, while decomposition of oversaturated solid solutions of intrinsic point defects is induced by crystal cooling (at T &lt; 1200°C). The good consistency between theoretical and experimental results proves the validity of the proposed model for point defects aggregation.
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НТК «Інститут монокристалів» НАН України
Functional Materials
The aggregation of point defetc in dislocation-free silicon single crystals
Агрегація точкових дефектів у бездислокаційних монокристалах кремнію
Article
published earlier
spellingShingle The aggregation of point defetc in dislocation-free silicon single crystals
Talanin, V.I.
Talanin, I.E.
Voronin, A.A.
Sirota, A.V.
title The aggregation of point defetc in dislocation-free silicon single crystals
title_alt Агрегація точкових дефектів у бездислокаційних монокристалах кремнію
title_full The aggregation of point defetc in dislocation-free silicon single crystals
title_fullStr The aggregation of point defetc in dislocation-free silicon single crystals
title_full_unstemmed The aggregation of point defetc in dislocation-free silicon single crystals
title_short The aggregation of point defetc in dislocation-free silicon single crystals
title_sort aggregation of point defetc in dislocation-free silicon single crystals
url https://nasplib.isofts.kiev.ua/handle/123456789/136429
work_keys_str_mv AT talaninvi theaggregationofpointdefetcindislocationfreesiliconsinglecrystals
AT talaninie theaggregationofpointdefetcindislocationfreesiliconsinglecrystals
AT voroninaa theaggregationofpointdefetcindislocationfreesiliconsinglecrystals
AT sirotaav theaggregationofpointdefetcindislocationfreesiliconsinglecrystals
AT talaninvi agregacíâtočkovihdefektívubezdislokacíinihmonokristalahkremníû
AT talaninie agregacíâtočkovihdefektívubezdislokacíinihmonokristalahkremníû
AT voroninaa agregacíâtočkovihdefektívubezdislokacíinihmonokristalahkremníû
AT sirotaav agregacíâtočkovihdefektívubezdislokacíinihmonokristalahkremníû
AT talaninvi aggregationofpointdefetcindislocationfreesiliconsinglecrystals
AT talaninie aggregationofpointdefetcindislocationfreesiliconsinglecrystals
AT voroninaa aggregationofpointdefetcindislocationfreesiliconsinglecrystals
AT sirotaav aggregationofpointdefetcindislocationfreesiliconsinglecrystals