Structure and stress state of ion-plasma hafnium condensates
The 0.05-0.5 μm trick films have been obtained from GFE-1 grade hafnium target by magnetron sputtering using argon ions. Purity of the obtained films was controlled by X-ray fluorescence spectroscopy. The structure of films was explored by X-ray diffractometry. The compression residual stresses in t...
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| Veröffentlicht in: | Functional Materials |
|---|---|
| Datum: | 2007 |
| Hauptverfasser: | , , , , , |
| Format: | Artikel |
| Sprache: | English |
| Veröffentlicht: |
НТК «Інститут монокристалів» НАН України
2007
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| Online Zugang: | https://nasplib.isofts.kiev.ua/handle/123456789/136491 |
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| Назва журналу: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Zitieren: | Structure and stress state of ion-plasma hafnium condensates / A.S. Vus, S.V. Malykhin, A.T. Pugachev, E.N. Reshetnyak, R.V. Azhazha, K.V. Kovtun // Functional Materials. — 2007. — Т. 14, № 2. — С. 204-208. — Бібліогр.: 11 назв. — англ. |