Formation of porous zinc nanosystems using direct and reverse flows of DC magnetron sputtering
The work is devoted to comparative analysis of two technological solutions for Zn nanosystems formation which have been implemented on the basis of direct-current magnetron sputtering. In the first case, conventional magnetron sputtering was used and direct flows were deposited on the substrate posi...
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| Published in: | Functional Materials |
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| Date: | 2017 |
| Main Authors: | , , , |
| Format: | Article |
| Language: | English |
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НТК «Інститут монокристалів» НАН України
2017
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| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/136669 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Formation of porous zinc nanosystems using direct and reverse flows of DC magnetron sputtering / V.M. Latyshev, V.I. Perekrestov, A.S. Kornyushchenko, I.V. Zahaiko // Functional Materials. — 2017. — Т. 24, № 1. — С. 154-161. — Бібліогр.: 35 назв. — англ. |
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Digital Library of Periodicals of National Academy of Sciences of Ukraine| _version_ | 1862727134912446464 |
|---|---|
| author | Latyshev, V.M. Perekrestov, V.I. Kornyushchenko, A.S. Zahaiko, I.V. |
| author_facet | Latyshev, V.M. Perekrestov, V.I. Kornyushchenko, A.S. Zahaiko, I.V. |
| citation_txt | Formation of porous zinc nanosystems using direct and reverse flows of DC magnetron sputtering / V.M. Latyshev, V.I. Perekrestov, A.S. Kornyushchenko, I.V. Zahaiko // Functional Materials. — 2017. — Т. 24, № 1. — С. 154-161. — Бібліогр.: 35 назв. — англ. |
| collection | DSpace DC |
| container_title | Functional Materials |
| description | The work is devoted to comparative analysis of two technological solutions for Zn nanosystems formation which have been implemented on the basis of direct-current magnetron sputtering. In the first case, conventional magnetron sputtering was used and direct flows were deposited on the substrate positioned in the front of a sputterer. In the second case, reverse flows were used and the substrate was located inside the magnetron sputterer. It has been shown experimentally, that the second technological approach gives more reproducible results as compared to the classical one. In addition, usage of the reverse flows leads to significant increase in the nanosystems deposition rates.
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| first_indexed | 2025-12-07T19:01:29Z |
| format | Article |
| fulltext | |
| id | nasplib_isofts_kiev_ua-123456789-136669 |
| institution | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| issn | 1027-5495 |
| language | English |
| last_indexed | 2025-12-07T19:01:29Z |
| publishDate | 2017 |
| publisher | НТК «Інститут монокристалів» НАН України |
| record_format | dspace |
| spelling | Latyshev, V.M. Perekrestov, V.I. Kornyushchenko, A.S. Zahaiko, I.V. 2018-06-16T15:01:34Z 2018-06-16T15:01:34Z 2017 Formation of porous zinc nanosystems using direct and reverse flows of DC magnetron sputtering / V.M. Latyshev, V.I. Perekrestov, A.S. Kornyushchenko, I.V. Zahaiko // Functional Materials. — 2017. — Т. 24, № 1. — С. 154-161. — Бібліогр.: 35 назв. — англ. 1027-5495 DOI: https://doi.org/10.15407/fm24.01.154 https://nasplib.isofts.kiev.ua/handle/123456789/136669 The work is devoted to comparative analysis of two technological solutions for Zn nanosystems formation which have been implemented on the basis of direct-current magnetron sputtering. In the first case, conventional magnetron sputtering was used and direct flows were deposited on the substrate positioned in the front of a sputterer. In the second case, reverse flows were used and the substrate was located inside the magnetron sputterer. It has been shown experimentally, that the second technological approach gives more reproducible results as compared to the classical one. In addition, usage of the reverse flows leads to significant increase in the nanosystems deposition rates. en НТК «Інститут монокристалів» НАН України Functional Materials Technology Formation of porous zinc nanosystems using direct and reverse flows of DC magnetron sputtering Article published earlier |
| spellingShingle | Formation of porous zinc nanosystems using direct and reverse flows of DC magnetron sputtering Latyshev, V.M. Perekrestov, V.I. Kornyushchenko, A.S. Zahaiko, I.V. Technology |
| title | Formation of porous zinc nanosystems using direct and reverse flows of DC magnetron sputtering |
| title_full | Formation of porous zinc nanosystems using direct and reverse flows of DC magnetron sputtering |
| title_fullStr | Formation of porous zinc nanosystems using direct and reverse flows of DC magnetron sputtering |
| title_full_unstemmed | Formation of porous zinc nanosystems using direct and reverse flows of DC magnetron sputtering |
| title_short | Formation of porous zinc nanosystems using direct and reverse flows of DC magnetron sputtering |
| title_sort | formation of porous zinc nanosystems using direct and reverse flows of dc magnetron sputtering |
| topic | Technology |
| topic_facet | Technology |
| url | https://nasplib.isofts.kiev.ua/handle/123456789/136669 |
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