Formation of porous zinc nanosystems using direct and reverse flows of DC magnetron sputtering

• Veröffentlicht in: Functional Materials
• Datum: 2017
• Hauptverfasser: Latyshev, V.M., Perekrestov, V.I., Kornyushchenko, A.S., Zahaiko, I.V.
• Format: Artikel
• Sprache: Englisch
• Veröffentlicht: НТК «Інститут монокристалів» НАН України 2017
• Schlagworte: Technology
• Online Zugang: https://nasplib.isofts.kiev.ua/handle/123456789/136669
• Назва журналу: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Zitieren: Formation of porous zinc nanosystems using direct and reverse flows of DC magnetron sputtering / V.M. Latyshev, V.I. Perekrestov, A.S. Kornyushchenko, I.V. Zahaiko // Functional Materials. — 2017. — Т. 24, № 1. — С. 154-161. — Бібліогр.: 35 назв. — англ.

The work is devoted to comparative analysis of two technological solutions for Zn nanosystems formation which have been implemented on the basis of direct-current magnetron sputtering. In the first case, conventional magnetron sputtering was used and direct flows were deposited on the substrate posi...