Structural and optical study of ZnS thin films prepared by radio frequency magnetron sputtering at different substrate temperatures

ZnS thin films were deposited by radio frequency (RF) sputtering with substrate temperatures from room temperature to 400°C. The effect of substrate temperature on structural and optical properties for the ZnS films was investigated. The systematic investigation at different substrate temperatures o...

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Veröffentlicht in:Functional Materials
Datum:2017
Hauptverfasser: Le Kong, Jinxiang Deng, Liang Chen, Zhen Shen, Jiyou Wang
Format: Artikel
Sprache:Englisch
Veröffentlicht: НТК «Інститут монокристалів» НАН України 2017
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Online Zugang:https://nasplib.isofts.kiev.ua/handle/123456789/136898
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Zitieren:Structural and optical study of ZnS thin films prepared by radio frequency magnetron sputtering at different substrate temperatures / Le Kong, Jinxiang Deng, Liang Chen, Zhen Shen, Jiyou Wang // Functional Materials. — 2017. — Т. 24, № 4. — С. 451-546. — Бібліогр.: 23 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine
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author Le Kong
Jinxiang Deng
Liang Chen
Zhen Shen
Jiyou Wang
author_facet Le Kong
Jinxiang Deng
Liang Chen
Zhen Shen
Jiyou Wang
citation_txt Structural and optical study of ZnS thin films prepared by radio frequency magnetron sputtering at different substrate temperatures / Le Kong, Jinxiang Deng, Liang Chen, Zhen Shen, Jiyou Wang // Functional Materials. — 2017. — Т. 24, № 4. — С. 451-546. — Бібліогр.: 23 назв. — англ.
collection DSpace DC
container_title Functional Materials
description ZnS thin films were deposited by radio frequency (RF) sputtering with substrate temperatures from room temperature to 400°C. The effect of substrate temperature on structural and optical properties for the ZnS films was investigated. The systematic investigation at different substrate temperatures of the properties of sputtered ZnS films especially optical constants obtained through spectroscopic ellipsometry can provide some guidance for ZnS films to be applied in thin film solar cells as buffer layers. The choice of sputtering fabrication method may promote the full sputtering technique route in CIGS or CZTS solar cells which is beneficial to the solar cell industrialization.
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format Article
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institution Digital Library of Periodicals of National Academy of Sciences of Ukraine
issn 1027-5495
language English
last_indexed 2025-12-07T19:35:58Z
publishDate 2017
publisher НТК «Інститут монокристалів» НАН України
record_format dspace
spelling Le Kong
Jinxiang Deng
Liang Chen
Zhen Shen
Jiyou Wang
2018-06-16T17:26:19Z
2018-06-16T17:26:19Z
2017
Structural and optical study of ZnS thin films prepared by radio frequency magnetron sputtering at different substrate temperatures / Le Kong, Jinxiang Deng, Liang Chen, Zhen Shen, Jiyou Wang // Functional Materials. — 2017. — Т. 24, № 4. — С. 451-546. — Бібліогр.: 23 назв. — англ.
1027-5495
DOI: https://doi.org/10.15407/fm24.04.541
https://nasplib.isofts.kiev.ua/handle/123456789/136898
ZnS thin films were deposited by radio frequency (RF) sputtering with substrate temperatures from room temperature to 400°C. The effect of substrate temperature on structural and optical properties for the ZnS films was investigated. The systematic investigation at different substrate temperatures of the properties of sputtered ZnS films especially optical constants obtained through spectroscopic ellipsometry can provide some guidance for ZnS films to be applied in thin film solar cells as buffer layers. The choice of sputtering fabrication method may promote the full sputtering technique route in CIGS or CZTS solar cells which is beneficial to the solar cell industrialization.
en
НТК «Інститут монокристалів» НАН України
Functional Materials
Characterization and properties
Structural and optical study of ZnS thin films prepared by radio frequency magnetron sputtering at different substrate temperatures
Article
published earlier
spellingShingle Structural and optical study of ZnS thin films prepared by radio frequency magnetron sputtering at different substrate temperatures
Le Kong
Jinxiang Deng
Liang Chen
Zhen Shen
Jiyou Wang
Characterization and properties
title Structural and optical study of ZnS thin films prepared by radio frequency magnetron sputtering at different substrate temperatures
title_full Structural and optical study of ZnS thin films prepared by radio frequency magnetron sputtering at different substrate temperatures
title_fullStr Structural and optical study of ZnS thin films prepared by radio frequency magnetron sputtering at different substrate temperatures
title_full_unstemmed Structural and optical study of ZnS thin films prepared by radio frequency magnetron sputtering at different substrate temperatures
title_short Structural and optical study of ZnS thin films prepared by radio frequency magnetron sputtering at different substrate temperatures
title_sort structural and optical study of zns thin films prepared by radio frequency magnetron sputtering at different substrate temperatures
topic Characterization and properties
topic_facet Characterization and properties
url https://nasplib.isofts.kiev.ua/handle/123456789/136898
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