Structural and optical study of ZnS thin films prepared by radio frequency magnetron sputtering at different substrate temperatures
ZnS thin films were deposited by radio frequency (RF) sputtering with substrate temperatures from room temperature to 400°C. The effect of substrate temperature on structural and optical properties for the ZnS films was investigated. The systematic investigation at different substrate temperatures o...
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| Published in: | Functional Materials |
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| Date: | 2017 |
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| Format: | Article |
| Language: | English |
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НТК «Інститут монокристалів» НАН України
2017
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| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/136898 |
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| Cite this: | Structural and optical study of ZnS thin films prepared by radio frequency magnetron sputtering at different substrate temperatures / Le Kong, Jinxiang Deng, Liang Chen, Zhen Shen, Jiyou Wang // Functional Materials. — 2017. — Т. 24, № 4. — С. 451-546. — Бібліогр.: 23 назв. — англ. |
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Le Kong Jinxiang Deng Liang Chen Zhen Shen Jiyou Wang 2018-06-16T17:26:19Z 2018-06-16T17:26:19Z 2017 Structural and optical study of ZnS thin films prepared by radio frequency magnetron sputtering at different substrate temperatures / Le Kong, Jinxiang Deng, Liang Chen, Zhen Shen, Jiyou Wang // Functional Materials. — 2017. — Т. 24, № 4. — С. 451-546. — Бібліогр.: 23 назв. — англ. 1027-5495 DOI: https://doi.org/10.15407/fm24.04.541 https://nasplib.isofts.kiev.ua/handle/123456789/136898 ZnS thin films were deposited by radio frequency (RF) sputtering with substrate temperatures from room temperature to 400°C. The effect of substrate temperature on structural and optical properties for the ZnS films was investigated. The systematic investigation at different substrate temperatures of the properties of sputtered ZnS films especially optical constants obtained through spectroscopic ellipsometry can provide some guidance for ZnS films to be applied in thin film solar cells as buffer layers. The choice of sputtering fabrication method may promote the full sputtering technique route in CIGS or CZTS solar cells which is beneficial to the solar cell industrialization. en НТК «Інститут монокристалів» НАН України Functional Materials Characterization and properties Structural and optical study of ZnS thin films prepared by radio frequency magnetron sputtering at different substrate temperatures Article published earlier |
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Digital Library of Periodicals of National Academy of Sciences of Ukraine |
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| title |
Structural and optical study of ZnS thin films prepared by radio frequency magnetron sputtering at different substrate temperatures |
| spellingShingle |
Structural and optical study of ZnS thin films prepared by radio frequency magnetron sputtering at different substrate temperatures Le Kong Jinxiang Deng Liang Chen Zhen Shen Jiyou Wang Characterization and properties |
| title_short |
Structural and optical study of ZnS thin films prepared by radio frequency magnetron sputtering at different substrate temperatures |
| title_full |
Structural and optical study of ZnS thin films prepared by radio frequency magnetron sputtering at different substrate temperatures |
| title_fullStr |
Structural and optical study of ZnS thin films prepared by radio frequency magnetron sputtering at different substrate temperatures |
| title_full_unstemmed |
Structural and optical study of ZnS thin films prepared by radio frequency magnetron sputtering at different substrate temperatures |
| title_sort |
structural and optical study of zns thin films prepared by radio frequency magnetron sputtering at different substrate temperatures |
| author |
Le Kong Jinxiang Deng Liang Chen Zhen Shen Jiyou Wang |
| author_facet |
Le Kong Jinxiang Deng Liang Chen Zhen Shen Jiyou Wang |
| topic |
Characterization and properties |
| topic_facet |
Characterization and properties |
| publishDate |
2017 |
| language |
English |
| container_title |
Functional Materials |
| publisher |
НТК «Інститут монокристалів» НАН України |
| format |
Article |
| description |
ZnS thin films were deposited by radio frequency (RF) sputtering with substrate temperatures from room temperature to 400°C. The effect of substrate temperature on structural and optical properties for the ZnS films was investigated. The systematic investigation at different substrate temperatures of the properties of sputtered ZnS films especially optical constants obtained through spectroscopic ellipsometry can provide some guidance for ZnS films to be applied in thin film solar cells as buffer layers. The choice of sputtering fabrication method may promote the full sputtering technique route in CIGS or CZTS solar cells which is beneficial to the solar cell industrialization.
|
| issn |
1027-5495 |
| url |
https://nasplib.isofts.kiev.ua/handle/123456789/136898 |
| citation_txt |
Structural and optical study of ZnS thin films prepared by radio frequency magnetron sputtering at different substrate temperatures / Le Kong, Jinxiang Deng, Liang Chen, Zhen Shen, Jiyou Wang // Functional Materials. — 2017. — Т. 24, № 4. — С. 451-546. — Бібліогр.: 23 назв. — англ. |
| work_keys_str_mv |
AT lekong structuralandopticalstudyofznsthinfilmspreparedbyradiofrequencymagnetronsputteringatdifferentsubstratetemperatures AT jinxiangdeng structuralandopticalstudyofznsthinfilmspreparedbyradiofrequencymagnetronsputteringatdifferentsubstratetemperatures AT liangchen structuralandopticalstudyofznsthinfilmspreparedbyradiofrequencymagnetronsputteringatdifferentsubstratetemperatures AT zhenshen structuralandopticalstudyofznsthinfilmspreparedbyradiofrequencymagnetronsputteringatdifferentsubstratetemperatures AT jiyouwang structuralandopticalstudyofznsthinfilmspreparedbyradiofrequencymagnetronsputteringatdifferentsubstratetemperatures |
| first_indexed |
2025-12-07T19:35:58Z |
| last_indexed |
2025-12-07T19:35:58Z |
| _version_ |
1850879412218626048 |