Structural and optical study of ZnS thin films prepared by radio frequency magnetron sputtering at different substrate temperatures

• Published in: Functional Materials
• Date: 2017
• Main Authors: Le Kong, Jinxiang Deng, Liang Chen, Zhen Shen, Jiyou Wang
• Format: Article
• Language: English
• Published: НТК «Інститут монокристалів» НАН України 2017
• Subjects: Characterization and properties
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/136898
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Structural and optical study of ZnS thin films prepared by radio frequency magnetron sputtering at different substrate temperatures / Le Kong, Jinxiang Deng, Liang Chen, Zhen Shen, Jiyou Wang // Functional Materials. — 2017. — Т. 24, № 4. — С. 451-546. — Бібліогр.: 23 назв. — англ.

ZnS thin films were deposited by radio frequency (RF) sputtering with substrate temperatures from room temperature to 400°C. The effect of substrate temperature on structural and optical properties for the ZnS films was investigated. The systematic investigation at different substrate temperatures o...