The effect of the substrate potential during deposition on the structure and properties of the binanolayer multiperiod composites (TiAlSi)N/MeN (Me – Zr, Nb, Cr, Mo)

• Published in: Вопросы атомной науки и техники
• Date: 2018
• Main Authors: Sobol’, O.V., Andreev, A.A., Mygushchenko, R.P., Stolbovoy, V.A., Postelnуk, A.A., Meylekhov, A.A., Dolomanov, A.V., Rebrova, Ye.M.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2018
• Subjects: Физика и технология конструкционных материалов
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/137010
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: The effect of the substrate potential during deposition on the structure and properties of the binanolayer multiperiod composites (TiAlSi)N/MeN (Me – Zr, Nb, Cr, Mo) / O.V. Sobol’, A.A. Andreev, R.P. Mygushchenko, V.A. Stolbovoy, A.A. Postelnуk, A.A. Meylekhov, A.V. Dolomanov, Ye.M. Rebrova // Вопросы атомной науки и техники. — 2018. — № 1. — С. 173-180. — Бібліогр.: 37 назв. — англ.

It is proposed to use the multiperiod binanolayer composites (TiAlSi)N/MeN (Me-Zr, Nb, Cr, Mo) for controlling the structure, stress state and mechanical properties of a multi-element nitride (TiAlSi)N. The deposition of the layers was carried out by the method of vacuum-arc evaporation at different...