Electrochemical deposition of cadmium telluride films

The mechanisms of electrochemical processes in the electrolyte for cadmium telluride semi-conducting film deposition and in corresponding partial solutions containing cadmium and tellurium ions have been studied by voltammetry with linear potential scanning and by cyclic voltammetry. The differences...

Повний опис

Збережено в:
Бібліографічні деталі
Опубліковано в: :Functional Materials
Дата:2008
Автори: Klochko, N.P., Volkova, N.D., Dobrotvorskaya, M.V., Kopach, V.R., T.A. Li
Формат: Стаття
Мова:Англійська
Опубліковано: НТК «Інститут монокристалів» НАН України 2008
Теми:
Онлайн доступ:https://nasplib.isofts.kiev.ua/handle/123456789/137232
Теги: Додати тег
Немає тегів, Будьте першим, хто поставить тег для цього запису!
Назва журналу:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Цитувати:Electrochemical deposition of cadmium telluride films / N.P. Klochko, N.D. Volkova, M.V. Dobrotvorskaya, V.R. Kopach, T.A. Li // Functional Materials. — 2008. — Т. 15, № 1. — С. 119-126. — Бібліогр.: 13 назв. — англ.

Репозитарії

Digital Library of Periodicals of National Academy of Sciences of Ukraine
_version_ 1859542690051391488
author Klochko, N.P.
Volkova, N.D.
Dobrotvorskaya, M.V.
Kopach, V.R.
T.A. Li
author_facet Klochko, N.P.
Volkova, N.D.
Dobrotvorskaya, M.V.
Kopach, V.R.
T.A. Li
citation_txt Electrochemical deposition of cadmium telluride films / N.P. Klochko, N.D. Volkova, M.V. Dobrotvorskaya, V.R. Kopach, T.A. Li // Functional Materials. — 2008. — Т. 15, № 1. — С. 119-126. — Бібліогр.: 13 назв. — англ.
collection DSpace DC
container_title Functional Materials
description The mechanisms of electrochemical processes in the electrolyte for cadmium telluride semi-conducting film deposition and in corresponding partial solutions containing cadmium and tellurium ions have been studied by voltammetry with linear potential scanning and by cyclic voltammetry. The differences between cathodic processes on chemically inert titanium nitride substrates and catalytically active molybdenum surface have been revealed. Basing on these studies, the nature of impurities discovered in this work by X-ray photoelectron spectroscopy at the surface and inside the cadmium telluride films deposited on molybdenum and titanium nitride surfaces has been explained. The latter made it possible to select the electrodeposition parameters and the substrate material which provide the stoichiometric film composition.
first_indexed 2025-11-26T00:11:07Z
format Article
fulltext (OHFWURFKHPLFDO�GHSRVLWLRQ�RI�FDGPLXPWHOOXULGH�ILOPV�� 1�3�.ORFKNR��1�'�9RONRYD ��0�9�'REURWYRUVND\D �9�5�.RSDFK��7�$�/L 1DWLRQDO�7HFKQLFDO�8QLYHUVLW\��.KDUNLY�3RO\WHFKQLFDO�,QVWLWXWH��� ���)UXQ]H�6W���������.KDUNLY��8NUDLQH 1DWLRQDO�$HURVSDFH�8QLYHUVLW\��.K$,��� ���&KNDORY�6W���������.KDUNLY��8NUDLQH ,QVWLWXWH�IRU�6LQJOH�&U\VWDOV��1DWLRQDO�$FDGHP\�RI�6FLHQFH�RI�8NUDLQH� ���/HQLQ�$YH���������.KDUNLY��8NUDLQH 5HFHLYHG�-XQH��������� 7KH�PHFKDQLVPV� RI� HOHFWURFKHPLFDO� SURFHVVHV� LQ� WKH� HOHFWURO\WH� IRU� FDGPLXP� WHOOXULGH VHPL�FRQGXFWLQJ� ILOP� GHSRVLWLRQ� DQG� LQ� FRUUHVSRQGLQJ� SDUWLDO� VROXWLRQV� FRQWDLQLQJ� FDG� PLXP�DQG�WHOOXULXP�LRQV�KDYH�EHHQ�VWXGLHG�E\�YROWDPPHWU\�ZLWK�OLQHDU�SRWHQWLDO�VFDQQLQJ DQG�E\�F\FOLF�YROWDPPHWU\��7KH�GLIIHUHQFHV�EHWZHHQ�FDWKRGLF�SURFHVVHV�RQ�FKHPLFDOO\�LQHUW WLWDQLXP� QLWULGH� VXEVWUDWHV� DQG� FDWDO\WLFDOO\� DFWLYH� PRO\EGHQXP� VXUIDFH� KDYH� EHHQ� UH� YHDOHG��%DVLQJ�RQ�WKHVH�VWXGLHV��WKH�QDWXUH�RI�LPSXULWLHV�GLVFRYHUHG�LQ�WKLV�ZRUN�E\�;�UD\ SKRWRHOHFWURQ�VSHFWURVFRS\�DW�WKH�VXUIDFH�DQG�LQVLGH�WKH�FDGPLXP�WHOOXULGH�ILOPV�GHSRVLWHG RQ� PRO\EGHQXP� DQG� WLWDQLXP� QLWULGH� VXUIDFHV� KDV� EHHQ� H[SODLQHG�� 7KH� ODWWHU� PDGH� LW SRVVLEOH� WR� VHOHFW� WKH� HOHFWURGHSRVLWLRQ�SDUDPHWHUV�DQG� WKH� VXEVWUDWH�PDWHULDO�ZKLFK�SUR� YLGH�WKH�VWRLFKLRPHWULF�ILOP�FRPSRVLWLRQ�� lË�º�ÈäÒ�²¯ºÓºmºã �Èä¹Ë¯ºäË�¯ÒÒ�Ò��Ò}ãÒ�˰}º®�mºã �Èä¹Ë¯ºäË�¯ÒÒ�Ò°°ãË�ºmÈÓ© ä˲ÈÓÒÏä©�ªãË}�¯º²ÒäÒ�˰}Ò²�¹¯º�˰°ºm�m�ªãË}�¯ºãÒ�Ë��ã«�¹ºã��ËÓÒ«�¹ºã�¹¯ºmº�ÓÒ� }ºm©²� ¹ãËÓº}� �Ëãã�¯Ò�È� }È�äÒ«� Ò� m� °ºº�mË�°�m� �Ò²� Ëä�� ¹È¯�ÒÈã Ó©²� ¯È°�mº¯È²� °º�˯ÎÈ�Ò²�ÒºÓ©�}È�äÒ«�Ò��Ëãã�¯È��|­Óȯ�ÎËÓ©�¯ÈÏãÒ�Ò«�m�}È�º�Ó©²�¹¯º�˰°È²�ÓÈ ²ÒäÒ�˰}Ò�ÒÓ˯�Ó©²�¹º�ãºÎ}Ȳ�ÓÒ�¯Ò�È��Ò�ÈÓÈ�Ò�ÓÈ�}È�ÈãÒ�Ò�˰}Ò�È}�ÒmÓº®�¹ºm˯²� Óº°�Ò�äºãÒ­�ËÓÈ��sÈ�º°ÓºmÈÓÒÒ�¹¯ºmË�ËÓÓ©²�Ò°°ãË�ºmÈÓÒ®�º­�«°ÓËÓÈ�¹¯Ò¯º�È�¹¯ÒäË� °Ë®��º­Óȯ�ÎËÓÓ©²�m�¯È­º�Ë�äË�º�ºä�¯ËÓ��ËÓºm°}º®�Áº�ºªãË}�¯ºÓÓº®�°¹Ë}�¯º°}º¹ÒÒ�ÓÈ ¹ºm˯²Óº°�Ò�Ò�m�º­�ËäË�¹ãËÓº}��Ëãã�¯Ò�È�}È�äÒ«��ªãË}�¯ºº°ÈÎ�ËÓÓ©²�ÓÈ�¹º�ãºÎ}Ò�ÒÏ ÓÒ�¯Ò�È� �Ò�ÈÓÈ� Ò� äºãÒ­�ËÓÈ�� ��º� ¹ºÏmºãÒãº� º°��˰�mÒ� � m©­º¯� ¹È¯ÈäË�¯ºm� ¹¯º�˰°È ªãË}�¯ºº°ÈÎ�ËÓÒ«�Ò�äÈ�˯ÒÈãÈ�¹º�ãºÎË}��}º�º¯©Ë�º­Ë°¹Ë�ÒmÈ ��ÒÏ�º�ºmãËÓÒË�¹ãËÓº} °�˲ҺäË�¯Ò�˰}º�º�°º°�ÈmÈ� (OHFWURFKHPLFDO�GHSRVLWLRQ�WHFKQLTXH�SUR� YLGHV�DQ�H[FHOOHQW�FRQWURO�RI� WKH�ILOP�SURS� HUWLHV�E\�WXQLQJ�VXFK�SDUDPHWHUV�DV�FDWKRGH SRWHQWLDO�� WHPSHUDWXUH��¯s�DQG�FRPSRVLWLRQ RI� WKH� UHDJHQWV� >�@�� $W� WKH� VDPH� WLPH�� QR VXIILFLHQW�DWWHQWLRQ�ZDV�SDLG�\HW�WR�WKH�VFL� HQWLILF� DSSURDFK� WR� VHOHFWLRQ�RI� WKH�HOHFWUR� FKHPLFDO� UHJLPHV� IRU� REWDLQLQJ� RI VWRLFKLRPHWULF�FDGPLXP�WHOOXULGH�OD\HUV��$V D�FRQVHTXHQFH��WKH�HPSLULFDO�VHOHFWLRQ�RI�WKH SRWHQWLDOV� IRU� WKH� &G7H� HOHFWURGHSRVLWLRQ RQWR� YDULRXV� VXEVWUDWHV� KDV� EHHQ� SURSRVHG >�Ü�@��,Q�RXU�RSLQLRQ��WKH�VFLHQWLILF�VROXWLRQ RI�WKLV�SUREOHP�VKRXOG�FRQVLVW�LQ�LPPHGLDWH LQYHVWLJDWLRQ� RI� PHFKDQLVPV� RI� SURFHVVHV WDNLQJ� SODFH� RQ� WKH� FDWKRGHV� PDGH� IURP YDULRXV�PDWHULDOV�DQG�LQ�QHDU�FDWKRGH�VSDFH GXULQJ�FDGPLXP�WHOOXULGH�HOHFWURGHSRVLWLRQ� L�H�� WKH� VWXG\LQJ� RI�&G7H� HOHFWURGHSRVLWLRQ DV�GHSHQGLQJ�RQ�WKH�VXEVWUDWH�PDWHULDO��2XU VHOHFWLRQ� RI� WKH� VXEVWUDWH� PDWHULDOV� LV� H[� SODLQHG��DW�WKH�RQH�KDQG��E\�WKH�PRVW�RIWHQ )XQFWLRQDO�0DWHULDOV�����1R��������� �������Û�,QVWLWXWH�IRU�6LQJOH�&U\VWDOV )XQFWLRQDO�PDWHULDOV������������� ��� XWLOL]DWLRQ� RI� PRO\EGHQXP� �0R�� DV� D� EDVH IRU� FDGPLXP� WHOOXULGH� DEVRUELQJ� OD\HU� LQ SKRWRYROWDLF�GHYLFHV�RI�VXEVWUDWH�FRQILJXUD� WLRQ� >�Ü�@��$W� WKH�RWKHU�KDQG�� WLWDQLXP�QL� WULGH� �7L1�� LV� FKHPLFDOO\� LQHUW�PDWHULDO� DQG VR�FDQ�EH�XVHG�DV�FRQWURO�PDWHULDO�LQ�H[SHUL� PHQWV� WR� UHYHDO� VRPH� LQWHUDFWLRQV� EHWZHHQ &G7H�DQG�0R� ,Q� WKLV�ZRUN�� WKH�&G7H� HOHFWURGHSRVLWLRQ NLQHWLFV� RQ� 0R� DQG� 7L1� VXUIDFHV� KDV� EHHQ VWXGLHG� XVLQJ� D� SRWHQWLRVWDW� E\� PHDQV� RI YROWDPPHWU\�ZLWK� OLQHDU�SRWHQWLDO� VFDQQLQJ �9$�� DQG� E\� F\FOLF� YROWDPPHWU\� �&9$�� >�� �@��'XULQJ�WKH�VWXGLHV��JODVV�SODWHV�RI���FP� DUHD�FRYHUHG�E\�UHDFWLYHO\�VSXWWHUHG�����QP WKLFN� WLWDQLXP� QLWULGH� RU� E\� PDJQHWURQ VSXWWHUHG� �� PP� WKLFN� PRO\EGHQXP� OD\HUV KDYLQJ�WKH�OD\HU�UHVLVWDQFH�OHVV�WKDQ���2KP ZHUH� XVHG� DV� FDWKRGHV� LQ� WKUHH�HOHFWURGH HOHFWURFKHPLFDO� FHOO�� $V� WKH� UHIHUHQFH� HOHF� WURGH�� VDWXUDWHG� $J�$J&O� HOHFWURGH� �6$(� �86$(� ������9�UHVSHFWLYH�WR�QRUPDO�K\GUR�JHQ�HOHFWURGH��ZDV�XVHG�ZKLOH�DV�WKH�FRXQWHU HOHFWURGH�� D� SODWLQXP� FRLO� RI� ��� FP�� DUHD� 7KH� HOHFWURO\WH� WHPSHUDWXUH� ZDV� VXSSRUWHG DW� ���&� XVLQJ� D� WKHUPRVWDW�� 7KH� VROXWLRQV ZHUH�SUHVHUYHG�IURP�PL[LQJ��H[FHSW�IRU�VSH� FLDOO\�PHQWLRQHG�FDVHV���7R�DYRLG�WKH�PLJUD� WLRQ� GXULQJ� WKH� 9$� DQG� &9$� H[SHULPHQWV� DOO�VROXWLRQV�FRQWDLQHG�����l�1D�62���(OHF�WURFKHPLFDO� SURFHVVHV� ZHUH� VWXGLHG� LQ� WKH IROORZLQJ� PHGLD�� �L�� D� VROXWLRQ� FRUUHVSRQG� LQJ� WR� HOHFWURO\WH� IRU� FDGPLXP� WHOOXULGH GHSRVLWLRQ� FRQWDLQLQJ� ���� 0� &G62��������� l� 7H2��� ���� l� 1D�62��� ����� 0+�62����LL��SDUWLDO�FDGPLXP�VROXWLRQ������0&G62�������l�1D�62��������0�+�62��� �LLL�SDUWLDO� WHOOXULXP� VROXWLRQ�� �������l�7H2������ l� 1D�62��� ����� 0� +�62��� �LY�� EDFN�JURXQG� VROXWLRQ�� ���� l� 1D�62��� ����� 0+�62��� 7KH� SRODUL]DWLRQ� YROWDJH� VFDQQLQJUDWHV� �9�� ZHUH� IURP� �� P9�V� XS� WR ����P9�V��WKH�UDQJH�RI�VFDQQLQJ�SRWHQWLDOV (F�ZDV� IURP�����9�XS� WR�Ü����9� �KHUH� DQGEHORZ�� DOO� SRWHQWLDOV� DUH� LQGLFDWHG� ZLWK� UH� VSHFW�WR�6$(�� 7KH� FDGPLXP� WHOOXULGH� ILOPV� RQWR� 7L1 VXEVWUDWHV� �VDPSOH� 1RV�� ��� ��� ��� DQG� RQWR PRO\EGHQXP� VXEVWUDWHV� �VDPSOH� 1RV�� ��� �� ��� ZHUH� HOHFWURGHSRVLWHG� LQ� SRWHQWLRVWDWLF UHJLPH�LQ�WKH�VDPH�WKUHH�HOHFWURGH�FHOO��EXW XVLQJ� VWLUULQJ� RI� WKH� HOHFWURO\WH� ����� 0 &G62��� �������l�7H2��������0�+�62��� E\PHDQV� RI� PDJQHWLF� VWLUUHU�� 7KH� HOHFWURO\WH WHPSHUDWXUH�ZDV����&��WKH�HOHFWURGHSRVLWLRQ GXUDWLRQ�ZDV���KRXU��7KH�FDWKRGH�SRWHQWLDOV GXULQJ� WKH� ILOP�HOHFWURGHSRVLWLRQ�ZHUH� VXS� SRUWHG�DW�WKH�IROORZLQJ�OHYHOV��p°� �Ü�����9�VDPSOH�1R�����p°� �Ü�����9� �VDPSOH�1RV�� DQG�����p°� �Ü�����9��VDPSOH�1R����RU�p°� Ü�����9� �VDPSOH�1RV��� DQG� ���� WKH� FXUUHQW GHQVLW\� MF� EHLQJ� UHJXODUO\� GHFUHDVHG� GXH� WRLQFUHDVLQJ�&G7H�OD\HU�UHVLVWLYLW\� 7KH� VDPSOH� VXUIDFH� FRPSRVLWLRQ� ZDV VWXGLHG�E\�;�UD\�SKRWRHOHFWURQ�VSHFWURVFRS\ �;36��XVLQJ�DQ�;36�����.UDWRV�VSHFWURPH� WHU��7KH�YDFXXP� LQ�WKH�PHDVXULQJ�FKDPEHU ZDV� ����Ü�� 7RUU�� 3KRWRHOHFWURQV� ZHUH� H[� FLWHG� E\� 0J.D� UDGLDWLRQ� �KJ� ��������H9��;�UD\� JXQ� SRZHU� ZDV� ��N9u��� P$�� 7KH KHPLVSKHULFDO� HOHFWURVWDWLF� DQDO\]HU� ZDV XVHG� WR� DQDO\]H� WKH� SKRWRHOHFWURQ� NLQHWLF HQHUJ\�� 7KH� LQVWUXPHQW� UHVROXWLRQ� ZDV ��H9��WKH�ELQGLQJ�HQHUJ\�ZDV�GHWHUPLQHG�DW DQ� DFFXUDF\� RI� r���� H9�� 7KH� VSHFWUD� ZHUH SURFHVVHG� XVLQJ� D� FRPSXWHU�� VPRRWKLQJ� VXEWUDFWLRQ�RI�D�FRQVWDQW�DQG�YDULDEOH�EDFN� JURXQG��6KLUOH\�PHWKRG���UHPRYDO�RI�WKH�H[� SDQGLQJ� HIIHFW� RI� WKH� ;�UD\� OLQH� �LWHUDWLYH GHFRQYROXWLRQ�� DQG� H[SDQVLRQ� RI� FRPSOH[ OLQH� LQWR� LWV� FRPSRQHQWV� ZHUH� GRQH�� 7KH VDPSOH� VXUIDFH�FRPSRVLWLRQ�ZDV�GHWHUPLQHG XVLQJ� UDWLR� RI� DUHDV� XQGHU� SKRWRHOHFWURQ OLQHV�RI�&�V��2�V��&G�G��7H�G��7L�S��0R�G� 6L�S� FRUH� OHYHOV�� WDNLQJ� LQWR� DFFRXQW� WKHLU VHQVLWLYLW\� IDFWRUV� >��@�� $� OD\HU� RI� DERXW �� QP� WKLFNQHVV� ZDV� DQDO\]HG�� 7KH� FRP� SRXQGV� SUHVHQW� LQ� WKH� VXEVXUIDFH� OD\HU� RI WKH� VDPSOHV�ZHUH� DQDO\]HG�XVLQJ� H[SDQVLRQ RI� WKH� FRPSOH[� 7H�G� OLQH� LQWR� LWV� FRPSR� QHQWV�� 7KH� OD\HU�E\�OD\HU� HWFKLQJ� RI� WKH VDPSOH� VXUIDFHV� ZDV� FDUULHG� RXW� XVLQJ� DQ LRQLF�JXQ��$U���(� ���NH9���WKH�HWFKLQJ�UDWH EHLQJ���QP�PLQ� 7KH� VWXGLHV� KDYH� VKRZQ� WKDW� LQ� EDFN� JURXQG� VROXWLRQ� WZR� FXUUHQW� SHDNV� DUH� UH� YHDOHG� RQ� FDWKRGLF� EUDQFKHV� RI� F\FOLF� YRO� WDPPRJUDPPV� �,�9� FXUYHV�� REWDLQHG� ZKHQ WLWDQLXP� QLWULGH� ZDV� XVHG� DV� WKH� ZRUNLQJ HOHFWURGH� �)LJ������ 7KH� VPDOO� FXUUHQW� SHDN VKLIWV�WRZDUGV�QHJDWLYH�SRWHQWLDOV�DV�WKH�SR� WHQWLDO�VFDQQLQJ�UDWH�JURZV�IURP���P9�V�XS WR� ���� P9�V�� WKXV�� WKH� FDWKRGH� KDOI�SHDN SRWHQWLDO� p°¯��� FKDQJHV� IURP� Ü���� 9� WR� Ü����9��7KH�GLIIHUHQFHV�EHWZHHQ�FDWKRGLF�SR� WHQWLDOV�RI�SHDNV�DQG�FDWKRGLF�KDOI�SHDN�SR� WHQWLDOV� DUH� UDWKHU� ODUJH�� 7KHVH� GLIIHUHQFHV FKDQJH� GHSHQGLQJ� RQ� 9�� EXW� DUH� DERXW ����9��WKXV�H[FHHGLQJ�PRUH�WKDQ�WKULFH�WKH YDOXH� IRU� UHYHUVLEOH� SURFHVV�� 7KDW� SHDN� LV DEVHQW� LQ�WKH�DQRGLF�EUDQFKHV�RI�F\FOLF�YRO� WDPPRJUDPV�LQ�EDFNJURXQG�VROXWLRQ� $OO� WKH� DERYH� HYLGHQFHV� WKDW� DQ� LUUH� YHUVLEOH�HOHFWURFKHPLFDO�SURFHVV�FRPSOLFDWHG E\� IROORZLQJ� IDVW� FKHPLFDO� GLPHUL]DWLRQ� UH� DFWLRQ�UXQV�LQ�EDFNJURXQG�HOHFWURO\WH�DW�SR� WHQWLDOV�QHDU�WKH�FDWKRGLF�FXUUHQW�SHDN��)RU UHYHUVLEOH�HOHFWURFKHPLFDO�SURFHVV��WKH�KDOI� 1�3�.ORFKNR�HW�DO����(OHFWURFKHPLFDO�WHFKQLTXH�IRU���� ��� )XQFWLRQDO�PDWHULDOV������������� SHDN�SRWHQWLDO�p°¯��� DQG� VWDQGDUG�SRWHQWLDOp°º�RI�WKH�HOHFWURFKHPLFDO�FDWKRGLF�UHDFWLRQDUH�FRQQHFWHG�E\�UHODWLRQ�>����@� p° �̄e��� �p°º��������57�e�Q)�� ��� ZKHUH�5�LV�WKH�JDV�FRQVWDQW��7��WKH�VROXWLRQ DEVROXWH� WHPSHUDWXUH�� Q�� QXPEHU� RI� HOHF� WURQV� LQYROYHG� LQ� HOHFWURFKHPLFDO� UHDFWLRQ� )�� WKH� )DUDGD\� QXPEHU�� 7DNLQJ� WKDW� IDFW LQWR�DFFRXQW��ZH�FDQ�FDOFXODWH� WKDW�DW����& KDOI�SHDN� SRWHQWLDO� IRU� UHYHUVLEOH� FDWKRGLF SURFHVV�ZRXOG�EH� E\����Q�P9� OHVV�QHJDWLYH WKDQ� WKH� VWDQGDUG� SRWHQWLDO�� 7KHQ�� WDNLQJ LQWR�DFFRXQW�WKDW�WKH�KDOI�SHDN�SRWHQWLDO�IRU WKH� LUUHYHUVLEOH� HOHFWURGH� SURFHVV� IROORZHG E\�FKHPLFDO�GLPHUL]DWLRQ�UHDFWLRQ� LV�DOZD\V VKLIWHG� WR� WKH� QHJDWLYH� YDOXHV� DV� FRPSDUHG WR� WKH� UHYHUVLEOH� SURFHVV� >����@� DQG� LQ� DF� FRUGDQFH� ZLWK� WKH� VWDQGDUG� SRWHQWLDO� GDWD >������@��ZH�FDQ�FRQFOXGH�WKDW�WKH�ILUVW�SHDN LQ� WKH� EDFNJURXQG� VROXWLRQ� FRUUHVSRQGV� WR UHDFWLRQ� �+�����H�� �+�� ��� ZKLFK� HTXLOLEULXP�FDWKRGH�SRWHQWLDO� LQ� WKLV VROXWLRQ�LV�Ü�����9��DV�FDOFXODWHG�XVLQJ�WKH 1HUQVW�HTXDWLRQ�>��@��7KH�VKLIW�RI�WKLV�SHDN WRZDUGV� QHJDWLYH� SRWHQWLDOV� LV� GXH� WR� RYHU� YROWDJH�ZKLFK�IRU�LUUHYHUVLEOH�SURFHVVHV�IRO� ORZHG�E\�GLPHUL]DWLRQ� LV�DW� OHDVW�����9�>�@� 7KH�LQWHQVLW\�RI�WKLV�SHDN�LV�VPDOO��EHFDXVH WKH�VROXWLRQ�LV�VOLJKWO\�DFLGLF��¯s���� &XUUHQW�JURZLQJ�LQ�WKH�EDFNJURXQG�VROX� WLRQ� DW� WKH� SRWHQWLDOV� PRUH� QHJDWLYH� WKHQ Ü�����9�LV�YHU\�LQWHQVLYH��$FFRUGLQJ�WR�RXU FDOFXODWLRQV��LW�FRUUHVSRQGV�WR�WKH�ZDWHU�GH� FRPSRVLWLRQ�ZLWK� WKH� K\GURJHQ� FUHDWLRQ� DF� FRUGLQJ�WR�UHDFWLRQ� �+�2����H�� �+�����2+� ��� ZLWK�VWDQGDUG�SRWHQWLDO�RI�Ü�����9�>��@� :KHQ� PRO\EGHQXP� ZRUNLQJ� HOHFWURGH� LV XVHG�LQ�EDFNJURXQG�VROXWLRQ��WKH�FXUUHQW�LQ� FUHDVH� RFFXUV� DW� FRQVLGHUDEO\�PRUH� SRVLWLYH SRWHQWLDOV� �p°� �Ü���� 9��� VR� WKH� SURFHVVHV����DQG�����DUH�LQGLVWLQJXLVKDEOH�LQ�WKH�,�9� FXUYHV�� $FFRUGLQJ� WR� >����@�� WKLV� HOHFWURGH� SRVLWLRQ� SURFHVV� DW� PRUH� SRVLWLYH� FDWKRGH SRWHQWLDOV�LV�DVVRFLDWHG�ZLWK�FDWDO\WLF�LQIOX� HQFH� RI� WKH� HOHFWURGH� VXUIDFH�� ,Q� WKLV� FDVH� PRO\EGHQXP� FDWDO\]HV� WKH� HOHFWURFKHPLFDO SURFHVV�RI�ZDWHU�GHFRPSRVLWLRQ� ,Q� FDGPLXP� SDUWLDO� VROXWLRQ�� YROWDPPR� JUDPPV� IRU� WLWDQLXP� QLWULGH� VXEVWUDWHV �)LJ�����DOVR�LQFOXGH�D�ZHDN�K\GURJHQ�UHGXF� WLRQ� SHDN� FRUUHVSRQGLQJ� WR� UHDFWLRQ� ���� 7KHQ��LQGHSHQGHQW�IURP�SRODUL]DWLRQ�YROWDJH UDWH�� D� VKDUS� FXUUHQW� ULVH� LV� VHHQ� DW�SRWHQ� WLDOV� PRUH� QHJDWLYH� WKDQ� Ü����� 9�� $FFRUG� LQJ�WR�>������@��HTXLOLEULXP�SRWHQWLDO�RI�WKH UHDFWLRQ� &G������H�� �&G ��� LQ� WKLV� VROXWLRQ� LQ� DFFRUGDQFH� ZLWK� 1HUQVW HTXDWLRQ� LV� Ü����� 9�� 6R�� DFFRUGLQJ� WR� >�� ��@�� ZH� FDQ� FRQFOXGH� WKDW� DERYH�PHQWLRQHG VKDUS�FXUUHQW�ULVH�GHPRQVWUDWHV�WKH�UHYHUV� LEOH� FDWKRGLF� SURFHVV� RI� FDGPLXP� HOHFWUR� FKHPLFDO�UHGXFWLRQ� 7KH� YROWDPPRJUDPV� LQ� FDGPLXP� SDUWLDO VROXWLRQ� IRU� PRO\EGHQXP� VXEVWUDWHV� GLIIHU IURP�VLPLODU�,�9�FXUYHV�IRU�7L1�RQHV�RQO\�E\ WKH�FXUUHQW�ULVH�DW�FDWKRGH�SRWHQWLDO�Ü����9 �DV� LQ� WKH� EDFNJURXQG� VROXWLRQ� IRU�0R� VXE� VWUDWHV��� 7KDW� IDFW� LV� DOVR� FRQQHFWHG� ZLWK WKH� FDWDO\WLF� LQIOXHQFH� RI�PRO\EGHQXP� VXU� IDFH�RQ�WKH�SURFHVV����� 7KH� PRVW� FRQVLGHUDEOH� LV� GLIIHUHQFH� EH� WZHHQ� WKH� WHOOXULXP� HOHFWURFKHPLFDO� UHGXF� WLRQ�PHFKDQLVPV�RQ�7L1�DQG�Fh� VXEVWUDWHV� 7KH�F\FOLF�YROWDPPRJUDPPV�LQ�SDUWLDO�WHOOX� ULXP� VROXWLRQ� IRU� 7L1� VXEVWUDWHV� GHPRQ� VWUDWH� �)LJ����� HOHFWURFKHPLFDO� WHOOXULXP�UH� GXFWLRQ�DFFRUGLQJ�WR�UHDFWLRQ�>��@� 7H2�����+�����H�� �7H����+�2 ��D� RU�DFFRUGLQJ�WR�DQDORJRXV�UHDFWLRQ�>��@� 7H2�+�����+�����H�� �7H����+�2� ��E� )LJ����� &\FOLF� YROWDPPRJUDPPV� RQ� 7L1� VXE� VWUDWHV� LQ� EDFNJURXQG� VROXWLRQ� ����� 0 1D�62��������0�+�62���DW�SRWHQWLDO�VFDQQLQJUDWHV��P9�V��������������������������� 1�3�.ORFKNR�HW�DO����(OHFWURFKHPLFDO�WHFKQLTXH�IRU���� )XQFWLRQDO�PDWHULDOV������������� ��� )RU� UHDFWLRQ� ��È��� VWDQGDUG� SRWHQWLDO�pº ZLWK�UHVSHFW�WR�6$(�DW����&�LV������9�>��@� IRU� UHDFWLRQ� ��E��� pº� ������ 9� >��@�� 7KH HTXLOLEULXP� SRWHQWLDOV� LQ� WKLV� VROXWLRQ� p°¯DUH� ����� 9� DQG� ����� 9�� UHVSHFWLYHO\��+RZ� HYHU�� DV� RXU� H[SHULPHQWV�UHYHDOHG�� WKH� WHOOX� ULXP� UHGXFWLRQ� RFFXUV� DW� PRUH� QHJDWLYH� SR� WHQWLDOV� WKDQ� WKRVH� FRUUHVSRQGLQJ� WR� WKH� UH� YHUVLEOH�SURFHVV��7KLV�LV�GXH�WR�LUUHYHUVLELOLW\ RI�WKH�HOHFWURFKHPLFDO�UHGXFWLRQ�RI�WHOOXULXP RQ�WLWDQLXP�QLWULGH�VXEVWUDWH�ZKLFK�LV�GHPRQ� VWUDWHG�E\�WKH�IROORZLQJ��)LUVW��ZKHQ�9�ULVHV� WKH� FDWKRGLF� SHDN� SRWHQWLDO� �p°¯�� EHFRPHVPRUH� QHJDWLYH� DQG� WKH� DQRGLF�SHDN�SRWHQWLDO �pD¯���PRUH�SRVLWLYH��6HFRQG��WKH�DQRGLF�SHDNVDUH� IDU� ORZHU� WKDQ� FDWKRGLF� RQHV�� 7KLUG�� WKH GLIIHUHQFH� �p°¯��Üp°¯�� H[FHHGV� ���� 9� ZKLOH�pȯÜp°¯�|����9��6R�LW�LV�QRW�VXUSULVLQJ�WKDWLQ� RXU� H[SHULPHQWV� KDOI�SHDN� SRWHQWLDOV� LQ FDWKRGLF�EUDQFKHV�RI�,�9�FXUYHV�RFFXUUHG�DW SRWHQWLDOV� FKDQJLQJ� IURP� Ü����� 9� �LI� 9� ��P9�V��WR�Ü�����9��LI�9� �����P9�V���7KH FDWKRGLF� FXUUHQW� ULVH� LQ� WHOOXULXP� SDUWLDO VROXWLRQ�RQ�7L1�VXEVWUDWH�RFFXUV�DW� WKH�VDPH SRWHQWLDOV��PRUH�QHJDWLYH�WKDQ�Ü�����9��DV�LQ EDFNJURXQG� VROXWLRQ�� 7KHUHIRUH�� LW� FRUUH� VSRQGV� WR�ZDWHU�GHFRPSRVLWLRQ�DQG�K\GURJHQ HYROXWLRQ�SURFHVV�DFFRUGLQJ�WR�UHDFWLRQ����� 4XLWH� RWKHU� DUH� YROWDPPRJUDPPV� RE� WDLQHG� LQ� WHOOXULXP� SDUWLDO� VROXWLRQ� RQ�PR� O\EGHQXP�VXEVWUDWH��)LJ������7KH�,�9�FXUYHV DUH� FKDUDFWHUL]HG� E\� WZR� SHDNV�� PRUHRYHU� WKH� ILUVW� SHDN� LV� DW� SRWHQWLDO�p°¯|Ü�����9�DQG�WKH�VHFRQG�SHDN� LV�VLPLODU�WR�WKH�WHOOX� ULXP� UHGXFWLRQ� SHDN� RQ� F\FOLF� YROWDPPR� JUDPPV�RQ�WLWDQLXP�QLWULGH�VXEVWUDWHV��7KH VHFRQG� SHDN� LV� IROORZHG� E\� DQ� LQWHQVH� FXU� UHQW�ULVH�DW�SRWHQWLDOV�RI�PRO\EGHQXP�FDWK� RGH� PRUH� QHJDWLYH� WKDQ� Ü���� 9�� ZKLFK� LV UHODWHG� WR� ZDWHU� GHFRPSRVLWLRQ�� IUHH� K\� GUR[\O�JURXSV�IRUPDWLRQ�DQG�K\GURJHQ�HYR� OXWLRQ� DFFRUGLQJ� WR� UHDFWLRQ� ����� 7KH� VWXG\ RI� ,�9�FXUYH� FKDUDFWHU� LQ� SDUWLDO� WHOOXULXP VROXWLRQ� DV� GHSHQGLQJ� RQ� WKH� YROWDJH� VFDQ� QLQJ� UDWH� IRU� WKH�PRO\EGHQXP� FDWKRGH� KDV VKRZQ� WKDW� WKH� DGGLWLRQDO� SHDN� DW� PRUH SRVLWLYH�SRWHQWLDOV�LV�FRQQHFWHG�ZLWK�VWURQJ VSHFLILF�DGVRUSWLRQ�RI�WKH�UHDFWLRQ�����SURG� XFW��WHOOXULXP��RQ�WKH�PRO\EGHQXP�VXUIDFH� )LJ�����9ROWDPPRJUDPPV�RQ�7L1�VXEVWUDWHV�LQ FDGPLXP� SDUWLDO� VROXWLRQ� ����� 0� &G62������0�1D�62��� ����� 0� +�62��� DW� SRWHQWLDOVFDQQLQJ� UDWHV� �P9�V��� �� ����� ��� ����� ��� ���� ������������������������� )LJ����� &\FOLF� YROWDPPRJUDPPV� RQ� 7L1� VXE� VWUDWHV�LQ�WHOOXULXP�SDUWLDO�VROXWLRQ������Ü��0 7H2��� ����0�1D�62��� �����0�+�62��� DW� SR�WHQWLDO�VFDQQLQJ�UDWHV��P9�V������������������� �������� )LJ�����9ROWDPPRJUDPPV�RQ�0R�VXEVWUDWHV�LQ WHOOXULXP� SDUWLDO� VROXWLRQ� �����Ü�� 0� 7H2������0�1D�62��� ����� 0� +�62��� DW� SRWHQWLDOVFDQQLQJ�UDWHV��P9�V�������������������������� 1�3�.ORFKNR�HW�DO����(OHFWURFKHPLFDO�WHFKQLTXH�IRU���� ��� )XQFWLRQDO�PDWHULDOV������������� $V�D�FRQILUPDWLRQ�IRU�7KH�DERYH�FDQ�EH�FRQ� ILUPHG�E\�D�PRUH�VKDUS�LQFUHDVH�RI�WKH�ILUVW �DEVRUSWLRQ�� SHDN� KHLJKW� GXULQJ� 9� JURZLQJ DV�FRPSDUHG�WR�WKH�VHFRQG�SHDN��ZKLFK�FRU� UHVSRQGV� WR� LUUHYHUVLEOH� HOHFWURFKHPLFDO SURFHVV� ����� DQG� VOLJKW� VKLIW� RI� ERWK� SHDNV WRZDUGV�QHJDWLYH�SRWHQWLDOV�DW�LQFUHDVLQJ�9� 7KH�FDWKRGLF�,�9�FXUYHV�LQ�VROXWLRQ�FRUUH� VSRQGLQJ�WR�WKH�HOHFWURO\WH�IRU�FDGPLXP�WHO� OXULGH� HOHFWURGHSRVLWLRQ�RQ� WLWDQLXP�QLWULGH VXEVWUDWHV��)LJ�����FRUUHVSRQG�WR�ZHOO�NQRZQ >����@� UHJXODULWLHV� IRU� HOHFWURGH� SURFHVVHV IROORZHG�E\� FKHPLFDO� GLVSURSRUWLRQLQJ�UHDF� WLRQV�� QDPHO\�� WKH� FXUUHQW� SHDN� ,3� LV� SUR�SRUWLRQDO� WR�9���� DQG� SHDN� SRWHQWLDO�(°S� LVSURSRUWLRQDO� WR� OJ,�9�� 6R� LQ� WKH� HOHFWURO\WH IRU� FDGPLXP� WHOOXULGH� ILOPGHSRVLWLRQ�� WKH FDWKRGLF� SURFHVV� RI� WHOOXULXP� HOHFWURFKHPL� FDO� UHGXFWLRQ� DFFRUGLQJ� WR� UHDFWLRQ� ���� LV IROORZHG� E\� VORZ� FKHPLFDO� UHDFWLRQ� RI� HOH� PHQWDO� WHOOXULXP� GLVSURSRUWLRQLQJ�� 0RUH� RYHU��VLQFH�LQ�WKH�FDVH�RI�WKH�FDGPLXP�LRQV DEVHQFH�,�9�FXUYHV�GR�QRW�PHHW�WKH�UHJXODUL� WLHV�,°Sa9����DQG�(°SaOJ,�9��ZH�FDQ�FRQFOXGHWKDW� GLVSURSRUWLRQLQJ� UHDFWLRQ� LQYROYHV &G����VR�LW�FDQ�EH�GHVFULEHG�E\�HTXDWLRQ� �&G����7H��+�2 �&G7H�7H2���+�� ��� $V� D� UHVXOW� RI� UHDFWLRQV� ���� DQG� ����� WKH ILOPV�HOHFWURGHSRVLWHG�RQ�7L1�VXEVWUDWH�LQ�FDWK� RGH� SRWHQWLDOV� LQWHUYDO� (F� �Ü����ÛÜ�����9 PD\� FRPSULVH�� DORQJ� ZLWK� FDGPLXP� WHOOX� ULGH��VLJQLILFDQW�DPRXQWV�RI�WHOOXULXP�GLR[� LGH��7KH�SUHVHQFH�RI�HOHPHQWDO� WHOOXULXP� LQ WKHVH� ILOPV� FDQ� EH� FRQQHFWHG� ZLWK� VORZ FKHPLFDO� UHDFWLRQ� ����� 1RWH� WKDW� PL[LQJ� RI WKH�HOHFWURO\WH�E\�D�PDJQHWLF�VWLUUHU�UHVXOWV LQ�WKH�UHJXODU�FXUUHQW�LQFUHDVH�GXH�WR�GHOLY� HU\� RI� JUHDWHU� DPRXQWV� RI� UHDJHQWV� WR� WKH FDWKRGH� VXUIDFH�� EXW� GRHV� QRW� FKDQJH� WKH QXPEHU� RI� UHGXFWLRQ� ZDYHV� DQG� WKH� SRWHQ� WLDOV� DW� ZKLFK� WKH� UHGXFWLRQ� SURFHVVHV� WDNH SODFH��)LJ�����FXUYH���� $V�;36� LQYHVWLJDWLRQV�KDYH�VKRZQ�� LUUH� VSHFWLYH� RI� VXEVWUDWH� PDWHULDO�� WKH� FDUERQ RQ� WKH� VXUIDFH� RI� FDGPLXP� WHOOXULGH� ILOPV SUHVHQWV� DV� DGVRUEHG� K\GURFDUERQ� FRP� SRXQGV��2[\JHQ�LV�LQ�IRUP�RI�7H2���&G2��RU&G�2+���� DQG� 2�� DQG�RU� ZDWHU� DGVRUEHGIURP�DLU��(OHPHQWV�RI�VXEVWUDWHV��7L��0R��6L� JLYH�YHU\�VPDOO�VLJQDOV�RU�QR�VLJQDO��EHFDXVH WKH�ILOP�FRPSOHWHO\�FRYHUV�WKH�VXEVWUDWH�DQG LV� QRQSRURXV�� 7KH� &G7H� DQG� 7H2�� VLJQDOVIRU� WKH� ILOPV� DUH� YHU\� ZHOO� UHVROYHG� IRU 7H�G� OLQH� �p°m� ������� H9� IRU� &G7H� DQGp°m� �������H9�IRU�7H2��� DFFRUGLQJ� WR� UHI�HUHQFH� GDWD� IRU� WKHVH� FRPSRXQGV� >������@� ZKLOH�WKH�VLJQDO�IRU�&G�2+����RU�IRU�&G2��LVQRW�UHVROYHG�IRU�&G�G�OLQH�EXW�FDQ�EH�FDOFX� ODWHG� IURP� UDWLR� RI� FRQFHQWUDWLRQV� &G�7H �)LJ����D�E��� 7KH�&G7H� DPRXQWV� GLIIHU� YHU\ VOLJKWO\� IRU� GLIIHUHQW� VDPSOHV�� EXW� UHODWLYH FRQWHQWV�RI�R[LGHV�DQG�K\GUR[LGHV�GLIIHU�WR D�FRQVLGHUDEOH�H[WHQW� $FFRUGLQJ� WR� ;36� GDWD�� WKH� VXUIDFHV� RI WKH� ILOPV� HOHFWURGHSRVLWHG� RQ� WLWDQLXP� QL� WULGH� VXEVWUDWHV� DW� SRWHQWLDOV�(F� �Ü�����9�6DPSOH����DUH�HQULFKHG�LQ�WHOOXULXP��,Q�WKH ILOPV� REWDLQHG� DW�(F� �Ü�����9� �6DPSOH����WKH� WHOOXULXP� FRQWHQW� LV� VRPHZKDW� KLJKHU WKDQ�WKDW�RI�FDGPLXP��DQG�WKH�OD\HUV�GHSRV� LWHG�DW�(F� �Ü�����9� �6DPSOH����KDYH�HTXDODPRXQWV�RI�WKHVH�HOHPHQWV��7DEOH�����$QDO\� VLV� RI� ;�UD\� SKRWRHOHFWURQ� VSHFWUD� RI� VXU� IDFHV� IRU� WKH� 6DPSOHV� ��� �� DQG� �� UHYHDOHG FRPPHQVXUDEOH� FRQFHQWUDWLRQV� RI� &G7H� 7H2�� DQG� &G2� RU� &G�2+��� �7DEOH����� 1RWHWKDW� DXWKRUV� >����@� DOVR� REVHUYH� ODUJH� R[\� JHQ�DPRXQWV�DW�WKH�VXUIDFH�RI�WKH�HOHFWURGH� SRVLWHG� FDGPLXP� WHOOXULGH� ILOPV��PRUHRYHU� LW�ZDV�SRLQWHG�RXW�WKDW�7H2��ZDV�SUHVHQWHGDW� WKH� ILOP� VXUIDFH�� %HVLGHV�� DXWKRUV� >�@ KDYH�QRWHG�D�SRVLWLYH�LQIOXHQFH�RI�R[\JHQ�LQ WKH� HOHFWURGHSRVLWHG� &G7H� ILOPV� RQ� WKH FKDQJH�RI�WKHLU�W\SH�RI�FRQGXFWLYLW\�IURP�Q� WR� ¯�� IRU� WKHLU�XVH� DV� EDVH� OD\HUV� RI�SKRWR� YROWDLF� GHYLFHV�� 7KH� FDGPLXP� K\GUR[LGH DQG�RU� FDGPLXP� R[LGH� LPSXULWLHV� UHYHDOHG E\�;36� DUH� IRUPHG�RQ� WKH� VXUIDFH� DV� D� UH� VXOW� RI� DLU� R[LGDWLRQ� RI� FDGPLXP� WHOOXULGH� )LJ�����9ROWDPPRJUDPPV� RQ�7L1� VXEVWUDWHV� LQ VROXWLRQ� FRUUHVSRQGLQJ� WR� HOHFWURO\WH� IRU�&G7H HOHFWURGHSRVLWLRQ� ����� 0� &G62��� ����Ü��0 7H2�������0�1D�62��������0�+�62���DW�SRWHQ�WLDO�VFDQQLQJ�UDWHV��P9�V������������������������� ��� ����� ���� ����� ���� ����� ���� ����� ���� XQGHU HOHFWURO\WH�VWLUULQJ����� 1�3�.ORFKNR�HW�DO����(OHFWURFKHPLFDO�WHFKQLTXH�IRU���� )XQFWLRQDO�PDWHULDOV������������� ��� %HVLGHV�� WKH� FRQVLGHUDEOH� DPRXQWV� RI� FDG� PLXP�K\GUR[LGH� FDQ�EH� H[SODLQHG�E\� LQWHU� DFWLRQ� RI� FDGPLXP� LRQV� DQG� K\GUR[\O JURXSV�IRUPHG�DFFRUGLQJ�WR�UHDFWLRQ����� ,RQ�HWFKLQJ�RI�WKH�VXUIDFH�GHFUHDVHV�UHOD� WLYH� FRQWHQW� RI� WKH� R[LGHV�� WKH� UHODWLRQ &G�7H� UHPDLQLQJ� HVVHQWLDOO\� WKH� VDPH�� ,Q 7H�G�VSHFWUXP�DIWHU�LRQ�HWFKLQJ��LW�LV�SRVVL� EOH�WR�GLVWLQJXLVK�WKH� OLQH�FRUUHVSRQGLQJ�WR WKH�ELQGLQJ�HQHUJ\��pE� �������H9��RI�7H2� �)LJ����°��� 7DEOH��� GHPRQVWUDWHV� GLVDSSHDU� LQJ� RI� FDGPLXP� K\GUR[LGH�� GHFUHDVLQJ� RI 7HH�� DQG� LQFUHDVLQJ� RI� FDGPLXP� WHOOXULGHDQG� RI� HOHPHQWDO� WHOOXULXP� FRQWHQWV� LQ� WKH OD\HUV�DV�D�UHVXOW�RI�LRQ�HWFKLQJ�RI�6DPSOH��� 6R�� WKH� PHFKDQLVP� RI� FDGPLXP� WHOOXULGH HOHFWURGHSRVLWLRQ� LQFOXGLQJ� WKH� HOHFWUR� FKHPLFDO� VWDJH� RI� HOHPHQWDO� WHOOXULXP� IRU� PDWLRQ�IROORZHG�E\�FKHPLFDO�VWDJH�UHVXOWLQJ LQ�IRUPDWLRQ�RI�&G7H�DQG�7H2��UHYHDOHG�E\ )LJ�����;36�VSHFWUD�RI�&G�G��7H�G�FRUH�OHYHOV�RI�WKH�VXUIDFHV�RI�VDPSOHV�1R����D������E���6DPSOH�� DIWHU�UHPRYLQJ�����QP�WKLFN�OD\HU�E\�LRQ�HWFKLQJ��F���&G7H������7H2�������7H����� 7DEOH���� (OHFWURGHSRVLWLRQ� UHJLPHV�� DWRPLF� FRQFHQWUDWLRQV� RI� HOHPHQWV� DQG� FKHPLFDO� FRPSRXQGV RQ�WKH�VXUIDFH�RI�FDGPLXP�WHOOXULGH�VDPSOHV��tc6�GDWD� 6DPSOH 1R� (OHFWURGHSRVLWLRQ�UHJLPHV $WRPLF�FRQFHQWUDWLRQV��� &KHPLFDO�FRPSRXQGV��� 6XEVWUDWH &DWKRGH SRWHQWLDO� p°��9�6$(� &XUUHQW GHQVLW\� M°�Pk�°P� & 2 &G 7H &G7H 7H2� &G�2+��DQG�RU &G2 � 7L1 Ü���� ���Ü��� ���� ���� ��� ���� �� �� �� � 7L1 Ü���� ���Ü��� ���� ���� ��� ���� �� �� �� � 7L1 Ü���� ���Ü��� ���� ���� ��� ��� �� �� �� � 0R Ü���� ���Ü��� ���� ���� ��� ��� �� �� �� � 0R Ü���� ���Ü��� ���� ���� ��� ��� �� �� �� � 0R Ü���� ���Ü��� ���� ���� ��� ��� �� � �� 1�3�.ORFKNR�HW�DO����(OHFWURFKHPLFDO�WHFKQLTXH�IRU���� ��� )XQFWLRQDO�PDWHULDOV������������� YROWDPPHWULF� DQDO\VLV� LV� ZHOO� FRQILUPHG� E\ ;36�GDWD� 7KH� YROWDPPRJUDPPV� LQ� VROXWLRQ� FRUUH� VSRQGLQJ�WR�WKH�HOHFWURO\WH�IRU�FDGPLXP�WHO� OXULGH� HOHFWURGHSRVLWLRQ� RQ� PRO\EGHQXP VXEVWUDWHV� �)LJ����� FRPSULVH� WZR� SHDNV� RI WHOOXULXP� UHGXFWLRQ� �WKH� ILUVW� LV� DEVRUSWLRQ DQG� WKH� VHFRQG� FRUUHVSRQGV� WR� LUUHYHUVLEOH HOHFWURFKHPLFDO� UHGXFWLRQ�RI� WHOOXULXP�ZLWK VXEVHTXHQW�VORZ�FKHPLFDO�UHDFWLRQ�RI�GLVSUR� SRUWLRQLQJ� DFFRUGLQJ� WR� HTXDWLRQV� ���� DQG ����� UHVSHFWLYHO\��� 7KH� FXUUHQW� ULVH� FRUUH� VSRQGLQJ�WR�WKH�ZDWHU�UHGXFWLRQ�DQG�IRUPDWLRQ RI�K\GURJHQ�DQG�K\GUR[\O�JURXSV�DFFRUGLQJ WR� UHDFWLRQ� ���� LV� REVHUYHG� DW�(F� �Ü����9�DV� LQ� EDFNJURXQG� DQG� LQ� SDUWLDO� VROXWLRQV IRU� WKRVH� VXEVWUDWHV�� 6XFK� PHFKDQLVP� RI HOHFWURFKHPLFDO�SURFHVV�H[SODLQV�ZK\�QHDUO\ HTXDO� DPRXQWV� RI� FDGPLXP� DQG� WHOOXULXP DWRPV�DUH�UHYHDOHG�RQ�WKH�PRO\EGHQXP�VXE� VWUDWH�RQO\�LQ�WKH�FDVH�RI�FDWKRGLF�SRWHQWLDO (F� �Ü�����9��7DEOH�����7KH�YHU\�VPDOO�VKLIWWRZDUGV� QHJDWLYH� SRWHQWLDOV� �(F� �Ü�����9�UHVXOWV�LQ�D�FRQVLGHUDEOH�LQFUHDVH�RI�RI�FDG� PLXP� FRQWHQW� LQ� WKH� ILOPV� RQ�PRO\EGHQXP VXEVWUDWHV�DQG�WR�WKH�ODUJH�DPRXQWV�RI�FDG� PLXP� K\GUR[LGH� LQ� WKRVH� ILOPV� DV� D� UHVXOW RI� LQWHUDFWLRQ� RI� FDGPLXP� LRQV� DQG� K\� GUR[\O�JURXSV�DFFRUGLQJ�WR�UHDFWLRQ����� 6R��EDVLQJ�RQ�WKH�NLQHWLF�VWXGLHV�RI�VHSD� UDWH�DQG� MRLQW�HOHFWURFKHPLFDO�GHSRVLWLRQ�RI FDGPLXP�DQG�WHOOXULXP�RQ�PRO\EGHQXP�DQG WLWDQLXP� QLWULGH� VXEVWUDWHV� DQG� FRQVLGHUD� WLRQ� RI� ;36� GDWD� IRU� WKH� HOHFWURGHSRVLWHG ILOPV�� LW� LV� SRVVLEOH� WR�PDNH� IROORZLQJ� FRQ� FOXVLRQV�� 2Q� FKHPLFDOO\� QHXWUDO� 7L1� VXE� VWUDWHV�WKH�LUUHYHUVLEOH�HOHFWURFKHPLFDO�7H2�UHGXFWLRQ� WR� HOHPHQWDO� WHOOXULXP� LV� DFFRP� SDQLHG�E\�FKHPLFDO�UHDFWLRQ�EHWZHHQ�7H�DQG FDGPLXP�LRQV�UHVXOWLQJ�LQ�IRUPDWLRQ�RI�FDG� PLXP� WHOOXULGH� DQG� 7H2�� DV� VLGH� SURGXFW�7KH� 7H2�� DQG� HOHPHQWDO� WHOOXULXP� LPSXUL� WLHV�DUH�IRXQG�LQ�GHHS�OD\HUV�RI�WKRVH�ILOPV� %HFDXVH�RI�DLU�R[LGDWLRQ��WKH�VXUIDFH�RI�FDG� PLXP�WHOOXULGH�ILOPV�FRQWDLQV�ODUJH�DPRXQWV RI� WHOOXULXP� R[LGH� DQG� FDGPLXP� R[LGH DQG�RU� FDGPLXP� K\GUR[LGH�� 7KH� GHSRVLWLRQ RI�WKH�ILOPV�ZLWK�HTXDO�DPRXQWV�RI�FDGPLXP DQG� WHOOXULXP� DWRPV� RQ� WKH� 7L1� VXEVWUDWHV RFFXUV� ZLWKLQ� WKH� FDWKRGLF� SRWHQWLDO� UDQJH IURP� Ü����9� WR� Ü����� 9�� 'XH� WR� FDWDO\WLF LQIOXHQFH�RI�PRO\EGHQXP�RQ�HOHFWURFKHPLFDO UHDFWLRQ�RI�ZDWHU�UHGXFWLRQ�DFFRPSDQLHG�E\ LQFUHDVLQJ�DONDOLQLW\�RI�QHDU�HOHFWURGH�VSDFH DV� ZHOO� DV� D� UHVXOW� RI� HOHPHQWDO� WHOOXULXP DEVRUSWLRQ�RQ�PRO\EGHQXP�VXUIDFH��D�VKDUS ULVH� RI� FDGPLXP� K\GUR[LGH� FRQWHQW� LQ� WKH ILOPV�RQ�PRO\EGHQXP�VXEVWUDWHV�LV�REVHUYHG DW� HOHFWURGHSRVLWLRQ� SRWHQWLDOV� PRUH� QHJD� WLYH�WKDQ�Ü����9��6R��IURP�WKH�SRLQW�RI�YLHZ RI�WHFKQLFDO�XVH�RI�VXFK�HOHFWURO\WHV�IRU�FDG� 7DEOH����$WRPLF�FRQFHQWUDWLRQV�RI�HOHPHQWV�DQG�FKHPLFDO�FRPSRXQGV�UHYHDOHG�DW�WKH�VXUIDFH�DQG LQ�GHSWK�RI�6DPSOH�� ,RQLF HWFKLQJ GHSWK $WRPLF�FRQFHQWUDWLRQV��� &KHPLFDO�FRPSRXQGV��� & 2 &G 7H 7H�&G 7L &G7H 7H2� &G�2+��DQG�RU &G2 7H� 6XUIDFH ���� ���� ��� ���� ��� � �� �� �� � ���QP ���� ���� ���� ���� ��� � �� �� � � ���QP ���� ���� ���� ���� ��� � �� �� � �� ���QP ���� ���� ���� ���� ��� � �� �� � �� ����QP ���� ���� ���� ���� ��� � �� �� � �� ����QP ��� ���� ���� ���� ��� ��� �� �� � �� )LJ�����9ROWDPPRJUDPPV�RQ�0R�VXEVWUDWHV�LQ VROXWLRQ� IRU� &G7H� HOHFWURGHSRVLWLRQ� ����� 0 &G62��� ����Ü�� 0� 7H2��� ���� 0� 1D�62������� 0�+�62��� DW� SRWHQWLDO� VFDQQLQJ� UDWHV�P9�V����������������������������������������� 1�3�.ORFKNR�HW�DO����(OHFWURFKHPLFDO�WHFKQLTXH�IRU���� )XQFWLRQDO�PDWHULDOV������������� ��� PLXP� WHOOXULGH� HOHFWURFKHPLFDO� GHSRVLWLRQ� PRO\EGHQXP�LV�DQ�XQGHVLUDEOH�VXEVWUDWH� 5HIHUHQFHV � ���)�.DUGLJDQ��'�0DR��$�%DOFLRJOX� HW� DO���3URF� RI���WK�396&��$QDKHLP��&$���������S����� � ���&�'�/RNKDQGH��6�+�3DZDU��3K\V��6WDW��6RO��D�� ��������������� � ���6�6LHEHQWULWW�� .�(UQVW�� &��+�)LVFKHU� HW� DO�� 3URF��RI���WK�(XURSHDQ�3KRWRYROWDLF�6RODU�(Q� HUJ\�&RQI���%DUFHORQD��������S������ � ���0�1HXPDQQ�6SDOODUW�� *�7DPL]KPDQL�� 7KLQ 6ROLG�)LOPV������������������ � ���)�-�$OYDUHV�� 1�'�/DOOD�� $�/DPDQGH�� 3URF��RI ��WK�396&��$QDKHLP��&$���������S����� � ���(�6KNHGL��5�/�5RG��,(((������������� � ���*�3�+HUQDQGH]�� ;�0DWKHZ�� -�3�(QULTXH]� HW DO���6RODU�(QHUJ\�0DWHULDOV� �6RODU�&HOOV����� ����������� � ���$�0�%RQG��0RGHUQ�3RODURJUDSKLF�0HWKRGV� LQ $QDO\WLFDO� &KHPLVWU\�� 0DUFHO� 'HNNHU�� ,QF�� 1HZ�<RUN�DQG�%DVHO�������� � ���=�*DOXV��7HRUHW\F]QH�3RGVWDZ\�(OHFWURDQDOL]\ &KHPLF]QHM��3DQVWZRZH�Z\GDZQLFWZR�QDXNRZH� :DUV]DZD������LQ�3ROLVK��� ����9�$�5DELQRYLWFK�� =�-�+DYLQ�� 6KRUW� &KHPLFDO +DQGERRN��.KLPLD��/HQLQJUDG��������� ����-�-�/XU\H�� +DQGERRN� RQ� $QDO\WLFDO� &KHPLV� WU\��.KLPLD��0RVFRZ�������� ����3UDFWLFDO�6XUIDFH�$QDO\VLV�E\�$XJHU�DQG�;�UD\ 3KRWRHOHFWURQ� 6SHFWURVFRS\�� HG�� E\�'�%ULJJV� 0�3�6HDFK��-�:LOH\� �6RQV�1HZ�<RUN�������� ������p�*DOORQ��LQ��(OHFWURQ�DQG�,RQ�6SHFWURVFRS\ RI� 6ROLGV�� HG�� E\� /�)LHUPDQV�� -�9HQQLN� :�'HNH\VHU�� 3OHQXP� 3UHVV�� 1HZ� <RUN� DQG /RQGRQ���������S����� pãË}�¯º²LäL�ÓË�º°È�ÎËÓÓ«�¹ãLmº}�Ëã�¯Ò���}È�äL s���zãº�}º��s�i�{ºã}ºmÈ��l�{�iº­¯º�mº¯° }È�{�c�zº¹È�����k��L lË�º�ÈäÒ� ²¯ºÓºmºã �Èä¹Ë¯ºäË�¯L�� �È� �Ò}ãL�Óº�� mºã �Èä¹Ë¯ºäË�¯L�� �º°ãL�ÎËÓº� äË� ²ÈÓLÏäÒ� ËãË}�¯º²LäL�ÓÒ²� ¹¯º�˰Lm� m� ËãË}�¯ºãL�L� �ã«� º�˯ÎÈÓÓ«� ÓȹLm¹¯ºmL�ÓÒ}ºmÒ² ¹ãLmº}� �Ëã�¯Ò��� }È�äL � �È� �� mL�¹ºmL�ÓÒ²� ®ºä�� ¹È¯�LÈã ÓÒ²� ¯ºÏ�ÒÓȲ�� «}L� mäL�� � LºÓÒ�}È�äL � L��Ëã�¯���{Ò«mãËÓº�mL�äLÓÓº°�L���}È�º�ÓÒ²�¹¯º�˰Ȳ�ÓÈ�²LäL�Óº�LÓ˯�ÓÒ² ¹L�}ãÈ�}Ȳ�Ï�ÓL�¯Ò����Ò�ÈÓ��L�ÓÈ�}È�ÈãL�Ò�Óº�È}�ÒmÓL®�¹ºm˯²ÓL�äºãL­�ËÓ���sÈ�¹L�°�ÈmL ¹¯ºmË�ËÓÒ²� �º°ãL�ÎËÓ � ¹º«°ÓËÓº� ¹¯Ò¯º��� �ºäL�º}�� «}L� �� ¯º­º�L� mÒ«mãËÓº� äË�º�ºä ¯ËÓ��ËÓLm° }º�� Áº�ºËãË}�¯ºÓÓº�� °¹Ë}�¯º°}º¹L�� ÓÈ� ¹ºm˯²ÓL� L� m� º­�¼äL� ¹ãLmº}� �Ëã�¯Ò�� }È�äL �� ËãË}�¯ºº°È�ÎËÓÒ²�ÓÈ� ¹L�}ãÈ�}Ò� Ï� ÓL�¯Ò��� �Ò�ÈÓ�� L�äºãL­�ËÓ����º��ºÏmºãÒ㺠Ï�L®°ÓÒ�Ò�mÒ­L¯�¹È¯ÈäË�¯Lm�¹¯º�˰��ËãË}�¯ºº°È�ÎËÓÓ«�L�äÈ�˯LÈã��¹L�}ãÈ�º}��«}L�ÏÈ­ËÏ� ¹Ë�� � �mÒ�º�ºmãËÓÓ«�¹ãLmº}�°�˲LºäË�¯Ò�Óº�º�°}ãÈ��� 1�3�.ORFKNR�HW�DO����(OHFWURFKHPLFDO�WHFKQLTXH�IRU���� ��� )XQFWLRQDO�PDWHULDOV�������������
id nasplib_isofts_kiev_ua-123456789-137232
institution Digital Library of Periodicals of National Academy of Sciences of Ukraine
issn 1027-5495
language English
last_indexed 2025-11-26T00:11:07Z
publishDate 2008
publisher НТК «Інститут монокристалів» НАН України
record_format dspace
spelling Klochko, N.P.
Volkova, N.D.
Dobrotvorskaya, M.V.
Kopach, V.R.
T.A. Li
2018-06-17T09:14:47Z
2018-06-17T09:14:47Z
2008
Electrochemical deposition of cadmium telluride films / N.P. Klochko, N.D. Volkova, M.V. Dobrotvorskaya, V.R. Kopach, T.A. Li // Functional Materials. — 2008. — Т. 15, № 1. — С. 119-126. — Бібліогр.: 13 назв. — англ.
1027-5495
https://nasplib.isofts.kiev.ua/handle/123456789/137232
The mechanisms of electrochemical processes in the electrolyte for cadmium telluride semi-conducting film deposition and in corresponding partial solutions containing cadmium and tellurium ions have been studied by voltammetry with linear potential scanning and by cyclic voltammetry. The differences between cathodic processes on chemically inert titanium nitride substrates and catalytically active molybdenum surface have been revealed. Basing on these studies, the nature of impurities discovered in this work by X-ray photoelectron spectroscopy at the surface and inside the cadmium telluride films deposited on molybdenum and titanium nitride surfaces has been explained. The latter made it possible to select the electrodeposition parameters and the substrate material which provide the stoichiometric film composition.
en
НТК «Інститут монокристалів» НАН України
Functional Materials
Technology
Electrochemical deposition of cadmium telluride films
Електохімічне осадження плівок телуриду кадмію
Article
published earlier
spellingShingle Electrochemical deposition of cadmium telluride films
Klochko, N.P.
Volkova, N.D.
Dobrotvorskaya, M.V.
Kopach, V.R.
T.A. Li
Technology
title Electrochemical deposition of cadmium telluride films
title_alt Електохімічне осадження плівок телуриду кадмію
title_full Electrochemical deposition of cadmium telluride films
title_fullStr Electrochemical deposition of cadmium telluride films
title_full_unstemmed Electrochemical deposition of cadmium telluride films
title_short Electrochemical deposition of cadmium telluride films
title_sort electrochemical deposition of cadmium telluride films
topic Technology
topic_facet Technology
url https://nasplib.isofts.kiev.ua/handle/123456789/137232
work_keys_str_mv AT klochkonp electrochemicaldepositionofcadmiumtelluridefilms
AT volkovand electrochemicaldepositionofcadmiumtelluridefilms
AT dobrotvorskayamv electrochemicaldepositionofcadmiumtelluridefilms
AT kopachvr electrochemicaldepositionofcadmiumtelluridefilms
AT tali electrochemicaldepositionofcadmiumtelluridefilms
AT klochkonp elektohímíčneosadžennâplívokteluridukadmíû
AT volkovand elektohímíčneosadžennâplívokteluridukadmíû
AT dobrotvorskayamv elektohímíčneosadžennâplívokteluridukadmíû
AT kopachvr elektohímíčneosadžennâplívokteluridukadmíû
AT tali elektohímíčneosadžennâplívokteluridukadmíû