Synthesis of charged silica films of porous structure
A new technique has been proposed to obtain thin charged dielectric silica films with porous structure on a Si surface. The film composition and charge state of the dielectric/semiconductor system obtained have been studied. Thickness and porosity degree of the synthesized films have been estimated....
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| Published in: | Functional Materials |
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| Date: | 2008 |
| Main Authors: | , , , |
| Format: | Article |
| Language: | English |
| Published: |
НТК «Інститут монокристалів» НАН України
2008
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| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/137233 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Synthesis of charged silica films of porous structure / Yu.S. Zharkikh, S.V. Lysochenko, O.A. Pylypenko, O.V. Tretyak // Functional Materials. — 2008. — Т. 15, № 1. — С. 127-130. — Бібліогр.: 10 назв. — англ. |
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Digital Library of Periodicals of National Academy of Sciences of Ukraine| _version_ | 1862706653760061440 |
|---|---|
| author | Zharkikh, Yu.S. Lysochenko, S.V. Pylypenko, O.A. Tretyak, O.V. |
| author_facet | Zharkikh, Yu.S. Lysochenko, S.V. Pylypenko, O.A. Tretyak, O.V. |
| citation_txt | Synthesis of charged silica films of porous structure / Yu.S. Zharkikh, S.V. Lysochenko, O.A. Pylypenko, O.V. Tretyak // Functional Materials. — 2008. — Т. 15, № 1. — С. 127-130. — Бібліогр.: 10 назв. — англ. |
| collection | DSpace DC |
| container_title | Functional Materials |
| description | A new technique has been proposed to obtain thin charged dielectric silica films with porous structure on a Si surface. The film composition and charge state of the dielectric/semiconductor system obtained have been studied. Thickness and porosity degree of the synthesized films have been estimated. The films have been shown to be similar in structure to silica aerogel. The films using in the semiconductor microelectronics, in particular, for sensors and solar cells is proposed.
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| first_indexed | 2025-12-07T17:00:54Z |
| format | Article |
| fulltext | |
| id | nasplib_isofts_kiev_ua-123456789-137233 |
| institution | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| issn | 1027-5495 |
| language | English |
| last_indexed | 2025-12-07T17:00:54Z |
| publishDate | 2008 |
| publisher | НТК «Інститут монокристалів» НАН України |
| record_format | dspace |
| spelling | Zharkikh, Yu.S. Lysochenko, S.V. Pylypenko, O.A. Tretyak, O.V. 2018-06-17T09:15:13Z 2018-06-17T09:15:13Z 2008 Synthesis of charged silica films of porous structure / Yu.S. Zharkikh, S.V. Lysochenko, O.A. Pylypenko, O.V. Tretyak // Functional Materials. — 2008. — Т. 15, № 1. — С. 127-130. — Бібліогр.: 10 назв. — англ. 1027-5495 https://nasplib.isofts.kiev.ua/handle/123456789/137233 A new technique has been proposed to obtain thin charged dielectric silica films with porous structure on a Si surface. The film composition and charge state of the dielectric/semiconductor system obtained have been studied. Thickness and porosity degree of the synthesized films have been estimated. The films have been shown to be similar in structure to silica aerogel. The films using in the semiconductor microelectronics, in particular, for sensors and solar cells is proposed. en НТК «Інститут монокристалів» НАН України Functional Materials Technology Synthesis of charged silica films of porous structure Синтез заряджених плівок кремнезему з пористою структурою Article published earlier |
| spellingShingle | Synthesis of charged silica films of porous structure Zharkikh, Yu.S. Lysochenko, S.V. Pylypenko, O.A. Tretyak, O.V. Technology |
| title | Synthesis of charged silica films of porous structure |
| title_alt | Синтез заряджених плівок кремнезему з пористою структурою |
| title_full | Synthesis of charged silica films of porous structure |
| title_fullStr | Synthesis of charged silica films of porous structure |
| title_full_unstemmed | Synthesis of charged silica films of porous structure |
| title_short | Synthesis of charged silica films of porous structure |
| title_sort | synthesis of charged silica films of porous structure |
| topic | Technology |
| topic_facet | Technology |
| url | https://nasplib.isofts.kiev.ua/handle/123456789/137233 |
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