Growth and structure of WC/Si multilayer x-ray mirror

Growth and structure of WC/Si multilayer x-ray mirror

WC/Si multilayer X-ray mirrors (MXMs) with nominal layers thicknesses of 0.2…30.3 nm (periods: 0.7…38.9 nm) were deposited by direct current magnetron sputtering and studied by X-ray diffraction and cross-sectional transmission electron microscopy (TEM). Carbide and silicon layers are amorphous thro...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Veröffentlicht in:	Вопросы атомной науки и техники
Datum:	2018
Hauptverfasser:	Pershyn, Y.P., Chumak, V.S., Shypkova, I.G., Mamon, V.V., Devizenko, A.Yu., Kondratenko, V.V., Reshetnyak, M.V., Zubarev, E.N.
Format:	Artikel
Sprache:	English
Veröffentlicht:	Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2018
Schlagworte:	Физика и технология конструкционных материалов
Online Zugang:	https://nasplib.isofts.kiev.ua/handle/123456789/137337
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!
Назва журналу:	Digital Library of Periodicals of National Academy of Sciences of Ukraine
Zitieren:	Growth and structure of WC/Si multilayer x-ray mirror / Y.P. Pershyn, V.S. Chumak, I.G. Shypkova, V.V. Mamon, A.Yu. Devizenko, V.V. Kondratenko, M.V. Reshetnyak, E.N. Zubarev // Вопросы атомной науки и техники. — 2018. — № 1. — С. 69-76. — Бібліогр.: 8 назв. — англ.

Institution

Digital Library of Periodicals of National Academy of Sciences of Ukraine

Ähnliche Einträge

Application of carbon as a barrier layer in Sc/Si multilayer X-ray mirrors
von: Pershyn, Yu.P., et al.
Veröffentlicht: (2018)

Structure and mechanical stresses in TaSi₂/Si multilayer
von: Devizenko, A.Yu., et al.
Veröffentlicht: (2018)

Nanoscale Co/C multilayers for "carbon window" Schwarzchild objective
von: Bugayev, Ye.A., et al.
Veröffentlicht: (2007)

Change of Structure and Optical Properties of Multilayer C/Si X-Ray Mirrors under Heating
von: I. A. Zhuravel, et al.
Veröffentlicht: (2013)

Features of diffusion mixing in Mo/Si multilayers
von: Penkov, A.V., et al.
Veröffentlicht: (2005)

Structure and stress state of TiN and Ti₀.₅₋xAl₀.₅YxN coatings prepared by the PIII&D technique from filtered vacuum-arc plasma
von: Reshetnyak, E.N.
Veröffentlicht: (2014)

Mass distribution of sputtered cathode material in the reflex discharge along the magnetic field mirror configuration
von: Kovtun, Yu.V, et al.
Veröffentlicht: (2016)

The contribution to the scattering of electrons in the magnetoresistance of multilayers of nonmagnetic metals
von: Protsenko, I.Yu., et al.
Veröffentlicht: (2016)

Investigation of the structure of interlayer interfaces in multilayer periodic compositions of Cr/Sc and Co/C by the method X-ray diffuse scattering
von: I. A. Zhuravel, et al.
Veröffentlicht: (2011)

Multilayer X-ray mirrors Mo-B₄C- new crystals-analyzers for wavelength range of 5 to 12 A
von: Kopylets, I.A., et al.
Veröffentlicht: (2007)

The methodology for X-ray diffraction investigation of icosahedral quasicrystals substructure
von: Bazdyreva, S.V., et al.
Veröffentlicht: (2013)

Formation and evolution of intermixing zones in C/Si multilayer under heating
von: Zhuravel, I.A., et al.
Veröffentlicht: (2014)

XRF with a primary X-rays from the target with monoisotopical surface layer
von: Levenets, V., et al.
Veröffentlicht: (2016)

Structure and mechanical properties of nitride multilayer systems on the basis of high entropy alloys and transition metals of group VI
von: Nyemchenko, U.S., et al.
Veröffentlicht: (2016)

Effect of time parameters of pulsed bias potential on intrinsic stress in TiN coating deposited from inclined ion beam
von: Kalinichenko, A.I., et al.
Veröffentlicht: (2018)

Influence of pressure of working atmosphere on the formation of phase-structural state and physical and mechanical properties of vacuum-arc multilayer coatings ZrN/CrN
von: Sobol, O.V., et al.
Veröffentlicht: (2016)

Structural transformation in C/Si multilayer after annealing
von: Zhuravel, I.O., et al.
Veröffentlicht: (2012)

Plasma streams mixing in two-channel T-shaped magnetic filter
von: Aksyonov, D.S., et al.
Veröffentlicht: (2011)

Synthesis of Ti-Si and Ti-Si-N coatings by condensation of filtered vacuum-arc plasma
von: Aksyonov, D.S., et al.
Veröffentlicht: (2009)

Initial stages of intermixing in Mo/Si multilayer coatings during He ion irradiation
von: D. L. Voronov, et al.
Veröffentlicht: (2004)

Study of the structural features of multilayer carbon nanotubes by X-ray analysis
von: E. A. Lysenkov, et al.
Veröffentlicht: (2015)

Anisotropy of elastic deformations in multilayer (In,Ga)As/GaAs structures with quantum wires: X-ray diffractometry study
von: Strelchuk, V.V., et al.
Veröffentlicht: (2005)

Structure and properties of W, Ta and W-Ta coatings deposited with the use of a gas-plasma source
von: Lunyov, V.M., et al.
Veröffentlicht: (2016)

The rhythmic build of sedimentary formations as a mirror of the washout areas paleotectonics
von: Troshchenko, V.V.
Veröffentlicht: (2013)

High-productive source of the cathodic vacuum-arc plasma with the rectilinear filter
von: Vasylyev, V.V., et al.
Veröffentlicht: (2013-10-23)

Structural transformation in C/Si multilayer after annealing
von: I. O. Zhuravel, et al.
Veröffentlicht: (2012)

Evolution of structure and mechanism of thermal decomposition of C/Si multilayers
von: I. A. Zhuravel, et al.
Veröffentlicht: (2014)

Effects of long-term ion bombardment on some optical properties of Rh film mirrors and bulk polycrystalline mirrors
von: Bondarenko, V.N., et al.
Veröffentlicht: (2006)

Simulation of low angle X-ray diffraction on multilayers subjected to diffusion
von: Fedorov, A.G.
Veröffentlicht: (2000)

Energy loss researches of diamond microgrinded laser mirrors by Fourier optics methods
von: Staschuk, V.S., et al.
Veröffentlicht: (2009)

The application of PIXE and PIGE for the studying of impurities distribution in space near the seam at welding products out of the Zr1%Nb alloy
von: Levenets, V.V., et al.
Veröffentlicht: (2009)

Plasma heating and confinement in the GOL-3 multiple mirror trap
von: Burdakov, A.V., et al.
Veröffentlicht: (2005)

Group delay investigation of N-order chirping mirrors
von: Lysak, V.V., et al.
Veröffentlicht: (2001)

Status of modern mirror studies in Novosibirsk
von: Kruglyakov, E.P., et al.
Veröffentlicht: (2005)

X-ray diffraction study of deformation state in InGaN/GaN multilayered structures
von: V. P. Kladko, et al.
Veröffentlicht: (2010)

X-ray diffraction study of deformation state in InGaN/GaN multilayered structures
von: Kladko, V.P., et al.
Veröffentlicht: (2010)

Structural transformation in Zr/Mg multilayer on Si substrate after annealing
von: Konotopsky, L.E., et al.
Veröffentlicht: (2017)

Structural transformation in Zr/Mg multilayer on Si substrate after annealing
von: Konotopsky, L.E., et al.
Veröffentlicht: (2018)

Structural-phase transformations in multilayer periodic compositions W-B4C with a period of 2.5 nm with heating
von: I. A. Kopylets, et al.
Veröffentlicht: (2011)

Problems of impurities deducing from multicomponent media at thermal heating, ionization and rotation of plasma in crossed fields
von: Yuferov, V.B., et al.
Veröffentlicht: (2016)