Effect of time parameters of pulsed bias potential on intrinsic stress in TiN coating deposited from inclined ion beam
In the model of the nonlocal thermoelastic peak of low-energy ion, the formation of intrinsic stress in the coating deposited from inclined ion beam at the pulsed bias potential with different values of pulse frequency f and duration tₚ is analyzed. The stress in the TiN coating deposited from Ti io...
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| Published in: | Вопросы атомной науки и техники |
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| Date: | 2018 |
| Main Authors: | , , , |
| Format: | Article |
| Language: | English |
| Published: |
Національний науковий центр «Харківський фізико-технічний інститут» НАН України
2018
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| Subjects: | |
| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/137375 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Effect of time parameters of pulsed bias potential on intrinsic stress in TiN coating deposited from inclined ion beam / A.I. Kalinichenko, S.S. Perepelkin, E.N. Reshetnyak, V.E. Strel’nitskij // Вопросы атомной науки и техники. — 2018. — № 1. — С. 114-117. — Бібліогр.: 10 назв. — англ. |