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Effect of time parameters of pulsed bias potential on intrinsic stress in TiN coating deposited from inclined ion beam

In the model of the nonlocal thermoelastic peak of low-energy ion, the formation of intrinsic stress in the coating deposited from inclined ion beam at the pulsed bias potential with different values of pulse frequency f and duration tₚ is analyzed. The stress in the TiN coating deposited from Ti io...

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Veröffentlicht in:	Вопросы атомной науки и техники
Datum:	2018
Hauptverfasser:	Kalinichenko, A.I., Perepelkin, S.S., Reshetnyak, E.N., Strel’nitskij, V.E.
Format:	Artikel
Sprache:	Englisch
Veröffentlicht:	Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2018
Schlagworte:	Физика и технология конструкционных материалов
Online Zugang:	https://nasplib.isofts.kiev.ua/handle/123456789/137375
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!
Назва журналу:	Digital Library of Periodicals of National Academy of Sciences of Ukraine
Zitieren:	Effect of time parameters of pulsed bias potential on intrinsic stress in TiN coating deposited from inclined ion beam / A.I. Kalinichenko, S.S. Perepelkin, E.N. Reshetnyak, V.E. Strel’nitskij // Вопросы атомной науки и техники. — 2018. — № 1. — С. 114-117. — Бібліогр.: 10 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine

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