Effect of time parameters of pulsed bias potential on intrinsic stress in TiN coating deposited from inclined ion beam

• Published in: Вопросы атомной науки и техники
• Date: 2018
• Main Authors: Kalinichenko, A.I., Perepelkin, S.S., Reshetnyak, E.N., Strel’nitskij, V.E.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2018
• Subjects: Физика и технология конструкционных материалов
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/137375
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Effect of time parameters of pulsed bias potential on intrinsic stress in TiN coating deposited from inclined ion beam / A.I. Kalinichenko, S.S. Perepelkin, E.N. Reshetnyak, V.E. Strel’nitskij // Вопросы атомной науки и техники. — 2018. — № 1. — С. 114-117. — Бібліогр.: 10 назв. — англ.

In the model of the nonlocal thermoelastic peak of low-energy ion, the formation of intrinsic stress in the coating deposited from inclined ion beam at the pulsed bias potential with different values of pulse frequency f and duration tₚ is analyzed. The stress in the TiN coating deposited from Ti io...