The correlation between film structure and surface temperature

The structure of metal films deposited from fluxes of energetic and thermalized sputtered atoms has been studied in detail. The growth surface temperature Tsurf developing during the condensation of sputtered atoms has been measured by two independent techniques. Variations in the film structure fro...

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Bibliographic Details
Published in:Functional Materials
Date:2009
Main Authors: Shaginyan, L.R., Belousov, I.V., Sedlyar, A.G.
Format: Article
Language:English
Published: НТК «Інститут монокристалів» НАН України 2009
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Online Access:https://nasplib.isofts.kiev.ua/handle/123456789/138930
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Journal Title:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Cite this:The correlation between film structure and surface temperature // L.R. Shaginyan, I.V. Belousov, A.G. Sedlyar // Functional Materials. — 2009. — Т. 16, № 4. — С. 384-389. — Бібліогр.: 11 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine