Multilayer film heterostructures. Silicides

• Published in: Functional Materials
• Date: 2009
• Main Authors: Sidorenko, S.I., Makogon, Yu.N., Pavlova, E.P., Voloshko, S.M.
• Format: Article
• Language: English
• Published: НТК «Інститут монокристалів» НАН України 2009
• Subjects: Characterization and properties
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/138937
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Multilayer film heterostructures. Silicides // S.I. Sidorenko, Yu.N. Makogon, E.P. Pavlova, S.M. Voloshko // Functional Materials. — 2009. — Т. 16, № 4. — С. 445-447. — Бібліогр.: 8 назв. — англ.

The formation of heterostructures based on nanoscale silicide films in limiting states are exemplified. The nanoscale silicide films of a required phase composition are shown to be obtainable by formation of specific zones, different type interlayers referred to as the diffusion-controlling layers b...