Manufacturing technology, optical and spectral properties of nano-structurized thin ZnO films

• Published in: Functional Materials
• Date: 2005
• Main Authors: Panasyuk, M.R., Turko, B.I., Kapustianik, V.B., Lubochkova, G.A., Rudyk, V.P., Vas`kiv, A.P., Davydov, V.M.
• Format: Article
• Language: English
• Published: НТК «Інститут монокристалів» НАН України 2005
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/139319
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Manufacturing technology, optical and spectral properties of nano-structurized thin ZnO films / M.R. Panasyuk, B.I. Turko, V.B. Kapustianik, G.A. Lubochkova, V.P. Rudyk, A.P. Vas`kiv, V.M. Davydov // Functional Materials. — 2005. — Т. 12, № 4. — С. 746-749. — Бібліогр.: 23 назв. — англ.

Dependence of cathodoluminescence parameters on the annealing temperature and RF ion etching has been studied for nano-structurized thin zinc oxide films obtained by RF magnetron reactive sputtering. The film structure has been characterized by X-ray diffraction. Thermal annealing and RF ion etch...