Features of diffusion mixing in Mo/Si multilayers

• Published in: Functional Materials
• Date: 2005
• Main Authors: Penkov, A.V., Voronov, D.L., Devizenko, A.Yu., Ponomarenko, A.G., Zubarev, E.N.
• Format: Article
• Language: English
• Published: НТК «Інститут монокристалів» НАН України 2005
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/139320
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Features of diffusion mixing in Mo/Si multilayers / A.V. Penkov, D.L. Voronov, A.Yu. Devizenko, A.G. Ponomarenko, E.N. Zubarev // Functional Materials. — 2005. — Т. 12, № 4. — С. 750-754. — Бібліогр.: 8 назв. — англ.

X-ray photoelectron spectroscopy, transmission electron microscopy, and and low-angle X-ray diffraction were used to investigate the diffusion intermixing in multilayer periodic Mo/Si coatings during manufacturing and heating at 340-380 ℃. It is shown that the mixed zones in the initial state consis...