Ellipsometric study of ion implanted copper surface and its room temperature oxidation

• Published in: Functional Materials
• Date: 2005
• Main Authors: Poperenko, L.V., Lohner, T., Stashchuk, V.S., Khanh, N.Q., Vinnichenko, M.V., Yurgelevych, I.V., Essam Ramadan Shaaban, Nosach, D.V.
• Format: Article
• Language: English
• Published: НТК «Інститут монокристалів» НАН України 2005
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/139709
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Ellipsometric study of ion implanted copper surface and its room temperature oxidation / L.V. Poperenko, T. Lohner, V.S. Stashchuk, N.Q. Khanh, M.V. Vinnichenko, I.V. Yurgelevych, Essam Ramadan Shaaban, D.V. Nosach // Functional Materials. — 2005. — Т. 12, № 1. — С. 83-86. — Бібліогр.: 4 назв. — англ.

The room temperature oxidation of ion-implanted copper surface has been studied ex situ and in situ using ellipsometry. The ellipsometric parameters T and Д were measured at light incidence angle 75° for different wavelength values in the range of 280 to 760 nm using averaging both over two azimutha...