Ellipsometric study of ion implanted copper surface and its room temperature oxidation
The room temperature oxidation of ion-implanted copper surface has been studied ex situ and in situ using ellipsometry. The ellipsometric parameters T and Д were measured at light incidence angle 75° for different wavelength values in the range of 280 to 760 nm using averaging both over two azimutha...
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| Published in: | Functional Materials |
|---|---|
| Date: | 2005 |
| Main Authors: | Poperenko, L.V., Lohner, T., Stashchuk, V.S., Khanh, N.Q., Vinnichenko, M.V., Yurgelevych, I.V., Essam Ramadan Shaaban, Nosach, D.V. |
| Format: | Article |
| Language: | English |
| Published: |
НТК «Інститут монокристалів» НАН України
2005
|
| Online Access: | https://nasplib.isofts.kiev.ua/handle/123456789/139709 |
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| Journal Title: | Digital Library of Periodicals of National Academy of Sciences of Ukraine |
| Cite this: | Ellipsometric study of ion implanted copper surface and its room temperature oxidation / L.V. Poperenko, T. Lohner, V.S. Stashchuk, N.Q. Khanh, M.V. Vinnichenko, I.V. Yurgelevych, Essam Ramadan Shaaban, D.V. Nosach // Functional Materials. — 2005. — Т. 12, № 1. — С. 83-86. — Бібліогр.: 4 назв. — англ. |
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