Enhancing parameters of silicon varactors using laser gettering

The authors investigate how and why defects influence the inverse characteristics of varactors. The paper presents experimental results on the effect laser gettering has on the electrical parameters of varactors. The mechanisms of the laser gettering effect on the parameters of varactors are analyze...

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Published in:Технология и конструирование в электронной аппаратуре
Date:2018
Main Authors: Vikulin, I.M., Litvinenko, V.N., Shutov, S.V., Maronchuk, A.I., Demenskiy, A.N., Glukhova, V.I.
Format: Article
Language:English
Published: Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України 2018
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Online Access:https://nasplib.isofts.kiev.ua/handle/123456789/140622
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Journal Title:Digital Library of Periodicals of National Academy of Sciences of Ukraine
Cite this:Enhancing parameters of silicon varactors using laser gettering / I.M. Vikulin, V.N. Litvinenko, S.V. Shutov, A.I. Maronchuk, A.N. Demenskiy, V.I. Glukhova // Технология и конструирование в электронной аппаратуре. — 2018. — № 2. — С. 29-32. — Бібліогр.: 14 назв. — англ.

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Digital Library of Periodicals of National Academy of Sciences of Ukraine

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