Features of special joints of grain boundaries in polysilicon films of equiaxial and dendritic structures

• Published in: Functional Materials
• Date: 2006
• Main Authors: Nakhodkin, N.G., Kulish, N.P., Lytvyn, P.M., Rodionova, T.V.
• Format: Article
• Language: English
• Published: НТК «Інститут монокристалів» НАН України 2006
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/144374
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Features of special joints of grain boundaries in polysilicon films of equiaxial and dendritic structures / N.G. Nakhodkin, N.P. Kulish, P.M. Lytvyn, T.V. Rodionova // Functional Materials. — 2006. — Т. 13, № 2. — С. 305-309. — Бібліогр.: 11 назв. — англ.

Comparative analysis of special grain boundary joints in polysilicon films with equiaxial and dendritic (undoped and phosphorus-doped) structure, prepared by low-pressure chemical vapor deposition, has been carried out using atomic force microscopy and transmission electron microscopy. The formation...