Using of proton beam writing techniques for fabrication of micro difraction gratings

• Published in: Вопросы атомной науки и техники
• Date: 2018
• Main Authors: Ponomarev, A.G., Kolinko, S.V., Rebrov, V.A., Kolomiets, V.N., Kravchenko, S.N.
• Format: Article
• Language: English
• Published: Національний науковий центр «Харківський фізико-технічний інститут» НАН України 2018
• Subjects: Приложения и технологии
• Online Access: https://nasplib.isofts.kiev.ua/handle/123456789/147662
• Journal Title: Digital Library of Periodicals of National Academy of Sciences of Ukraine
• Cite this: Using of proton beam writing techniques for fabrication of micro difraction gratings / A.G. Ponomarev, S.V. Kolinko, V.A. Rebrov, V.N. Kolomiets, S.N. Kravchenko // Вопросы атомной науки и техники. — 2018. — № 4. — С. 285-288. — Бібліогр.: 13 назв. — англ.

To obtain micrometric gratings with a high aspect ratio by lithographic technique, it is proposed to use a proton
 beam focused in a line and electromagnetic scanning in the transverse direction to irradiate the resistive material.
 Numerical modeling is carried out to optimize the p...